2/12/2012	12:58:22 AM	Helium valve closed
2/12/2012	12:58:22 AM	H2 valve closed
2/12/2012	12:58:22 AM	BCl3 valve closed
2/12/2012	12:58:22 AM	PH3 valve closed
2/12/2012	12:58:22 AM	SiCl4 pre valve closed
2/12/2012	12:58:22 AM	SiCl4 post valve closed
2/12/2012	12:58:22 AM	Main Vac valve closed
2/12/2012	12:58:22 AM	Bypass valve closed
2/12/2012	12:58:22 AM	Bubbler valve closed
2/12/2012	12:58:22 AM	Helium MFC set to  0.000000
2/12/2012	12:58:22 AM	H2 MFC set to  0.000000
2/12/2012	12:58:22 AM	BCl3 MFC set to  0.000000
2/12/2012	12:58:22 AM	PH3 MFC set to  0.000000
2/12/2012	12:58:22 AM	SiCl4 MFC set to  0.000000
2/12/2012	12:58:22 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	12:58:22 AM	Tube furnace set to 0
2/12/2012	12:58:25 AM	Helium valve closed
2/12/2012	12:58:25 AM	BCl3 valve closed
2/12/2012	12:58:25 AM	PH3 valve closed
2/12/2012	12:58:25 AM	SiCl4 pre valve closed
2/12/2012	12:58:25 AM	SiCl4 post valve closed
2/12/2012	12:58:25 AM	Main Vac valve closed
2/12/2012	12:58:25 AM	Bypass valve closed
2/12/2012	12:58:25 AM	Bubbler valve closed
2/12/2012	12:58:25 AM	H2 valve opened
2/12/2012	12:58:25 AM	Helium MFC set to  0.000000
2/12/2012	12:58:25 AM	H2 MFC set to  500.000000
2/12/2012	12:58:25 AM	BCl3 MFC set to  0.000000
2/12/2012	12:58:25 AM	PH3 MFC set to  0.000000
2/12/2012	12:58:25 AM	SiCl4 MFC set to  0.000000
2/12/2012	12:58:25 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	12:58:26 AM	Tube furnace set to 0
2/12/2012	12:59:32 AM	Helium valve closed
2/12/2012	12:59:32 AM	BCl3 valve closed
2/12/2012	12:59:32 AM	PH3 valve closed
2/12/2012	12:59:32 AM	SiCl4 pre valve closed
2/12/2012	12:59:32 AM	SiCl4 post valve closed
2/12/2012	12:59:32 AM	Main Vac valve closed
2/12/2012	12:59:32 AM	Bypass valve closed
2/12/2012	12:59:32 AM	H2 valve opened
2/12/2012	12:59:32 AM	Bubbler valve opened
2/12/2012	12:59:32 AM	Helium MFC set to  0.000000
2/12/2012	12:59:32 AM	H2 MFC set to  500.000000
2/12/2012	12:59:32 AM	BCl3 MFC set to  0.000000
2/12/2012	12:59:32 AM	PH3 MFC set to  0.000000
2/12/2012	12:59:32 AM	SiCl4 MFC set to  0.000000
2/12/2012	12:59:32 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	12:59:32 AM	Tube furnace set to 0
2/12/2012	12:59:33 AM	Helium valve closed
2/12/2012	12:59:33 AM	BCl3 valve closed
2/12/2012	12:59:33 AM	PH3 valve closed
2/12/2012	12:59:33 AM	SiCl4 pre valve closed
2/12/2012	12:59:33 AM	SiCl4 post valve closed
2/12/2012	12:59:33 AM	Main Vac valve closed
2/12/2012	12:59:33 AM	Bypass valve closed
2/12/2012	12:59:33 AM	H2 valve opened
2/12/2012	12:59:33 AM	Bubbler valve opened
2/12/2012	12:59:33 AM	Helium MFC set to  0.000000
2/12/2012	12:59:33 AM	H2 MFC set to  500.000000
2/12/2012	12:59:33 AM	BCl3 MFC set to  0.000000
2/12/2012	12:59:33 AM	PH3 MFC set to  0.000000
2/12/2012	12:59:33 AM	SiCl4 MFC set to  0.000000
2/12/2012	12:59:33 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	12:59:33 AM	Tube furnace set to 1000
2/12/2012	1:24:33 AM	Helium valve closed
2/12/2012	1:24:33 AM	BCl3 valve closed
2/12/2012	1:24:33 AM	PH3 valve closed
2/12/2012	1:24:33 AM	Main Vac valve closed
2/12/2012	1:24:33 AM	Bypass valve closed
2/12/2012	1:24:33 AM	H2 valve opened
2/12/2012	1:24:33 AM	SiCl4 pre valve opened
2/12/2012	1:24:33 AM	SiCl4 post valve opened
2/12/2012	1:24:33 AM	Bubbler valve opened
2/12/2012	1:24:33 AM	Helium MFC set to  0.000000
2/12/2012	1:24:33 AM	H2 MFC set to  450.000000
2/12/2012	1:24:33 AM	BCl3 MFC set to  0.000000
2/12/2012	1:24:33 AM	PH3 MFC set to  0.000000
2/12/2012	1:24:33 AM	SiCl4 MFC set to  50.000000
2/12/2012	1:24:33 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	1:24:34 AM	Tube furnace set to 1000
2/12/2012	1:40:34 AM	Helium valve closed
2/12/2012	1:40:34 AM	BCl3 valve closed
2/12/2012	1:40:34 AM	PH3 valve closed
2/12/2012	1:40:34 AM	SiCl4 pre valve closed
2/12/2012	1:40:34 AM	SiCl4 post valve closed
2/12/2012	1:40:34 AM	Main Vac valve closed
2/12/2012	1:40:34 AM	Bypass valve closed
2/12/2012	1:40:34 AM	H2 valve opened
2/12/2012	1:40:34 AM	Bubbler valve opened
2/12/2012	1:40:34 AM	Helium MFC set to  0.000000
2/12/2012	1:40:34 AM	H2 MFC set to  500.000000
2/12/2012	1:40:34 AM	BCl3 MFC set to  0.000000
2/12/2012	1:40:34 AM	PH3 MFC set to  0.000000
2/12/2012	1:40:34 AM	SiCl4 MFC set to  0.000000
2/12/2012	1:40:34 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	1:40:34 AM	Tube furnace set to 750
2/12/2012	1:55:34 AM	H2 valve closed
2/12/2012	1:55:34 AM	BCl3 valve closed
2/12/2012	1:55:34 AM	PH3 valve closed
2/12/2012	1:55:34 AM	SiCl4 pre valve closed
2/12/2012	1:55:34 AM	SiCl4 post valve closed
2/12/2012	1:55:34 AM	Main Vac valve closed
2/12/2012	1:55:34 AM	Bypass valve closed
2/12/2012	1:55:34 AM	Helium valve opened
2/12/2012	1:55:34 AM	Bubbler valve opened
2/12/2012	1:55:34 AM	Helium MFC set to  500.000000
2/12/2012	1:55:34 AM	H2 MFC set to  0.000000
2/12/2012	1:55:34 AM	BCl3 MFC set to  0.000000
2/12/2012	1:55:34 AM	PH3 MFC set to  0.000000
2/12/2012	1:55:34 AM	SiCl4 MFC set to  0.000000
2/12/2012	1:55:34 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	1:55:34 AM	Tube furnace set to 0
2/12/2012	2:15:34 AM	Helium valve closed
2/12/2012	2:15:34 AM	H2 valve closed
2/12/2012	2:15:34 AM	BCl3 valve closed
2/12/2012	2:15:34 AM	PH3 valve closed
2/12/2012	2:15:34 AM	SiCl4 pre valve closed
2/12/2012	2:15:34 AM	SiCl4 post valve closed
2/12/2012	2:15:34 AM	Main Vac valve closed
2/12/2012	2:15:34 AM	Bypass valve closed
2/12/2012	2:15:34 AM	Bubbler valve closed
2/12/2012	2:15:34 AM	Helium MFC set to  0.000000
2/12/2012	2:15:34 AM	H2 MFC set to  0.000000
2/12/2012	2:15:34 AM	BCl3 MFC set to  0.000000
2/12/2012	2:15:34 AM	PH3 MFC set to  0.000000
2/12/2012	2:15:34 AM	SiCl4 MFC set to  0.000000
2/12/2012	2:15:34 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:15:34 AM	Tube furnace set to 0
2/12/2012	2:35:34 AM	Helium valve closed
2/12/2012	2:35:34 AM	H2 valve closed
2/12/2012	2:35:34 AM	BCl3 valve closed
2/12/2012	2:35:34 AM	PH3 valve closed
2/12/2012	2:35:34 AM	SiCl4 pre valve closed
2/12/2012	2:35:34 AM	SiCl4 post valve closed
2/12/2012	2:35:34 AM	Main Vac valve closed
2/12/2012	2:35:34 AM	Bubbler valve closed
2/12/2012	2:35:34 AM	Bypass valve opened
2/12/2012	2:35:34 AM	Helium MFC set to  0.000000
2/12/2012	2:35:34 AM	H2 MFC set to  0.000000
2/12/2012	2:35:34 AM	BCl3 MFC set to  0.000000
2/12/2012	2:35:34 AM	PH3 MFC set to  0.000000
2/12/2012	2:35:34 AM	SiCl4 MFC set to  0.000000
2/12/2012	2:35:34 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:35:34 AM	Tube furnace set to 0
2/12/2012	2:36:21 AM	Helium valve closed
2/12/2012	2:36:21 AM	H2 valve closed
2/12/2012	2:36:21 AM	BCl3 valve closed
2/12/2012	2:36:21 AM	PH3 valve closed
2/12/2012	2:36:21 AM	SiCl4 pre valve closed
2/12/2012	2:36:21 AM	SiCl4 post valve closed
2/12/2012	2:36:21 AM	Main Vac valve closed
2/12/2012	2:36:21 AM	Bubbler valve closed
2/12/2012	2:36:21 AM	Bypass valve opened
2/12/2012	2:36:21 AM	Helium MFC set to  0.000000
2/12/2012	2:36:21 AM	H2 MFC set to  0.000000
2/12/2012	2:36:21 AM	BCl3 MFC set to  0.000000
2/12/2012	2:36:21 AM	PH3 MFC set to  0.000000
2/12/2012	2:36:21 AM	SiCl4 MFC set to  0.000000
2/12/2012	2:36:21 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:36:21 AM	Tube furnace set to 0
2/12/2012	2:37:21 AM	Helium valve closed
2/12/2012	2:37:21 AM	H2 valve closed
2/12/2012	2:37:21 AM	BCl3 valve closed
2/12/2012	2:37:21 AM	PH3 valve closed
2/12/2012	2:37:21 AM	SiCl4 pre valve closed
2/12/2012	2:37:21 AM	SiCl4 post valve closed
2/12/2012	2:37:21 AM	Bypass valve closed
2/12/2012	2:37:21 AM	Bubbler valve closed
2/12/2012	2:37:21 AM	Main Vac valve opened
2/12/2012	2:37:21 AM	Helium MFC set to  0.000000
2/12/2012	2:37:21 AM	H2 MFC set to  0.000000
2/12/2012	2:37:21 AM	BCl3 MFC set to  0.000000
2/12/2012	2:37:21 AM	PH3 MFC set to  0.000000
2/12/2012	2:37:21 AM	SiCl4 MFC set to  0.000000
2/12/2012	2:37:21 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:37:21 AM	Tube furnace set to 0
2/12/2012	3:37:21 AM	Run finished at 3:37 AM
2/12/2012	7:38:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2012	7:38:01 AM	Recipe started at 7:38 AM
2/12/2012	7:38:01 AM	Helium valve closed
2/12/2012	7:38:01 AM	H2 valve closed
2/12/2012	7:38:01 AM	BCl3 valve closed
2/12/2012	7:38:01 AM	PH3 valve closed
2/12/2012	7:38:01 AM	SiCl4 pre valve closed
2/12/2012	7:38:01 AM	SiCl4 post valve closed
2/12/2012	7:38:01 AM	Main Vac valve closed
2/12/2012	7:38:01 AM	Bypass valve closed
2/12/2012	7:38:01 AM	Bubbler valve closed
2/12/2012	7:38:01 AM	Helium MFC set to  0.000000
2/12/2012	7:38:01 AM	H2 MFC set to  0.000000
2/12/2012	7:38:01 AM	BCl3 MFC set to  0.000000
2/12/2012	7:38:01 AM	PH3 MFC set to  0.000000
2/12/2012	7:38:01 AM	SiCl4 MFC set to  0.000000
2/12/2012	7:38:01 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	7:38:01 AM	Tube furnace set to 0
2/12/2012	7:38:04 AM	H2 valve closed
2/12/2012	7:38:04 AM	BCl3 valve closed
2/12/2012	7:38:04 AM	PH3 valve closed
2/12/2012	7:38:04 AM	SiCl4 pre valve closed
2/12/2012	7:38:04 AM	SiCl4 post valve closed
2/12/2012	7:38:04 AM	Main Vac valve closed
2/12/2012	7:38:04 AM	Bypass valve closed
2/12/2012	7:38:04 AM	Bubbler valve closed
2/12/2012	7:38:04 AM	Helium valve opened
2/12/2012	7:38:04 AM	Helium MFC set to  500.000000
2/12/2012	7:38:04 AM	H2 MFC set to  0.000000
2/12/2012	7:38:04 AM	BCl3 MFC set to  0.000000
2/12/2012	7:38:04 AM	PH3 MFC set to  0.000000
2/12/2012	7:38:04 AM	SiCl4 MFC set to  0.000000
2/12/2012	7:38:04 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	7:38:04 AM	Tube furnace set to 0
2/12/2012	7:39:09 AM	Helium valve closed
2/12/2012	7:39:09 AM	H2 valve closed
2/12/2012	7:39:09 AM	BCl3 valve closed
2/12/2012	7:39:09 AM	PH3 valve closed
2/12/2012	7:39:09 AM	SiCl4 pre valve closed
2/12/2012	7:39:09 AM	SiCl4 post valve closed
2/12/2012	7:39:09 AM	Main Vac valve closed
2/12/2012	7:39:09 AM	Bypass valve closed
2/12/2012	7:39:09 AM	Bubbler valve closed
2/12/2012	7:39:09 AM	Helium MFC set to  0.000000
2/12/2012	7:39:09 AM	H2 MFC set to  0.000000
2/12/2012	7:39:09 AM	BCl3 MFC set to  0.000000
2/12/2012	7:39:09 AM	PH3 MFC set to  0.000000
2/12/2012	7:39:09 AM	SiCl4 MFC set to  0.000000
2/12/2012	7:39:09 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	7:39:09 AM	Tube furnace set to 0
2/12/2012	7:39:10 AM	Run finished at 7:39 AM
2/12/2012	7:39:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2012	7:43:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2012	7:43:54 AM	Recipe started at 7:43 AM
2/12/2012	7:43:54 AM	Helium valve closed
2/12/2012	7:43:54 AM	H2 valve closed
2/12/2012	7:43:54 AM	BCl3 valve closed
2/12/2012	7:43:54 AM	PH3 valve closed
2/12/2012	7:43:54 AM	SiCl4 pre valve closed
2/12/2012	7:43:54 AM	SiCl4 post valve closed
2/12/2012	7:43:54 AM	Main Vac valve closed
2/12/2012	7:43:54 AM	Bubbler valve closed
2/12/2012	7:43:54 AM	Bypass valve opened
2/12/2012	7:43:54 AM	Helium MFC set to  0.000000
2/12/2012	7:43:54 AM	H2 MFC set to  0.000000
2/12/2012	7:43:54 AM	BCl3 MFC set to  0.000000
2/12/2012	7:43:54 AM	PH3 MFC set to  0.000000
2/12/2012	7:43:54 AM	SiCl4 MFC set to  0.000000
2/12/2012	7:43:54 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	7:43:55 AM	Tube furnace set to 0
2/12/2012	7:44:59 AM	Helium valve closed
2/12/2012	7:44:59 AM	H2 valve closed
2/12/2012	7:44:59 AM	BCl3 valve closed
2/12/2012	7:44:59 AM	PH3 valve closed
2/12/2012	7:44:59 AM	SiCl4 pre valve closed
2/12/2012	7:44:59 AM	SiCl4 post valve closed
2/12/2012	7:44:59 AM	Main Vac valve closed
2/12/2012	7:44:59 AM	Bubbler valve closed
2/12/2012	7:44:59 AM	Bypass valve opened
2/12/2012	7:44:59 AM	Helium MFC set to  0.000000
2/12/2012	7:44:59 AM	H2 MFC set to  0.000000
2/12/2012	7:44:59 AM	BCl3 MFC set to  0.000000
2/12/2012	7:44:59 AM	PH3 MFC set to  0.000000
2/12/2012	7:44:59 AM	SiCl4 MFC set to  0.000000
2/12/2012	7:44:59 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	7:44:59 AM	Tube furnace set to 0
2/12/2012	7:45:59 AM	Helium valve closed
2/12/2012	7:45:59 AM	H2 valve closed
2/12/2012	7:45:59 AM	BCl3 valve closed
2/12/2012	7:45:59 AM	PH3 valve closed
2/12/2012	7:45:59 AM	SiCl4 pre valve closed
2/12/2012	7:45:59 AM	SiCl4 post valve closed
2/12/2012	7:45:59 AM	Bypass valve closed
2/12/2012	7:45:59 AM	Bubbler valve closed
2/12/2012	7:45:59 AM	Main Vac valve opened
2/12/2012	7:45:59 AM	Helium MFC set to  0.000000
2/12/2012	7:45:59 AM	H2 MFC set to  0.000000
2/12/2012	7:45:59 AM	BCl3 MFC set to  0.000000
2/12/2012	7:45:59 AM	PH3 MFC set to  0.000000
2/12/2012	7:45:59 AM	SiCl4 MFC set to  0.000000
2/12/2012	7:45:59 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	7:45:59 AM	Tube furnace set to 0
2/12/2012	7:46:00 AM	Run finished at 7:46 AM
2/12/2012	7:46:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2012	8:36:35 AM	Main Vac valve closed
2/12/2012	8:37:00 AM	Main Vac valve opened
2/12/2012	8:38:11 AM	Recipe started at 8:38 AM
2/12/2012	8:38:11 AM	Helium valve closed
2/12/2012	8:38:11 AM	H2 valve closed
2/12/2012	8:38:11 AM	BCl3 valve closed
2/12/2012	8:38:11 AM	PH3 valve closed
2/12/2012	8:38:11 AM	SiCl4 pre valve closed
2/12/2012	8:38:11 AM	SiCl4 post valve closed
2/12/2012	8:38:11 AM	Bypass valve closed
2/12/2012	8:38:11 AM	Bubbler valve closed
2/12/2012	8:38:11 AM	Main Vac valve opened
2/12/2012	8:38:11 AM	Helium MFC set to  0.000000
2/12/2012	8:38:11 AM	H2 MFC set to  0.000000
2/12/2012	8:38:11 AM	BCl3 MFC set to  0.000000
2/12/2012	8:38:11 AM	PH3 MFC set to  0.000000
2/12/2012	8:38:11 AM	SiCl4 MFC set to  0.000000
2/12/2012	8:38:11 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:38:12 AM	Tube furnace set to 0
2/12/2012	8:38:15 AM	Helium valve closed
2/12/2012	8:38:15 AM	H2 valve closed
2/12/2012	8:38:15 AM	BCl3 valve closed
2/12/2012	8:38:15 AM	PH3 valve closed
2/12/2012	8:38:15 AM	SiCl4 pre valve closed
2/12/2012	8:38:15 AM	SiCl4 post valve closed
2/12/2012	8:38:15 AM	Main Vac valve closed
2/12/2012	8:38:15 AM	Bypass valve closed
2/12/2012	8:38:15 AM	Bubbler valve closed
2/12/2012	8:38:15 AM	Helium MFC set to  0.000000
2/12/2012	8:38:15 AM	H2 MFC set to  0.000000
2/12/2012	8:38:15 AM	BCl3 MFC set to  0.000000
2/12/2012	8:38:15 AM	PH3 MFC set to  0.000000
2/12/2012	8:38:15 AM	SiCl4 MFC set to  0.000000
2/12/2012	8:38:15 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:38:15 AM	Tube furnace set to 0
2/12/2012	8:38:18 AM	Helium valve closed
2/12/2012	8:38:18 AM	BCl3 valve closed
2/12/2012	8:38:18 AM	PH3 valve closed
2/12/2012	8:38:18 AM	SiCl4 pre valve closed
2/12/2012	8:38:18 AM	SiCl4 post valve closed
2/12/2012	8:38:18 AM	Main Vac valve closed
2/12/2012	8:38:18 AM	Bypass valve closed
2/12/2012	8:38:18 AM	Bubbler valve closed
2/12/2012	8:38:18 AM	H2 valve opened
2/12/2012	8:38:18 AM	Helium MFC set to  0.000000
2/12/2012	8:38:18 AM	H2 MFC set to  500.000000
2/12/2012	8:38:18 AM	BCl3 MFC set to  0.000000
2/12/2012	8:38:18 AM	PH3 MFC set to  0.000000
2/12/2012	8:38:18 AM	SiCl4 MFC set to  0.000000
2/12/2012	8:38:18 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:38:18 AM	Tube furnace set to 0
2/12/2012	8:39:26 AM	Helium valve closed
2/12/2012	8:39:26 AM	BCl3 valve closed
2/12/2012	8:39:26 AM	PH3 valve closed
2/12/2012	8:39:26 AM	SiCl4 pre valve closed
2/12/2012	8:39:26 AM	SiCl4 post valve closed
2/12/2012	8:39:26 AM	Main Vac valve closed
2/12/2012	8:39:26 AM	Bypass valve closed
2/12/2012	8:39:26 AM	H2 valve opened
2/12/2012	8:39:26 AM	Bubbler valve opened
2/12/2012	8:39:26 AM	Helium MFC set to  0.000000
2/12/2012	8:39:26 AM	H2 MFC set to  500.000000
2/12/2012	8:39:26 AM	BCl3 MFC set to  0.000000
2/12/2012	8:39:26 AM	PH3 MFC set to  0.000000
2/12/2012	8:39:26 AM	SiCl4 MFC set to  0.000000
2/12/2012	8:39:26 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:39:26 AM	Tube furnace set to 0
2/12/2012	8:39:27 AM	Helium valve closed
2/12/2012	8:39:27 AM	BCl3 valve closed
2/12/2012	8:39:27 AM	PH3 valve closed
2/12/2012	8:39:27 AM	SiCl4 pre valve closed
2/12/2012	8:39:27 AM	SiCl4 post valve closed
2/12/2012	8:39:27 AM	Main Vac valve closed
2/12/2012	8:39:27 AM	Bypass valve closed
2/12/2012	8:39:27 AM	H2 valve opened
2/12/2012	8:39:27 AM	Bubbler valve opened
2/12/2012	8:39:27 AM	Helium MFC set to  0.000000
2/12/2012	8:39:27 AM	H2 MFC set to  500.000000
2/12/2012	8:39:27 AM	BCl3 MFC set to  0.000000
2/12/2012	8:39:27 AM	PH3 MFC set to  0.000000
2/12/2012	8:39:27 AM	SiCl4 MFC set to  0.000000
2/12/2012	8:39:27 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:39:27 AM	Tube furnace set to 1000
2/12/2012	9:04:27 AM	Helium valve closed
2/12/2012	9:04:27 AM	BCl3 valve closed
2/12/2012	9:04:27 AM	PH3 valve closed
2/12/2012	9:04:27 AM	Main Vac valve closed
2/12/2012	9:04:27 AM	Bypass valve closed
2/12/2012	9:04:27 AM	H2 valve opened
2/12/2012	9:04:27 AM	SiCl4 pre valve opened
2/12/2012	9:04:27 AM	SiCl4 post valve opened
2/12/2012	9:04:27 AM	Bubbler valve opened
2/12/2012	9:04:27 AM	Helium MFC set to  0.000000
2/12/2012	9:04:27 AM	H2 MFC set to  450.000000
2/12/2012	9:04:27 AM	BCl3 MFC set to  0.000000
2/12/2012	9:04:27 AM	PH3 MFC set to  0.000000
2/12/2012	9:04:27 AM	SiCl4 MFC set to  50.000000
2/12/2012	9:04:27 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:04:28 AM	Tube furnace set to 1000
2/12/2012	9:12:28 AM	Helium valve closed
2/12/2012	9:12:28 AM	BCl3 valve closed
2/12/2012	9:12:28 AM	PH3 valve closed
2/12/2012	9:12:28 AM	SiCl4 pre valve closed
2/12/2012	9:12:28 AM	SiCl4 post valve closed
2/12/2012	9:12:28 AM	Main Vac valve closed
2/12/2012	9:12:28 AM	Bypass valve closed
2/12/2012	9:12:28 AM	H2 valve opened
2/12/2012	9:12:28 AM	Bubbler valve opened
2/12/2012	9:12:28 AM	Helium MFC set to  0.000000
2/12/2012	9:12:28 AM	H2 MFC set to  500.000000
2/12/2012	9:12:28 AM	BCl3 MFC set to  0.000000
2/12/2012	9:12:28 AM	PH3 MFC set to  0.000000
2/12/2012	9:12:28 AM	SiCl4 MFC set to  0.000000
2/12/2012	9:12:28 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:12:28 AM	Tube furnace set to 750
2/12/2012	9:27:28 AM	H2 valve closed
2/12/2012	9:27:28 AM	BCl3 valve closed
2/12/2012	9:27:28 AM	PH3 valve closed
2/12/2012	9:27:28 AM	SiCl4 pre valve closed
2/12/2012	9:27:28 AM	SiCl4 post valve closed
2/12/2012	9:27:28 AM	Main Vac valve closed
2/12/2012	9:27:28 AM	Bypass valve closed
2/12/2012	9:27:28 AM	Helium valve opened
2/12/2012	9:27:28 AM	Bubbler valve opened
2/12/2012	9:27:28 AM	Helium MFC set to  500.000000
2/12/2012	9:27:28 AM	H2 MFC set to  0.000000
2/12/2012	9:27:28 AM	BCl3 MFC set to  0.000000
2/12/2012	9:27:28 AM	PH3 MFC set to  0.000000
2/12/2012	9:27:28 AM	SiCl4 MFC set to  0.000000
2/12/2012	9:27:28 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:27:28 AM	Tube furnace set to 0
2/12/2012	9:47:28 AM	Helium valve closed
2/12/2012	9:47:28 AM	H2 valve closed
2/12/2012	9:47:28 AM	BCl3 valve closed
2/12/2012	9:47:28 AM	PH3 valve closed
2/12/2012	9:47:28 AM	SiCl4 pre valve closed
2/12/2012	9:47:28 AM	SiCl4 post valve closed
2/12/2012	9:47:28 AM	Main Vac valve closed
2/12/2012	9:47:28 AM	Bypass valve closed
2/12/2012	9:47:28 AM	Bubbler valve closed
2/12/2012	9:47:28 AM	Helium MFC set to  0.000000
2/12/2012	9:47:28 AM	H2 MFC set to  0.000000
2/12/2012	9:47:28 AM	BCl3 MFC set to  0.000000
2/12/2012	9:47:28 AM	PH3 MFC set to  0.000000
2/12/2012	9:47:28 AM	SiCl4 MFC set to  0.000000
2/12/2012	9:47:28 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:47:28 AM	Tube furnace set to 0
2/12/2012	9:59:22 AM	Run aborted at 9:59 AM
2/12/2012	9:59:22 AM	Helium valve closed
2/12/2012	9:59:22 AM	H2 valve closed
2/12/2012	9:59:22 AM	BCl3 valve closed
2/12/2012	9:59:22 AM	PH3 valve closed
2/12/2012	9:59:22 AM	SiCl4 pre valve closed
2/12/2012	9:59:22 AM	SiCl4 post valve closed
2/12/2012	9:59:22 AM	Bypass valve closed
2/12/2012	9:59:22 AM	Main Vac valve closed
2/12/2012	9:59:22 AM	Bubbler valve closed
2/12/2012	9:59:22 AM	Helium MFC set to  0.000000
2/12/2012	9:59:22 AM	H2 MFC set to  0.000000
2/12/2012	9:59:22 AM	BCl3 MFC set to  0.000000
2/12/2012	9:59:22 AM	PH3 MFC set to  0.000000
2/12/2012	9:59:22 AM	SiCl4 MFC set to  0.000000
2/12/2012	9:59:23 AM	Tube furnace set to 0
2/12/2012	9:59:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2012	9:59:25 AM	Recipe started at 9:59 AM
2/12/2012	9:59:25 AM	Helium valve closed
2/12/2012	9:59:25 AM	H2 valve closed
2/12/2012	9:59:25 AM	BCl3 valve closed
2/12/2012	9:59:25 AM	PH3 valve closed
2/12/2012	9:59:25 AM	SiCl4 pre valve closed
2/12/2012	9:59:25 AM	SiCl4 post valve closed
2/12/2012	9:59:25 AM	Main Vac valve closed
2/12/2012	9:59:25 AM	Bypass valve closed
2/12/2012	9:59:25 AM	Bubbler valve closed
2/12/2012	9:59:25 AM	Helium MFC set to  0.000000
2/12/2012	9:59:25 AM	H2 MFC set to  0.000000
2/12/2012	9:59:25 AM	BCl3 MFC set to  0.000000
2/12/2012	9:59:25 AM	PH3 MFC set to  0.000000
2/12/2012	9:59:25 AM	SiCl4 MFC set to  0.000000
2/12/2012	9:59:25 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:59:25 AM	Tube furnace set to 0
2/12/2012	9:59:28 AM	H2 valve closed
2/12/2012	9:59:28 AM	BCl3 valve closed
2/12/2012	9:59:28 AM	PH3 valve closed
2/12/2012	9:59:28 AM	SiCl4 pre valve closed
2/12/2012	9:59:28 AM	SiCl4 post valve closed
2/12/2012	9:59:28 AM	Main Vac valve closed
2/12/2012	9:59:28 AM	Bypass valve closed
2/12/2012	9:59:28 AM	Bubbler valve closed
2/12/2012	9:59:28 AM	Helium valve opened
2/12/2012	9:59:28 AM	Helium MFC set to  500.000000
2/12/2012	9:59:28 AM	H2 MFC set to  0.000000
2/12/2012	9:59:28 AM	BCl3 MFC set to  0.000000
2/12/2012	9:59:28 AM	PH3 MFC set to  0.000000
2/12/2012	9:59:28 AM	SiCl4 MFC set to  0.000000
2/12/2012	9:59:28 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:59:28 AM	Tube furnace set to 0
2/12/2012	9:59:33 AM	Helium valve closed
2/12/2012	9:59:33 AM	H2 valve closed
2/12/2012	9:59:33 AM	BCl3 valve closed
2/12/2012	9:59:33 AM	PH3 valve closed
2/12/2012	9:59:33 AM	SiCl4 pre valve closed
2/12/2012	9:59:33 AM	SiCl4 post valve closed
2/12/2012	9:59:33 AM	Main Vac valve closed
2/12/2012	9:59:33 AM	Bypass valve closed
2/12/2012	9:59:33 AM	Bubbler valve closed
2/12/2012	9:59:33 AM	Helium MFC set to  0.000000
2/12/2012	9:59:33 AM	H2 MFC set to  0.000000
2/12/2012	9:59:33 AM	BCl3 MFC set to  0.000000
2/12/2012	9:59:33 AM	PH3 MFC set to  0.000000
2/12/2012	9:59:33 AM	SiCl4 MFC set to  0.000000
2/12/2012	9:59:33 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:59:33 AM	Tube furnace set to 0
2/12/2012	9:59:34 AM	Run finished at 9:59 AM
2/12/2012	9:59:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2012	10:03:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2012	10:03:18 AM	Recipe started at 10:03 AM
2/12/2012	10:03:18 AM	Helium valve closed
2/12/2012	10:03:18 AM	H2 valve closed
2/12/2012	10:03:18 AM	BCl3 valve closed
2/12/2012	10:03:18 AM	PH3 valve closed
2/12/2012	10:03:18 AM	SiCl4 pre valve closed
2/12/2012	10:03:18 AM	SiCl4 post valve closed
2/12/2012	10:03:18 AM	Main Vac valve closed
2/12/2012	10:03:18 AM	Bubbler valve closed
2/12/2012	10:03:18 AM	Bypass valve opened
2/12/2012	10:03:18 AM	Helium MFC set to  0.000000
2/12/2012	10:03:18 AM	H2 MFC set to  0.000000
2/12/2012	10:03:18 AM	BCl3 MFC set to  0.000000
2/12/2012	10:03:18 AM	PH3 MFC set to  0.000000
2/12/2012	10:03:18 AM	SiCl4 MFC set to  0.000000
2/12/2012	10:03:18 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	10:03:18 AM	Tube furnace set to 0
2/12/2012	10:04:17 AM	Helium valve closed
2/12/2012	10:04:17 AM	H2 valve closed
2/12/2012	10:04:17 AM	BCl3 valve closed
2/12/2012	10:04:17 AM	PH3 valve closed
2/12/2012	10:04:17 AM	SiCl4 pre valve closed
2/12/2012	10:04:17 AM	SiCl4 post valve closed
2/12/2012	10:04:17 AM	Main Vac valve closed
2/12/2012	10:04:17 AM	Bubbler valve closed
2/12/2012	10:04:17 AM	Bypass valve opened
2/12/2012	10:04:17 AM	Helium MFC set to  0.000000
2/12/2012	10:04:17 AM	H2 MFC set to  0.000000
2/12/2012	10:04:17 AM	BCl3 MFC set to  0.000000
2/12/2012	10:04:17 AM	PH3 MFC set to  0.000000
2/12/2012	10:04:17 AM	SiCl4 MFC set to  0.000000
2/12/2012	10:04:17 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	10:04:18 AM	Tube furnace set to 0
2/12/2012	10:05:18 AM	Helium valve closed
2/12/2012	10:05:18 AM	H2 valve closed
2/12/2012	10:05:18 AM	BCl3 valve closed
2/12/2012	10:05:18 AM	PH3 valve closed
2/12/2012	10:05:18 AM	SiCl4 pre valve closed
2/12/2012	10:05:18 AM	SiCl4 post valve closed
2/12/2012	10:05:18 AM	Bypass valve closed
2/12/2012	10:05:18 AM	Bubbler valve closed
2/12/2012	10:05:18 AM	Main Vac valve opened
2/12/2012	10:05:18 AM	Helium MFC set to  0.000000
2/12/2012	10:05:18 AM	H2 MFC set to  0.000000
2/12/2012	10:05:18 AM	BCl3 MFC set to  0.000000
2/12/2012	10:05:18 AM	PH3 MFC set to  0.000000
2/12/2012	10:05:18 AM	SiCl4 MFC set to  0.000000
2/12/2012	10:05:18 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	10:05:18 AM	Tube furnace set to 0
2/12/2012	10:05:19 AM	Run finished at 10:05 AM
2/12/2012	10:05:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2012	10:58:49 AM	Main Vac valve closed
2/12/2012	10:59:04 AM	Main Vac valve opened
2/12/2012	11:29:51 AM	Main Vac valve closed
2/12/2012	11:30:21 AM	Main Vac valve opened
2/12/2012	11:57:37 AM	Main Vac valve closed
2/12/2012	11:57:55 AM	Main Vac valve opened
2/12/2012	11:58:29 AM	Recipe started at 11:58 AM
2/12/2012	11:58:29 AM	Helium valve closed
2/12/2012	11:58:29 AM	H2 valve closed
2/12/2012	11:58:29 AM	BCl3 valve closed
2/12/2012	11:58:29 AM	PH3 valve closed
2/12/2012	11:58:29 AM	SiCl4 pre valve closed
2/12/2012	11:58:29 AM	SiCl4 post valve closed
2/12/2012	11:58:29 AM	Bypass valve closed
2/12/2012	11:58:29 AM	Bubbler valve closed
2/12/2012	11:58:29 AM	Main Vac valve opened
2/12/2012	11:58:29 AM	Helium MFC set to  0.000000
2/12/2012	11:58:29 AM	H2 MFC set to  0.000000
2/12/2012	11:58:29 AM	BCl3 MFC set to  0.000000
2/12/2012	11:58:29 AM	PH3 MFC set to  0.000000
2/12/2012	11:58:29 AM	SiCl4 MFC set to  0.000000
2/12/2012	11:58:29 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	11:58:29 AM	Tube furnace set to 0
2/12/2012	11:58:32 AM	Helium valve closed
2/12/2012	11:58:32 AM	H2 valve closed
2/12/2012	11:58:32 AM	BCl3 valve closed
2/12/2012	11:58:32 AM	PH3 valve closed
2/12/2012	11:58:32 AM	SiCl4 pre valve closed
2/12/2012	11:58:32 AM	SiCl4 post valve closed
2/12/2012	11:58:32 AM	Main Vac valve closed
2/12/2012	11:58:32 AM	Bypass valve closed
2/12/2012	11:58:32 AM	Bubbler valve closed
2/12/2012	11:58:32 AM	Helium MFC set to  0.000000
2/12/2012	11:58:32 AM	H2 MFC set to  0.000000
2/12/2012	11:58:32 AM	BCl3 MFC set to  0.000000
2/12/2012	11:58:32 AM	PH3 MFC set to  0.000000
2/12/2012	11:58:32 AM	SiCl4 MFC set to  0.000000
2/12/2012	11:58:32 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	11:58:33 AM	Tube furnace set to 0
2/12/2012	11:58:36 AM	Helium valve closed
2/12/2012	11:58:36 AM	BCl3 valve closed
2/12/2012	11:58:36 AM	PH3 valve closed
2/12/2012	11:58:36 AM	SiCl4 pre valve closed
2/12/2012	11:58:36 AM	SiCl4 post valve closed
2/12/2012	11:58:36 AM	Main Vac valve closed
2/12/2012	11:58:36 AM	Bypass valve closed
2/12/2012	11:58:36 AM	Bubbler valve closed
2/12/2012	11:58:36 AM	H2 valve opened
2/12/2012	11:58:36 AM	Helium MFC set to  0.000000
2/12/2012	11:58:36 AM	H2 MFC set to  500.000000
2/12/2012	11:58:36 AM	BCl3 MFC set to  0.000000
2/12/2012	11:58:36 AM	PH3 MFC set to  0.000000
2/12/2012	11:58:36 AM	SiCl4 MFC set to  0.000000
2/12/2012	11:58:36 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	11:58:36 AM	Tube furnace set to 0
2/12/2012	11:59:42 AM	Helium valve closed
2/12/2012	11:59:42 AM	BCl3 valve closed
2/12/2012	11:59:42 AM	PH3 valve closed
2/12/2012	11:59:42 AM	SiCl4 pre valve closed
2/12/2012	11:59:42 AM	SiCl4 post valve closed
2/12/2012	11:59:42 AM	Main Vac valve closed
2/12/2012	11:59:42 AM	Bypass valve closed
2/12/2012	11:59:42 AM	H2 valve opened
2/12/2012	11:59:42 AM	Bubbler valve opened
2/12/2012	11:59:42 AM	Helium MFC set to  0.000000
2/12/2012	11:59:42 AM	H2 MFC set to  500.000000
2/12/2012	11:59:42 AM	BCl3 MFC set to  0.000000
2/12/2012	11:59:42 AM	PH3 MFC set to  0.000000
2/12/2012	11:59:42 AM	SiCl4 MFC set to  0.000000
2/12/2012	11:59:42 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	11:59:42 AM	Tube furnace set to 0
2/12/2012	11:59:43 AM	Helium valve closed
2/12/2012	11:59:43 AM	BCl3 valve closed
2/12/2012	11:59:43 AM	PH3 valve closed
2/12/2012	11:59:43 AM	SiCl4 pre valve closed
2/12/2012	11:59:43 AM	SiCl4 post valve closed
2/12/2012	11:59:43 AM	Main Vac valve closed
2/12/2012	11:59:43 AM	Bypass valve closed
2/12/2012	11:59:43 AM	H2 valve opened
2/12/2012	11:59:43 AM	Bubbler valve opened
2/12/2012	11:59:43 AM	Helium MFC set to  0.000000
2/12/2012	11:59:43 AM	H2 MFC set to  500.000000
2/12/2012	11:59:43 AM	BCl3 MFC set to  0.000000
2/12/2012	11:59:43 AM	PH3 MFC set to  0.000000
2/12/2012	11:59:43 AM	SiCl4 MFC set to  0.000000
2/12/2012	11:59:43 AM	Bypass solenoid MFC set to  0.000000
2/12/2012	11:59:43 AM	Tube furnace set to 1000
2/12/2012	12:24:43 PM	Helium valve closed
2/12/2012	12:24:43 PM	BCl3 valve closed
2/12/2012	12:24:43 PM	PH3 valve closed
2/12/2012	12:24:43 PM	Main Vac valve closed
2/12/2012	12:24:43 PM	Bypass valve closed
2/12/2012	12:24:43 PM	H2 valve opened
2/12/2012	12:24:43 PM	SiCl4 pre valve opened
2/12/2012	12:24:43 PM	SiCl4 post valve opened
2/12/2012	12:24:43 PM	Bubbler valve opened
2/12/2012	12:24:43 PM	Helium MFC set to  0.000000
2/12/2012	12:24:43 PM	H2 MFC set to  450.000000
2/12/2012	12:24:43 PM	BCl3 MFC set to  0.000000
2/12/2012	12:24:43 PM	PH3 MFC set to  0.000000
2/12/2012	12:24:43 PM	SiCl4 MFC set to  50.000000
2/12/2012	12:24:43 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	12:24:43 PM	Tube furnace set to 1000
2/12/2012	12:34:43 PM	Helium valve closed
2/12/2012	12:34:43 PM	BCl3 valve closed
2/12/2012	12:34:43 PM	PH3 valve closed
2/12/2012	12:34:43 PM	SiCl4 pre valve closed
2/12/2012	12:34:43 PM	SiCl4 post valve closed
2/12/2012	12:34:43 PM	Main Vac valve closed
2/12/2012	12:34:43 PM	Bypass valve closed
2/12/2012	12:34:43 PM	H2 valve opened
2/12/2012	12:34:43 PM	Bubbler valve opened
2/12/2012	12:34:43 PM	Helium MFC set to  0.000000
2/12/2012	12:34:43 PM	H2 MFC set to  500.000000
2/12/2012	12:34:43 PM	BCl3 MFC set to  0.000000
2/12/2012	12:34:43 PM	PH3 MFC set to  0.000000
2/12/2012	12:34:43 PM	SiCl4 MFC set to  0.000000
2/12/2012	12:34:43 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	12:34:43 PM	Tube furnace set to 750
2/12/2012	12:49:43 PM	H2 valve closed
2/12/2012	12:49:43 PM	BCl3 valve closed
2/12/2012	12:49:43 PM	PH3 valve closed
2/12/2012	12:49:43 PM	SiCl4 pre valve closed
2/12/2012	12:49:43 PM	SiCl4 post valve closed
2/12/2012	12:49:43 PM	Main Vac valve closed
2/12/2012	12:49:43 PM	Bypass valve closed
2/12/2012	12:49:43 PM	Helium valve opened
2/12/2012	12:49:43 PM	Bubbler valve opened
2/12/2012	12:49:43 PM	Helium MFC set to  500.000000
2/12/2012	12:49:43 PM	H2 MFC set to  0.000000
2/12/2012	12:49:43 PM	BCl3 MFC set to  0.000000
2/12/2012	12:49:43 PM	PH3 MFC set to  0.000000
2/12/2012	12:49:43 PM	SiCl4 MFC set to  0.000000
2/12/2012	12:49:43 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	12:49:44 PM	Tube furnace set to 0
2/12/2012	1:09:44 PM	Helium valve closed
2/12/2012	1:09:44 PM	H2 valve closed
2/12/2012	1:09:44 PM	BCl3 valve closed
2/12/2012	1:09:44 PM	PH3 valve closed
2/12/2012	1:09:44 PM	SiCl4 pre valve closed
2/12/2012	1:09:44 PM	SiCl4 post valve closed
2/12/2012	1:09:44 PM	Main Vac valve closed
2/12/2012	1:09:44 PM	Bypass valve closed
2/12/2012	1:09:44 PM	Bubbler valve closed
2/12/2012	1:09:44 PM	Helium MFC set to  0.000000
2/12/2012	1:09:44 PM	H2 MFC set to  0.000000
2/12/2012	1:09:44 PM	BCl3 MFC set to  0.000000
2/12/2012	1:09:44 PM	PH3 MFC set to  0.000000
2/12/2012	1:09:44 PM	SiCl4 MFC set to  0.000000
2/12/2012	1:09:44 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	1:09:44 PM	Tube furnace set to 0
2/12/2012	1:22:22 PM	Run aborted at 1:22 PM
2/12/2012	1:22:22 PM	Helium valve closed
2/12/2012	1:22:22 PM	H2 valve closed
2/12/2012	1:22:22 PM	BCl3 valve closed
2/12/2012	1:22:22 PM	PH3 valve closed
2/12/2012	1:22:22 PM	SiCl4 pre valve closed
2/12/2012	1:22:22 PM	SiCl4 post valve closed
2/12/2012	1:22:22 PM	Bypass valve closed
2/12/2012	1:22:22 PM	Main Vac valve closed
2/12/2012	1:22:22 PM	Bubbler valve closed
2/12/2012	1:22:22 PM	Helium MFC set to  0.000000
2/12/2012	1:22:22 PM	H2 MFC set to  0.000000
2/12/2012	1:22:22 PM	BCl3 MFC set to  0.000000
2/12/2012	1:22:22 PM	PH3 MFC set to  0.000000
2/12/2012	1:22:22 PM	SiCl4 MFC set to  0.000000
2/12/2012	1:22:22 PM	Tube furnace set to 0
2/12/2012	1:22:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2012	1:22:25 PM	Recipe started at 1:22 PM
2/12/2012	1:22:25 PM	Helium valve closed
2/12/2012	1:22:25 PM	H2 valve closed
2/12/2012	1:22:25 PM	BCl3 valve closed
2/12/2012	1:22:25 PM	PH3 valve closed
2/12/2012	1:22:25 PM	SiCl4 pre valve closed
2/12/2012	1:22:25 PM	SiCl4 post valve closed
2/12/2012	1:22:25 PM	Main Vac valve closed
2/12/2012	1:22:25 PM	Bypass valve closed
2/12/2012	1:22:25 PM	Bubbler valve closed
2/12/2012	1:22:25 PM	Helium MFC set to  0.000000
2/12/2012	1:22:25 PM	H2 MFC set to  0.000000
2/12/2012	1:22:25 PM	BCl3 MFC set to  0.000000
2/12/2012	1:22:25 PM	PH3 MFC set to  0.000000
2/12/2012	1:22:25 PM	SiCl4 MFC set to  0.000000
2/12/2012	1:22:25 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	1:22:25 PM	Tube furnace set to 0
2/12/2012	1:22:28 PM	H2 valve closed
2/12/2012	1:22:28 PM	BCl3 valve closed
2/12/2012	1:22:28 PM	PH3 valve closed
2/12/2012	1:22:28 PM	SiCl4 pre valve closed
2/12/2012	1:22:28 PM	SiCl4 post valve closed
2/12/2012	1:22:28 PM	Main Vac valve closed
2/12/2012	1:22:28 PM	Bypass valve closed
2/12/2012	1:22:28 PM	Bubbler valve closed
2/12/2012	1:22:28 PM	Helium valve opened
2/12/2012	1:22:28 PM	Helium MFC set to  500.000000
2/12/2012	1:22:28 PM	H2 MFC set to  0.000000
2/12/2012	1:22:28 PM	BCl3 MFC set to  0.000000
2/12/2012	1:22:28 PM	PH3 MFC set to  0.000000
2/12/2012	1:22:28 PM	SiCl4 MFC set to  0.000000
2/12/2012	1:22:28 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	1:22:28 PM	Tube furnace set to 0
2/12/2012	1:22:32 PM	Helium valve closed
2/12/2012	1:22:32 PM	H2 valve closed
2/12/2012	1:22:32 PM	BCl3 valve closed
2/12/2012	1:22:32 PM	PH3 valve closed
2/12/2012	1:22:32 PM	SiCl4 pre valve closed
2/12/2012	1:22:32 PM	SiCl4 post valve closed
2/12/2012	1:22:32 PM	Main Vac valve closed
2/12/2012	1:22:32 PM	Bypass valve closed
2/12/2012	1:22:32 PM	Bubbler valve closed
2/12/2012	1:22:32 PM	Helium MFC set to  0.000000
2/12/2012	1:22:32 PM	H2 MFC set to  0.000000
2/12/2012	1:22:32 PM	BCl3 MFC set to  0.000000
2/12/2012	1:22:32 PM	PH3 MFC set to  0.000000
2/12/2012	1:22:32 PM	SiCl4 MFC set to  0.000000
2/12/2012	1:22:32 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	1:22:32 PM	Tube furnace set to 0
2/12/2012	1:22:33 PM	Run finished at 1:22 PM
2/12/2012	1:22:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2012	1:30:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2012	1:30:46 PM	Recipe started at 1:30 PM
2/12/2012	1:30:46 PM	Helium valve closed
2/12/2012	1:30:46 PM	H2 valve closed
2/12/2012	1:30:46 PM	BCl3 valve closed
2/12/2012	1:30:46 PM	PH3 valve closed
2/12/2012	1:30:46 PM	SiCl4 pre valve closed
2/12/2012	1:30:46 PM	SiCl4 post valve closed
2/12/2012	1:30:46 PM	Main Vac valve closed
2/12/2012	1:30:46 PM	Bubbler valve closed
2/12/2012	1:30:46 PM	Bypass valve opened
2/12/2012	1:30:46 PM	Helium MFC set to  0.000000
2/12/2012	1:30:46 PM	H2 MFC set to  0.000000
2/12/2012	1:30:46 PM	BCl3 MFC set to  0.000000
2/12/2012	1:30:46 PM	PH3 MFC set to  0.000000
2/12/2012	1:30:46 PM	SiCl4 MFC set to  0.000000
2/12/2012	1:30:46 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	1:30:46 PM	Tube furnace set to 0
2/12/2012	1:31:49 PM	Helium valve closed
2/12/2012	1:31:49 PM	H2 valve closed
2/12/2012	1:31:49 PM	BCl3 valve closed
2/12/2012	1:31:49 PM	PH3 valve closed
2/12/2012	1:31:49 PM	SiCl4 pre valve closed
2/12/2012	1:31:49 PM	SiCl4 post valve closed
2/12/2012	1:31:49 PM	Main Vac valve closed
2/12/2012	1:31:49 PM	Bubbler valve closed
2/12/2012	1:31:49 PM	Bypass valve opened
2/12/2012	1:31:49 PM	Helium MFC set to  0.000000
2/12/2012	1:31:49 PM	H2 MFC set to  0.000000
2/12/2012	1:31:49 PM	BCl3 MFC set to  0.000000
2/12/2012	1:31:49 PM	PH3 MFC set to  0.000000
2/12/2012	1:31:49 PM	SiCl4 MFC set to  0.000000
2/12/2012	1:31:49 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	1:31:49 PM	Tube furnace set to 0
2/12/2012	1:32:49 PM	Helium valve closed
2/12/2012	1:32:49 PM	H2 valve closed
2/12/2012	1:32:49 PM	BCl3 valve closed
2/12/2012	1:32:49 PM	PH3 valve closed
2/12/2012	1:32:49 PM	SiCl4 pre valve closed
2/12/2012	1:32:49 PM	SiCl4 post valve closed
2/12/2012	1:32:49 PM	Bypass valve closed
2/12/2012	1:32:49 PM	Bubbler valve closed
2/12/2012	1:32:49 PM	Main Vac valve opened
2/12/2012	1:32:49 PM	Helium MFC set to  0.000000
2/12/2012	1:32:49 PM	H2 MFC set to  0.000000
2/12/2012	1:32:49 PM	BCl3 MFC set to  0.000000
2/12/2012	1:32:49 PM	PH3 MFC set to  0.000000
2/12/2012	1:32:49 PM	SiCl4 MFC set to  0.000000
2/12/2012	1:32:49 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	1:32:49 PM	Tube furnace set to 0
2/12/2012	1:32:50 PM	Run finished at 1:32 PM
2/12/2012	1:32:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2012	1:48:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2012	1:48:18 PM	Recipe started at 1:48 PM
2/12/2012	1:48:18 PM	Helium valve closed
2/12/2012	1:48:18 PM	H2 valve closed
2/12/2012	1:48:18 PM	BCl3 valve closed
2/12/2012	1:48:18 PM	PH3 valve closed
2/12/2012	1:48:18 PM	SiCl4 pre valve closed
2/12/2012	1:48:18 PM	SiCl4 post valve closed
2/12/2012	1:48:18 PM	Main Vac valve closed
2/12/2012	1:48:18 PM	Bypass valve closed
2/12/2012	1:48:18 PM	Bubbler valve closed
2/12/2012	1:48:18 PM	Helium MFC set to  0.000000
2/12/2012	1:48:18 PM	H2 MFC set to  0.000000
2/12/2012	1:48:18 PM	BCl3 MFC set to  0.000000
2/12/2012	1:48:18 PM	PH3 MFC set to  0.000000
2/12/2012	1:48:18 PM	SiCl4 MFC set to  0.000000
2/12/2012	1:48:18 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	1:48:18 PM	Tube furnace set to 0
2/12/2012	1:48:21 PM	H2 valve closed
2/12/2012	1:48:21 PM	BCl3 valve closed
2/12/2012	1:48:21 PM	PH3 valve closed
2/12/2012	1:48:21 PM	SiCl4 pre valve closed
2/12/2012	1:48:21 PM	SiCl4 post valve closed
2/12/2012	1:48:21 PM	Main Vac valve closed
2/12/2012	1:48:21 PM	Bypass valve closed
2/12/2012	1:48:21 PM	Bubbler valve closed
2/12/2012	1:48:21 PM	Helium valve opened
2/12/2012	1:48:21 PM	Helium MFC set to  500.000000
2/12/2012	1:48:21 PM	H2 MFC set to  0.000000
2/12/2012	1:48:21 PM	BCl3 MFC set to  0.000000
2/12/2012	1:48:21 PM	PH3 MFC set to  0.000000
2/12/2012	1:48:21 PM	SiCl4 MFC set to  0.000000
2/12/2012	1:48:21 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	1:48:21 PM	Tube furnace set to 0
2/12/2012	1:49:23 PM	Helium valve closed
2/12/2012	1:49:23 PM	H2 valve closed
2/12/2012	1:49:23 PM	BCl3 valve closed
2/12/2012	1:49:23 PM	PH3 valve closed
2/12/2012	1:49:23 PM	SiCl4 pre valve closed
2/12/2012	1:49:23 PM	SiCl4 post valve closed
2/12/2012	1:49:23 PM	Main Vac valve closed
2/12/2012	1:49:23 PM	Bypass valve closed
2/12/2012	1:49:23 PM	Bubbler valve closed
2/12/2012	1:49:23 PM	Helium MFC set to  0.000000
2/12/2012	1:49:23 PM	H2 MFC set to  0.000000
2/12/2012	1:49:23 PM	BCl3 MFC set to  0.000000
2/12/2012	1:49:23 PM	PH3 MFC set to  0.000000
2/12/2012	1:49:23 PM	SiCl4 MFC set to  0.000000
2/12/2012	1:49:23 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	1:49:23 PM	Tube furnace set to 0
2/12/2012	1:49:24 PM	Run finished at 1:49 PM
2/12/2012	1:49:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2012	1:51:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2012	1:51:30 PM	Recipe started at 1:51 PM
2/12/2012	1:51:30 PM	Helium valve closed
2/12/2012	1:51:30 PM	H2 valve closed
2/12/2012	1:51:30 PM	BCl3 valve closed
2/12/2012	1:51:30 PM	PH3 valve closed
2/12/2012	1:51:30 PM	SiCl4 pre valve closed
2/12/2012	1:51:30 PM	SiCl4 post valve closed
2/12/2012	1:51:30 PM	Main Vac valve closed
2/12/2012	1:51:30 PM	Bubbler valve closed
2/12/2012	1:51:30 PM	Bypass valve opened
2/12/2012	1:51:30 PM	Helium MFC set to  0.000000
2/12/2012	1:51:30 PM	H2 MFC set to  0.000000
2/12/2012	1:51:30 PM	BCl3 MFC set to  0.000000
2/12/2012	1:51:30 PM	PH3 MFC set to  0.000000
2/12/2012	1:51:30 PM	SiCl4 MFC set to  0.000000
2/12/2012	1:51:30 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	1:51:30 PM	Tube furnace set to 0
2/12/2012	1:52:30 PM	Helium valve closed
2/12/2012	1:52:30 PM	H2 valve closed
2/12/2012	1:52:30 PM	BCl3 valve closed
2/12/2012	1:52:30 PM	PH3 valve closed
2/12/2012	1:52:30 PM	SiCl4 pre valve closed
2/12/2012	1:52:30 PM	SiCl4 post valve closed
2/12/2012	1:52:30 PM	Main Vac valve closed
2/12/2012	1:52:30 PM	Bubbler valve closed
2/12/2012	1:52:30 PM	Bypass valve opened
2/12/2012	1:52:30 PM	Helium MFC set to  0.000000
2/12/2012	1:52:30 PM	H2 MFC set to  0.000000
2/12/2012	1:52:30 PM	BCl3 MFC set to  0.000000
2/12/2012	1:52:30 PM	PH3 MFC set to  0.000000
2/12/2012	1:52:30 PM	SiCl4 MFC set to  0.000000
2/12/2012	1:52:30 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	1:52:30 PM	Tube furnace set to 0
2/12/2012	1:53:30 PM	Helium valve closed
2/12/2012	1:53:30 PM	H2 valve closed
2/12/2012	1:53:30 PM	BCl3 valve closed
2/12/2012	1:53:30 PM	PH3 valve closed
2/12/2012	1:53:30 PM	SiCl4 pre valve closed
2/12/2012	1:53:30 PM	SiCl4 post valve closed
2/12/2012	1:53:30 PM	Bypass valve closed
2/12/2012	1:53:30 PM	Bubbler valve closed
2/12/2012	1:53:30 PM	Main Vac valve opened
2/12/2012	1:53:30 PM	Helium MFC set to  0.000000
2/12/2012	1:53:31 PM	H2 MFC set to  0.000000
2/12/2012	1:53:31 PM	BCl3 MFC set to  0.000000
2/12/2012	1:53:31 PM	PH3 MFC set to  0.000000
2/12/2012	1:53:31 PM	SiCl4 MFC set to  0.000000
2/12/2012	1:53:31 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	1:53:31 PM	Tube furnace set to 0
2/12/2012	1:53:32 PM	Run finished at 1:53 PM
2/12/2012	1:53:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2012	2:47:57 PM	Main Vac valve closed
2/12/2012	2:48:19 PM	Main Vac valve opened
2/12/2012	2:49:22 PM	Recipe started at 2:49 PM
2/12/2012	2:49:22 PM	Helium valve closed
2/12/2012	2:49:22 PM	H2 valve closed
2/12/2012	2:49:22 PM	BCl3 valve closed
2/12/2012	2:49:22 PM	PH3 valve closed
2/12/2012	2:49:22 PM	SiCl4 pre valve closed
2/12/2012	2:49:22 PM	SiCl4 post valve closed
2/12/2012	2:49:22 PM	Bypass valve closed
2/12/2012	2:49:22 PM	Bubbler valve closed
2/12/2012	2:49:22 PM	Main Vac valve opened
2/12/2012	2:49:22 PM	Helium MFC set to  0.000000
2/12/2012	2:49:22 PM	H2 MFC set to  0.000000
2/12/2012	2:49:22 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:22 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:22 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:22 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:22 PM	Tube furnace set to 0
2/12/2012	2:49:27 PM	H2 valve closed
2/12/2012	2:49:27 PM	BCl3 valve closed
2/12/2012	2:49:27 PM	PH3 valve closed
2/12/2012	2:49:27 PM	SiCl4 pre valve closed
2/12/2012	2:49:27 PM	SiCl4 post valve closed
2/12/2012	2:49:27 PM	Bypass valve closed
2/12/2012	2:49:27 PM	Bubbler valve closed
2/12/2012	2:49:27 PM	Helium valve opened
2/12/2012	2:49:27 PM	Main Vac valve opened
2/12/2012	2:49:27 PM	Helium MFC set to  20.000000
2/12/2012	2:49:27 PM	H2 MFC set to  0.000000
2/12/2012	2:49:27 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:27 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:27 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:27 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:28 PM	Tube furnace set to 0
2/12/2012	2:49:28 PM	Helium valve closed
2/12/2012	2:49:28 PM	H2 valve closed
2/12/2012	2:49:28 PM	BCl3 valve closed
2/12/2012	2:49:28 PM	PH3 valve closed
2/12/2012	2:49:28 PM	SiCl4 pre valve closed
2/12/2012	2:49:28 PM	SiCl4 post valve closed
2/12/2012	2:49:28 PM	Bypass valve closed
2/12/2012	2:49:28 PM	Bubbler valve closed
2/12/2012	2:49:28 PM	Main Vac valve opened
2/12/2012	2:49:28 PM	Helium MFC set to  0.000000
2/12/2012	2:49:28 PM	H2 MFC set to  0.000000
2/12/2012	2:49:28 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:28 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:28 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:28 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:29 PM	Tube furnace set to 0
2/12/2012	2:49:29 PM	H2 valve closed
2/12/2012	2:49:29 PM	BCl3 valve closed
2/12/2012	2:49:29 PM	PH3 valve closed
2/12/2012	2:49:29 PM	SiCl4 pre valve closed
2/12/2012	2:49:29 PM	SiCl4 post valve closed
2/12/2012	2:49:29 PM	Bypass valve closed
2/12/2012	2:49:29 PM	Bubbler valve closed
2/12/2012	2:49:29 PM	Helium valve opened
2/12/2012	2:49:29 PM	Main Vac valve opened
2/12/2012	2:49:29 PM	Helium MFC set to  20.000000
2/12/2012	2:49:29 PM	H2 MFC set to  0.000000
2/12/2012	2:49:29 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:29 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:29 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:29 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:29 PM	Tube furnace set to 0
2/12/2012	2:49:30 PM	Helium valve closed
2/12/2012	2:49:30 PM	H2 valve closed
2/12/2012	2:49:30 PM	BCl3 valve closed
2/12/2012	2:49:30 PM	PH3 valve closed
2/12/2012	2:49:30 PM	SiCl4 pre valve closed
2/12/2012	2:49:30 PM	SiCl4 post valve closed
2/12/2012	2:49:30 PM	Bypass valve closed
2/12/2012	2:49:30 PM	Bubbler valve closed
2/12/2012	2:49:30 PM	Main Vac valve opened
2/12/2012	2:49:30 PM	Helium MFC set to  0.000000
2/12/2012	2:49:30 PM	H2 MFC set to  0.000000
2/12/2012	2:49:30 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:30 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:30 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:30 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:30 PM	Tube furnace set to 0
2/12/2012	2:49:30 PM	H2 valve closed
2/12/2012	2:49:30 PM	BCl3 valve closed
2/12/2012	2:49:30 PM	PH3 valve closed
2/12/2012	2:49:31 PM	SiCl4 pre valve closed
2/12/2012	2:49:31 PM	SiCl4 post valve closed
2/12/2012	2:49:31 PM	Bypass valve closed
2/12/2012	2:49:31 PM	Bubbler valve closed
2/12/2012	2:49:31 PM	Helium valve opened
2/12/2012	2:49:31 PM	Main Vac valve opened
2/12/2012	2:49:31 PM	Helium MFC set to  20.000000
2/12/2012	2:49:31 PM	H2 MFC set to  0.000000
2/12/2012	2:49:31 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:31 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:31 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:31 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:31 PM	Tube furnace set to 0
2/12/2012	2:49:31 PM	Helium valve closed
2/12/2012	2:49:31 PM	H2 valve closed
2/12/2012	2:49:31 PM	BCl3 valve closed
2/12/2012	2:49:31 PM	PH3 valve closed
2/12/2012	2:49:31 PM	SiCl4 pre valve closed
2/12/2012	2:49:31 PM	SiCl4 post valve closed
2/12/2012	2:49:31 PM	Bypass valve closed
2/12/2012	2:49:31 PM	Bubbler valve closed
2/12/2012	2:49:31 PM	Main Vac valve opened
2/12/2012	2:49:31 PM	Helium MFC set to  0.000000
2/12/2012	2:49:31 PM	H2 MFC set to  0.000000
2/12/2012	2:49:31 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:31 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:31 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:31 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:31 PM	Tube furnace set to 0
2/12/2012	2:49:32 PM	H2 valve closed
2/12/2012	2:49:32 PM	BCl3 valve closed
2/12/2012	2:49:32 PM	PH3 valve closed
2/12/2012	2:49:32 PM	SiCl4 pre valve closed
2/12/2012	2:49:32 PM	SiCl4 post valve closed
2/12/2012	2:49:32 PM	Bypass valve closed
2/12/2012	2:49:32 PM	Bubbler valve closed
2/12/2012	2:49:32 PM	Helium valve opened
2/12/2012	2:49:32 PM	Main Vac valve opened
2/12/2012	2:49:32 PM	Helium MFC set to  20.000000
2/12/2012	2:49:32 PM	H2 MFC set to  0.000000
2/12/2012	2:49:32 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:32 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:32 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:32 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:32 PM	Tube furnace set to 0
2/12/2012	2:49:33 PM	Helium valve closed
2/12/2012	2:49:33 PM	H2 valve closed
2/12/2012	2:49:33 PM	BCl3 valve closed
2/12/2012	2:49:33 PM	PH3 valve closed
2/12/2012	2:49:33 PM	SiCl4 pre valve closed
2/12/2012	2:49:33 PM	SiCl4 post valve closed
2/12/2012	2:49:33 PM	Bypass valve closed
2/12/2012	2:49:33 PM	Bubbler valve closed
2/12/2012	2:49:33 PM	Main Vac valve opened
2/12/2012	2:49:33 PM	Helium MFC set to  0.000000
2/12/2012	2:49:33 PM	H2 MFC set to  0.000000
2/12/2012	2:49:33 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:33 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:33 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:33 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:33 PM	Tube furnace set to 0
2/12/2012	2:49:33 PM	H2 valve closed
2/12/2012	2:49:33 PM	BCl3 valve closed
2/12/2012	2:49:33 PM	PH3 valve closed
2/12/2012	2:49:33 PM	SiCl4 pre valve closed
2/12/2012	2:49:33 PM	SiCl4 post valve closed
2/12/2012	2:49:33 PM	Bypass valve closed
2/12/2012	2:49:33 PM	Bubbler valve closed
2/12/2012	2:49:33 PM	Helium valve opened
2/12/2012	2:49:33 PM	Main Vac valve opened
2/12/2012	2:49:33 PM	Helium MFC set to  20.000000
2/12/2012	2:49:33 PM	H2 MFC set to  0.000000
2/12/2012	2:49:33 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:33 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:33 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:33 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:34 PM	Tube furnace set to 0
2/12/2012	2:49:34 PM	Helium valve closed
2/12/2012	2:49:34 PM	H2 valve closed
2/12/2012	2:49:34 PM	BCl3 valve closed
2/12/2012	2:49:34 PM	PH3 valve closed
2/12/2012	2:49:34 PM	SiCl4 pre valve closed
2/12/2012	2:49:34 PM	SiCl4 post valve closed
2/12/2012	2:49:34 PM	Bypass valve closed
2/12/2012	2:49:34 PM	Bubbler valve closed
2/12/2012	2:49:34 PM	Main Vac valve opened
2/12/2012	2:49:34 PM	Helium MFC set to  0.000000
2/12/2012	2:49:34 PM	H2 MFC set to  0.000000
2/12/2012	2:49:34 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:34 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:34 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:34 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:34 PM	Tube furnace set to 0
2/12/2012	2:49:35 PM	H2 valve closed
2/12/2012	2:49:35 PM	BCl3 valve closed
2/12/2012	2:49:35 PM	PH3 valve closed
2/12/2012	2:49:35 PM	SiCl4 pre valve closed
2/12/2012	2:49:35 PM	SiCl4 post valve closed
2/12/2012	2:49:35 PM	Bypass valve closed
2/12/2012	2:49:35 PM	Bubbler valve closed
2/12/2012	2:49:35 PM	Helium valve opened
2/12/2012	2:49:35 PM	Main Vac valve opened
2/12/2012	2:49:35 PM	Helium MFC set to  20.000000
2/12/2012	2:49:35 PM	H2 MFC set to  0.000000
2/12/2012	2:49:35 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:35 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:35 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:35 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:35 PM	Tube furnace set to 0
2/12/2012	2:49:35 PM	Helium valve closed
2/12/2012	2:49:35 PM	H2 valve closed
2/12/2012	2:49:35 PM	BCl3 valve closed
2/12/2012	2:49:35 PM	PH3 valve closed
2/12/2012	2:49:35 PM	SiCl4 pre valve closed
2/12/2012	2:49:35 PM	SiCl4 post valve closed
2/12/2012	2:49:35 PM	Bypass valve closed
2/12/2012	2:49:35 PM	Bubbler valve closed
2/12/2012	2:49:35 PM	Main Vac valve opened
2/12/2012	2:49:35 PM	Helium MFC set to  0.000000
2/12/2012	2:49:35 PM	H2 MFC set to  0.000000
2/12/2012	2:49:35 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:35 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:35 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:35 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:36 PM	Tube furnace set to 0
2/12/2012	2:49:36 PM	H2 valve closed
2/12/2012	2:49:36 PM	BCl3 valve closed
2/12/2012	2:49:36 PM	PH3 valve closed
2/12/2012	2:49:36 PM	SiCl4 pre valve closed
2/12/2012	2:49:36 PM	SiCl4 post valve closed
2/12/2012	2:49:36 PM	Bypass valve closed
2/12/2012	2:49:36 PM	Bubbler valve closed
2/12/2012	2:49:36 PM	Helium valve opened
2/12/2012	2:49:36 PM	Main Vac valve opened
2/12/2012	2:49:36 PM	Helium MFC set to  20.000000
2/12/2012	2:49:36 PM	H2 MFC set to  0.000000
2/12/2012	2:49:36 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:36 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:36 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:36 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:36 PM	Tube furnace set to 0
2/12/2012	2:49:37 PM	Helium valve closed
2/12/2012	2:49:37 PM	H2 valve closed
2/12/2012	2:49:37 PM	BCl3 valve closed
2/12/2012	2:49:37 PM	PH3 valve closed
2/12/2012	2:49:37 PM	SiCl4 pre valve closed
2/12/2012	2:49:37 PM	SiCl4 post valve closed
2/12/2012	2:49:37 PM	Bypass valve closed
2/12/2012	2:49:37 PM	Bubbler valve closed
2/12/2012	2:49:37 PM	Main Vac valve opened
2/12/2012	2:49:37 PM	Helium MFC set to  0.000000
2/12/2012	2:49:37 PM	H2 MFC set to  0.000000
2/12/2012	2:49:37 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:37 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:37 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:37 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:37 PM	Tube furnace set to 0
2/12/2012	2:49:42 PM	H2 valve closed
2/12/2012	2:49:42 PM	BCl3 valve closed
2/12/2012	2:49:42 PM	PH3 valve closed
2/12/2012	2:49:42 PM	SiCl4 pre valve closed
2/12/2012	2:49:42 PM	SiCl4 post valve closed
2/12/2012	2:49:42 PM	Bypass valve closed
2/12/2012	2:49:42 PM	Bubbler valve closed
2/12/2012	2:49:42 PM	Helium valve opened
2/12/2012	2:49:42 PM	Main Vac valve opened
2/12/2012	2:49:42 PM	Helium MFC set to  20.000000
2/12/2012	2:49:42 PM	H2 MFC set to  0.000000
2/12/2012	2:49:42 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:42 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:42 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:42 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:42 PM	Tube furnace set to 0
2/12/2012	2:49:43 PM	Helium valve closed
2/12/2012	2:49:43 PM	H2 valve closed
2/12/2012	2:49:43 PM	BCl3 valve closed
2/12/2012	2:49:43 PM	PH3 valve closed
2/12/2012	2:49:43 PM	SiCl4 pre valve closed
2/12/2012	2:49:43 PM	SiCl4 post valve closed
2/12/2012	2:49:43 PM	Bypass valve closed
2/12/2012	2:49:43 PM	Bubbler valve closed
2/12/2012	2:49:43 PM	Main Vac valve opened
2/12/2012	2:49:43 PM	Helium MFC set to  0.000000
2/12/2012	2:49:43 PM	H2 MFC set to  0.000000
2/12/2012	2:49:43 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:43 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:43 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:43 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:43 PM	Tube furnace set to 0
2/12/2012	2:49:46 PM	H2 valve closed
2/12/2012	2:49:46 PM	BCl3 valve closed
2/12/2012	2:49:46 PM	PH3 valve closed
2/12/2012	2:49:46 PM	SiCl4 pre valve closed
2/12/2012	2:49:46 PM	SiCl4 post valve closed
2/12/2012	2:49:46 PM	Bypass valve closed
2/12/2012	2:49:46 PM	Bubbler valve closed
2/12/2012	2:49:46 PM	Helium valve opened
2/12/2012	2:49:46 PM	Main Vac valve opened
2/12/2012	2:49:46 PM	Helium MFC set to  20.000000
2/12/2012	2:49:46 PM	H2 MFC set to  0.000000
2/12/2012	2:49:46 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:46 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:46 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:46 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:46 PM	Tube furnace set to 0
2/12/2012	2:49:49 PM	Helium valve closed
2/12/2012	2:49:49 PM	H2 valve closed
2/12/2012	2:49:49 PM	BCl3 valve closed
2/12/2012	2:49:49 PM	PH3 valve closed
2/12/2012	2:49:49 PM	SiCl4 pre valve closed
2/12/2012	2:49:49 PM	SiCl4 post valve closed
2/12/2012	2:49:49 PM	Bypass valve closed
2/12/2012	2:49:49 PM	Bubbler valve closed
2/12/2012	2:49:49 PM	Main Vac valve opened
2/12/2012	2:49:49 PM	Helium MFC set to  0.000000
2/12/2012	2:49:49 PM	H2 MFC set to  0.000000
2/12/2012	2:49:49 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:49 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:49 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:49 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:49 PM	Tube furnace set to 200
2/12/2012	2:49:50 PM	H2 valve closed
2/12/2012	2:49:50 PM	BCl3 valve closed
2/12/2012	2:49:50 PM	PH3 valve closed
2/12/2012	2:49:50 PM	SiCl4 pre valve closed
2/12/2012	2:49:50 PM	SiCl4 post valve closed
2/12/2012	2:49:50 PM	Bypass valve closed
2/12/2012	2:49:50 PM	Bubbler valve closed
2/12/2012	2:49:50 PM	Helium valve opened
2/12/2012	2:49:50 PM	Main Vac valve opened
2/12/2012	2:49:50 PM	Helium MFC set to  20.000000
2/12/2012	2:49:50 PM	H2 MFC set to  0.000000
2/12/2012	2:49:50 PM	BCl3 MFC set to  0.000000
2/12/2012	2:49:50 PM	PH3 MFC set to  0.000000
2/12/2012	2:49:50 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:49:50 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:49:50 PM	Tube furnace set to 200
2/12/2012	2:50:20 PM	Helium valve closed
2/12/2012	2:50:20 PM	H2 valve closed
2/12/2012	2:50:20 PM	BCl3 valve closed
2/12/2012	2:50:20 PM	PH3 valve closed
2/12/2012	2:50:20 PM	SiCl4 pre valve closed
2/12/2012	2:50:20 PM	SiCl4 post valve closed
2/12/2012	2:50:20 PM	Bypass valve closed
2/12/2012	2:50:20 PM	Bubbler valve closed
2/12/2012	2:50:20 PM	Main Vac valve opened
2/12/2012	2:50:20 PM	Helium MFC set to  0.000000
2/12/2012	2:50:20 PM	H2 MFC set to  0.000000
2/12/2012	2:50:20 PM	BCl3 MFC set to  0.000000
2/12/2012	2:50:20 PM	PH3 MFC set to  0.000000
2/12/2012	2:50:20 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:50:20 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:50:20 PM	Tube furnace set to 200
2/12/2012	2:50:50 PM	H2 valve closed
2/12/2012	2:50:50 PM	BCl3 valve closed
2/12/2012	2:50:50 PM	PH3 valve closed
2/12/2012	2:50:50 PM	SiCl4 pre valve closed
2/12/2012	2:50:50 PM	SiCl4 post valve closed
2/12/2012	2:50:50 PM	Bypass valve closed
2/12/2012	2:50:50 PM	Bubbler valve closed
2/12/2012	2:50:50 PM	Helium valve opened
2/12/2012	2:50:50 PM	Main Vac valve opened
2/12/2012	2:50:50 PM	Helium MFC set to  20.000000
2/12/2012	2:50:50 PM	H2 MFC set to  0.000000
2/12/2012	2:50:50 PM	BCl3 MFC set to  0.000000
2/12/2012	2:50:50 PM	PH3 MFC set to  0.000000
2/12/2012	2:50:50 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:50:50 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:50:50 PM	Tube furnace set to 200
2/12/2012	2:51:20 PM	Helium valve closed
2/12/2012	2:51:20 PM	H2 valve closed
2/12/2012	2:51:20 PM	BCl3 valve closed
2/12/2012	2:51:20 PM	PH3 valve closed
2/12/2012	2:51:20 PM	SiCl4 pre valve closed
2/12/2012	2:51:20 PM	SiCl4 post valve closed
2/12/2012	2:51:20 PM	Bypass valve closed
2/12/2012	2:51:20 PM	Bubbler valve closed
2/12/2012	2:51:20 PM	Main Vac valve opened
2/12/2012	2:51:20 PM	Helium MFC set to  0.000000
2/12/2012	2:51:20 PM	H2 MFC set to  0.000000
2/12/2012	2:51:20 PM	BCl3 MFC set to  0.000000
2/12/2012	2:51:20 PM	PH3 MFC set to  0.000000
2/12/2012	2:51:20 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:51:20 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:51:20 PM	Tube furnace set to 200
2/12/2012	2:51:50 PM	H2 valve closed
2/12/2012	2:51:50 PM	BCl3 valve closed
2/12/2012	2:51:50 PM	PH3 valve closed
2/12/2012	2:51:50 PM	SiCl4 pre valve closed
2/12/2012	2:51:50 PM	SiCl4 post valve closed
2/12/2012	2:51:50 PM	Bypass valve closed
2/12/2012	2:51:50 PM	Bubbler valve closed
2/12/2012	2:51:50 PM	Helium valve opened
2/12/2012	2:51:51 PM	Main Vac valve opened
2/12/2012	2:51:51 PM	Helium MFC set to  20.000000
2/12/2012	2:51:51 PM	H2 MFC set to  0.000000
2/12/2012	2:51:51 PM	BCl3 MFC set to  0.000000
2/12/2012	2:51:51 PM	PH3 MFC set to  0.000000
2/12/2012	2:51:51 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:51:51 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:51:51 PM	Tube furnace set to 200
2/12/2012	2:52:21 PM	Helium valve closed
2/12/2012	2:52:21 PM	H2 valve closed
2/12/2012	2:52:21 PM	BCl3 valve closed
2/12/2012	2:52:21 PM	PH3 valve closed
2/12/2012	2:52:21 PM	SiCl4 pre valve closed
2/12/2012	2:52:21 PM	SiCl4 post valve closed
2/12/2012	2:52:21 PM	Bypass valve closed
2/12/2012	2:52:21 PM	Bubbler valve closed
2/12/2012	2:52:21 PM	Main Vac valve opened
2/12/2012	2:52:21 PM	Helium MFC set to  0.000000
2/12/2012	2:52:21 PM	H2 MFC set to  0.000000
2/12/2012	2:52:21 PM	BCl3 MFC set to  0.000000
2/12/2012	2:52:21 PM	PH3 MFC set to  0.000000
2/12/2012	2:52:21 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:52:21 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:52:21 PM	Tube furnace set to 200
2/12/2012	2:52:51 PM	H2 valve closed
2/12/2012	2:52:51 PM	BCl3 valve closed
2/12/2012	2:52:51 PM	PH3 valve closed
2/12/2012	2:52:51 PM	SiCl4 pre valve closed
2/12/2012	2:52:51 PM	SiCl4 post valve closed
2/12/2012	2:52:51 PM	Bypass valve closed
2/12/2012	2:52:51 PM	Bubbler valve closed
2/12/2012	2:52:51 PM	Helium valve opened
2/12/2012	2:52:51 PM	Main Vac valve opened
2/12/2012	2:52:51 PM	Helium MFC set to  20.000000
2/12/2012	2:52:51 PM	H2 MFC set to  0.000000
2/12/2012	2:52:51 PM	BCl3 MFC set to  0.000000
2/12/2012	2:52:51 PM	PH3 MFC set to  0.000000
2/12/2012	2:52:51 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:52:51 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:52:51 PM	Tube furnace set to 200
2/12/2012	2:53:21 PM	Helium valve closed
2/12/2012	2:53:21 PM	H2 valve closed
2/12/2012	2:53:21 PM	BCl3 valve closed
2/12/2012	2:53:21 PM	PH3 valve closed
2/12/2012	2:53:21 PM	SiCl4 pre valve closed
2/12/2012	2:53:21 PM	SiCl4 post valve closed
2/12/2012	2:53:21 PM	Bypass valve closed
2/12/2012	2:53:21 PM	Bubbler valve closed
2/12/2012	2:53:21 PM	Main Vac valve opened
2/12/2012	2:53:21 PM	Helium MFC set to  0.000000
2/12/2012	2:53:21 PM	H2 MFC set to  0.000000
2/12/2012	2:53:21 PM	BCl3 MFC set to  0.000000
2/12/2012	2:53:21 PM	PH3 MFC set to  0.000000
2/12/2012	2:53:21 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:53:21 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:53:21 PM	Tube furnace set to 200
2/12/2012	2:53:51 PM	H2 valve closed
2/12/2012	2:53:51 PM	BCl3 valve closed
2/12/2012	2:53:51 PM	PH3 valve closed
2/12/2012	2:53:51 PM	SiCl4 pre valve closed
2/12/2012	2:53:51 PM	SiCl4 post valve closed
2/12/2012	2:53:51 PM	Bypass valve closed
2/12/2012	2:53:51 PM	Bubbler valve closed
2/12/2012	2:53:51 PM	Helium valve opened
2/12/2012	2:53:51 PM	Main Vac valve opened
2/12/2012	2:53:51 PM	Helium MFC set to  20.000000
2/12/2012	2:53:51 PM	H2 MFC set to  0.000000
2/12/2012	2:53:51 PM	BCl3 MFC set to  0.000000
2/12/2012	2:53:51 PM	PH3 MFC set to  0.000000
2/12/2012	2:53:51 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:53:51 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:53:51 PM	Tube furnace set to 200
2/12/2012	2:54:22 PM	Helium valve closed
2/12/2012	2:54:22 PM	H2 valve closed
2/12/2012	2:54:22 PM	BCl3 valve closed
2/12/2012	2:54:22 PM	PH3 valve closed
2/12/2012	2:54:22 PM	SiCl4 pre valve closed
2/12/2012	2:54:22 PM	SiCl4 post valve closed
2/12/2012	2:54:22 PM	Bypass valve closed
2/12/2012	2:54:22 PM	Bubbler valve closed
2/12/2012	2:54:22 PM	Main Vac valve opened
2/12/2012	2:54:22 PM	Helium MFC set to  0.000000
2/12/2012	2:54:22 PM	H2 MFC set to  0.000000
2/12/2012	2:54:22 PM	BCl3 MFC set to  0.000000
2/12/2012	2:54:22 PM	PH3 MFC set to  0.000000
2/12/2012	2:54:22 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:54:22 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:54:22 PM	Tube furnace set to 200
2/12/2012	2:54:52 PM	H2 valve closed
2/12/2012	2:54:52 PM	BCl3 valve closed
2/12/2012	2:54:52 PM	PH3 valve closed
2/12/2012	2:54:52 PM	SiCl4 pre valve closed
2/12/2012	2:54:52 PM	SiCl4 post valve closed
2/12/2012	2:54:52 PM	Bypass valve closed
2/12/2012	2:54:52 PM	Bubbler valve closed
2/12/2012	2:54:52 PM	Helium valve opened
2/12/2012	2:54:52 PM	Main Vac valve opened
2/12/2012	2:54:52 PM	Helium MFC set to  20.000000
2/12/2012	2:54:52 PM	H2 MFC set to  0.000000
2/12/2012	2:54:52 PM	BCl3 MFC set to  0.000000
2/12/2012	2:54:52 PM	PH3 MFC set to  0.000000
2/12/2012	2:54:52 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:54:52 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:54:52 PM	Tube furnace set to 200
2/12/2012	2:55:22 PM	Helium valve closed
2/12/2012	2:55:22 PM	H2 valve closed
2/12/2012	2:55:22 PM	BCl3 valve closed
2/12/2012	2:55:22 PM	PH3 valve closed
2/12/2012	2:55:22 PM	SiCl4 pre valve closed
2/12/2012	2:55:22 PM	SiCl4 post valve closed
2/12/2012	2:55:22 PM	Bypass valve closed
2/12/2012	2:55:22 PM	Bubbler valve closed
2/12/2012	2:55:22 PM	Main Vac valve opened
2/12/2012	2:55:22 PM	Helium MFC set to  0.000000
2/12/2012	2:55:22 PM	H2 MFC set to  0.000000
2/12/2012	2:55:22 PM	BCl3 MFC set to  0.000000
2/12/2012	2:55:22 PM	PH3 MFC set to  0.000000
2/12/2012	2:55:22 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:55:22 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:55:22 PM	Tube furnace set to 0
2/12/2012	2:55:23 PM	Run finished at 2:55 PM
2/12/2012	2:57:18 PM	Recipe started at 2:57 PM
2/12/2012	2:57:18 PM	Helium valve closed
2/12/2012	2:57:18 PM	H2 valve closed
2/12/2012	2:57:18 PM	BCl3 valve closed
2/12/2012	2:57:18 PM	PH3 valve closed
2/12/2012	2:57:18 PM	SiCl4 pre valve closed
2/12/2012	2:57:18 PM	SiCl4 post valve closed
2/12/2012	2:57:18 PM	Main Vac valve closed
2/12/2012	2:57:18 PM	Bypass valve closed
2/12/2012	2:57:18 PM	Bubbler valve closed
2/12/2012	2:57:18 PM	Helium MFC set to  0.000000
2/12/2012	2:57:18 PM	H2 MFC set to  0.000000
2/12/2012	2:57:18 PM	BCl3 MFC set to  0.000000
2/12/2012	2:57:18 PM	PH3 MFC set to  0.000000
2/12/2012	2:57:18 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:57:18 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:57:18 PM	Tube furnace set to 0
2/12/2012	2:57:21 PM	Helium valve closed
2/12/2012	2:57:21 PM	BCl3 valve closed
2/12/2012	2:57:21 PM	PH3 valve closed
2/12/2012	2:57:21 PM	SiCl4 pre valve closed
2/12/2012	2:57:21 PM	SiCl4 post valve closed
2/12/2012	2:57:21 PM	Main Vac valve closed
2/12/2012	2:57:21 PM	Bypass valve closed
2/12/2012	2:57:21 PM	Bubbler valve closed
2/12/2012	2:57:21 PM	H2 valve opened
2/12/2012	2:57:21 PM	Helium MFC set to  0.000000
2/12/2012	2:57:21 PM	H2 MFC set to  500.000000
2/12/2012	2:57:21 PM	BCl3 MFC set to  0.000000
2/12/2012	2:57:21 PM	PH3 MFC set to  0.000000
2/12/2012	2:57:21 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:57:21 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:57:21 PM	Tube furnace set to 0
2/12/2012	2:58:25 PM	Helium valve closed
2/12/2012	2:58:25 PM	BCl3 valve closed
2/12/2012	2:58:25 PM	PH3 valve closed
2/12/2012	2:58:25 PM	SiCl4 pre valve closed
2/12/2012	2:58:25 PM	SiCl4 post valve closed
2/12/2012	2:58:25 PM	Main Vac valve closed
2/12/2012	2:58:25 PM	Bypass valve closed
2/12/2012	2:58:25 PM	H2 valve opened
2/12/2012	2:58:25 PM	Bubbler valve opened
2/12/2012	2:58:25 PM	Helium MFC set to  0.000000
2/12/2012	2:58:25 PM	H2 MFC set to  500.000000
2/12/2012	2:58:25 PM	BCl3 MFC set to  0.000000
2/12/2012	2:58:25 PM	PH3 MFC set to  0.000000
2/12/2012	2:58:25 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:58:25 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:58:25 PM	Tube furnace set to 0
2/12/2012	2:58:26 PM	Helium valve closed
2/12/2012	2:58:26 PM	BCl3 valve closed
2/12/2012	2:58:26 PM	PH3 valve closed
2/12/2012	2:58:26 PM	SiCl4 pre valve closed
2/12/2012	2:58:26 PM	SiCl4 post valve closed
2/12/2012	2:58:26 PM	Main Vac valve closed
2/12/2012	2:58:26 PM	Bypass valve closed
2/12/2012	2:58:26 PM	H2 valve opened
2/12/2012	2:58:26 PM	Bubbler valve opened
2/12/2012	2:58:26 PM	Helium MFC set to  0.000000
2/12/2012	2:58:26 PM	H2 MFC set to  500.000000
2/12/2012	2:58:26 PM	BCl3 MFC set to  0.000000
2/12/2012	2:58:26 PM	PH3 MFC set to  0.000000
2/12/2012	2:58:26 PM	SiCl4 MFC set to  0.000000
2/12/2012	2:58:26 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	2:58:26 PM	Tube furnace set to 1000
2/12/2012	3:18:26 PM	Helium valve closed
2/12/2012	3:18:26 PM	BCl3 valve closed
2/12/2012	3:18:26 PM	PH3 valve closed
2/12/2012	3:18:26 PM	Main Vac valve closed
2/12/2012	3:18:26 PM	Bypass valve closed
2/12/2012	3:18:26 PM	H2 valve opened
2/12/2012	3:18:26 PM	SiCl4 pre valve opened
2/12/2012	3:18:26 PM	SiCl4 post valve opened
2/12/2012	3:18:26 PM	Bubbler valve opened
2/12/2012	3:18:26 PM	Helium MFC set to  0.000000
2/12/2012	3:18:26 PM	H2 MFC set to  500.000000
2/12/2012	3:18:26 PM	BCl3 MFC set to  0.000000
2/12/2012	3:18:26 PM	PH3 MFC set to  0.000000
2/12/2012	3:18:26 PM	SiCl4 MFC set to  50.000000
2/12/2012	3:18:26 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	3:18:26 PM	Tube furnace set to 1000
2/12/2012	3:33:26 PM	Helium valve closed
2/12/2012	3:33:26 PM	BCl3 valve closed
2/12/2012	3:33:26 PM	PH3 valve closed
2/12/2012	3:33:26 PM	SiCl4 pre valve closed
2/12/2012	3:33:26 PM	SiCl4 post valve closed
2/12/2012	3:33:26 PM	Main Vac valve closed
2/12/2012	3:33:26 PM	Bypass valve closed
2/12/2012	3:33:26 PM	H2 valve opened
2/12/2012	3:33:26 PM	Bubbler valve opened
2/12/2012	3:33:26 PM	Helium MFC set to  0.000000
2/12/2012	3:33:27 PM	H2 MFC set to  500.000000
2/12/2012	3:33:27 PM	BCl3 MFC set to  0.000000
2/12/2012	3:33:27 PM	PH3 MFC set to  0.000000
2/12/2012	3:33:27 PM	SiCl4 MFC set to  0.000000
2/12/2012	3:33:27 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	3:33:27 PM	Tube furnace set to 950
2/12/2012	3:35:27 PM	Helium valve closed
2/12/2012	3:35:27 PM	BCl3 valve closed
2/12/2012	3:35:27 PM	PH3 valve closed
2/12/2012	3:35:27 PM	SiCl4 pre valve closed
2/12/2012	3:35:27 PM	SiCl4 post valve closed
2/12/2012	3:35:27 PM	Main Vac valve closed
2/12/2012	3:35:27 PM	Bypass valve closed
2/12/2012	3:35:27 PM	H2 valve opened
2/12/2012	3:35:27 PM	Bubbler valve opened
2/12/2012	3:35:27 PM	Helium MFC set to  0.000000
2/12/2012	3:35:27 PM	H2 MFC set to  500.000000
2/12/2012	3:35:27 PM	BCl3 MFC set to  0.000000
2/12/2012	3:35:27 PM	PH3 MFC set to  0.000000
2/12/2012	3:35:27 PM	SiCl4 MFC set to  0.000000
2/12/2012	3:35:27 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	3:35:27 PM	Tube furnace set to 900
2/12/2012	3:37:27 PM	Helium valve closed
2/12/2012	3:37:27 PM	BCl3 valve closed
2/12/2012	3:37:27 PM	PH3 valve closed
2/12/2012	3:37:27 PM	SiCl4 pre valve closed
2/12/2012	3:37:27 PM	SiCl4 post valve closed
2/12/2012	3:37:27 PM	Main Vac valve closed
2/12/2012	3:37:27 PM	Bypass valve closed
2/12/2012	3:37:27 PM	H2 valve opened
2/12/2012	3:37:27 PM	Bubbler valve opened
2/12/2012	3:37:27 PM	Helium MFC set to  0.000000
2/12/2012	3:37:27 PM	H2 MFC set to  500.000000
2/12/2012	3:37:27 PM	BCl3 MFC set to  0.000000
2/12/2012	3:37:27 PM	PH3 MFC set to  0.000000
2/12/2012	3:37:27 PM	SiCl4 MFC set to  0.000000
2/12/2012	3:37:27 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	3:37:27 PM	Tube furnace set to 850
2/12/2012	3:39:27 PM	H2 valve closed
2/12/2012	3:39:27 PM	BCl3 valve closed
2/12/2012	3:39:27 PM	PH3 valve closed
2/12/2012	3:39:27 PM	SiCl4 pre valve closed
2/12/2012	3:39:27 PM	SiCl4 post valve closed
2/12/2012	3:39:27 PM	Main Vac valve closed
2/12/2012	3:39:27 PM	Bypass valve closed
2/12/2012	3:39:27 PM	Helium valve opened
2/12/2012	3:39:27 PM	Bubbler valve opened
2/12/2012	3:39:27 PM	Helium MFC set to  500.000000
2/12/2012	3:39:27 PM	H2 MFC set to  0.000000
2/12/2012	3:39:27 PM	BCl3 MFC set to  0.000000
2/12/2012	3:39:27 PM	PH3 MFC set to  0.000000
2/12/2012	3:39:27 PM	SiCl4 MFC set to  0.000000
2/12/2012	3:39:27 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	3:39:27 PM	Tube furnace set to 800
2/12/2012	3:41:27 PM	H2 valve closed
2/12/2012	3:41:27 PM	BCl3 valve closed
2/12/2012	3:41:27 PM	PH3 valve closed
2/12/2012	3:41:27 PM	SiCl4 pre valve closed
2/12/2012	3:41:27 PM	SiCl4 post valve closed
2/12/2012	3:41:27 PM	Main Vac valve closed
2/12/2012	3:41:27 PM	Bypass valve closed
2/12/2012	3:41:27 PM	Helium valve opened
2/12/2012	3:41:27 PM	Bubbler valve opened
2/12/2012	3:41:27 PM	Helium MFC set to  500.000000
2/12/2012	3:41:27 PM	H2 MFC set to  0.000000
2/12/2012	3:41:27 PM	BCl3 MFC set to  0.000000
2/12/2012	3:41:27 PM	PH3 MFC set to  0.000000
2/12/2012	3:41:27 PM	SiCl4 MFC set to  0.000000
2/12/2012	3:41:27 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	3:41:27 PM	Tube furnace set to 750
2/12/2012	3:43:28 PM	H2 valve closed
2/12/2012	3:43:28 PM	BCl3 valve closed
2/12/2012	3:43:28 PM	PH3 valve closed
2/12/2012	3:43:28 PM	SiCl4 pre valve closed
2/12/2012	3:43:28 PM	SiCl4 post valve closed
2/12/2012	3:43:28 PM	Main Vac valve closed
2/12/2012	3:43:28 PM	Bypass valve closed
2/12/2012	3:43:28 PM	Helium valve opened
2/12/2012	3:43:28 PM	Bubbler valve opened
2/12/2012	3:43:28 PM	Helium MFC set to  500.000000
2/12/2012	3:43:28 PM	H2 MFC set to  0.000000
2/12/2012	3:43:28 PM	BCl3 MFC set to  0.000000
2/12/2012	3:43:28 PM	PH3 MFC set to  0.000000
2/12/2012	3:43:28 PM	SiCl4 MFC set to  0.000000
2/12/2012	3:43:28 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	3:43:28 PM	Tube furnace set to 0
2/12/2012	4:03:28 PM	Helium valve closed
2/12/2012	4:03:28 PM	H2 valve closed
2/12/2012	4:03:28 PM	BCl3 valve closed
2/12/2012	4:03:28 PM	PH3 valve closed
2/12/2012	4:03:28 PM	SiCl4 pre valve closed
2/12/2012	4:03:28 PM	SiCl4 post valve closed
2/12/2012	4:03:28 PM	Main Vac valve closed
2/12/2012	4:03:28 PM	Bypass valve closed
2/12/2012	4:03:28 PM	Bubbler valve closed
2/12/2012	4:03:28 PM	Helium MFC set to  0.000000
2/12/2012	4:03:28 PM	H2 MFC set to  0.000000
2/12/2012	4:03:28 PM	BCl3 MFC set to  0.000000
2/12/2012	4:03:28 PM	PH3 MFC set to  0.000000
2/12/2012	4:03:28 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:03:28 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:03:28 PM	Tube furnace set to 0
2/12/2012	4:03:29 PM	Run finished at 4:03 PM
2/12/2012	4:11:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2012	4:11:10 PM	Recipe started at 4:11 PM
2/12/2012	4:11:10 PM	Helium valve closed
2/12/2012	4:11:11 PM	H2 valve closed
2/12/2012	4:11:11 PM	BCl3 valve closed
2/12/2012	4:11:11 PM	PH3 valve closed
2/12/2012	4:11:11 PM	SiCl4 pre valve closed
2/12/2012	4:11:11 PM	SiCl4 post valve closed
2/12/2012	4:11:11 PM	Main Vac valve closed
2/12/2012	4:11:11 PM	Bypass valve closed
2/12/2012	4:11:11 PM	Bubbler valve closed
2/12/2012	4:11:11 PM	Helium MFC set to  0.000000
2/12/2012	4:11:11 PM	H2 MFC set to  0.000000
2/12/2012	4:11:11 PM	BCl3 MFC set to  0.000000
2/12/2012	4:11:11 PM	PH3 MFC set to  0.000000
2/12/2012	4:11:11 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:11:11 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:11:11 PM	Tube furnace set to 0
2/12/2012	4:11:14 PM	H2 valve closed
2/12/2012	4:11:14 PM	BCl3 valve closed
2/12/2012	4:11:14 PM	PH3 valve closed
2/12/2012	4:11:14 PM	SiCl4 pre valve closed
2/12/2012	4:11:14 PM	SiCl4 post valve closed
2/12/2012	4:11:14 PM	Main Vac valve closed
2/12/2012	4:11:14 PM	Bypass valve closed
2/12/2012	4:11:14 PM	Bubbler valve closed
2/12/2012	4:11:14 PM	Helium valve opened
2/12/2012	4:11:14 PM	Helium MFC set to  500.000000
2/12/2012	4:11:14 PM	H2 MFC set to  0.000000
2/12/2012	4:11:14 PM	BCl3 MFC set to  0.000000
2/12/2012	4:11:14 PM	PH3 MFC set to  0.000000
2/12/2012	4:11:14 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:11:14 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:11:14 PM	Tube furnace set to 0
2/12/2012	4:11:15 PM	Helium valve closed
2/12/2012	4:11:15 PM	H2 valve closed
2/12/2012	4:11:15 PM	BCl3 valve closed
2/12/2012	4:11:15 PM	PH3 valve closed
2/12/2012	4:11:15 PM	SiCl4 pre valve closed
2/12/2012	4:11:15 PM	SiCl4 post valve closed
2/12/2012	4:11:15 PM	Main Vac valve closed
2/12/2012	4:11:15 PM	Bypass valve closed
2/12/2012	4:11:15 PM	Bubbler valve closed
2/12/2012	4:11:15 PM	Helium MFC set to  0.000000
2/12/2012	4:11:15 PM	H2 MFC set to  0.000000
2/12/2012	4:11:15 PM	BCl3 MFC set to  0.000000
2/12/2012	4:11:15 PM	PH3 MFC set to  0.000000
2/12/2012	4:11:15 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:11:15 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:11:16 PM	Tube furnace set to 0
2/12/2012	4:11:17 PM	Run finished at 4:11 PM
2/12/2012	4:11:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2012	4:13:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2012	4:13:22 PM	Recipe started at 4:13 PM
2/12/2012	4:13:22 PM	Helium valve closed
2/12/2012	4:13:22 PM	H2 valve closed
2/12/2012	4:13:22 PM	BCl3 valve closed
2/12/2012	4:13:22 PM	PH3 valve closed
2/12/2012	4:13:22 PM	SiCl4 pre valve closed
2/12/2012	4:13:22 PM	SiCl4 post valve closed
2/12/2012	4:13:22 PM	Main Vac valve closed
2/12/2012	4:13:22 PM	Bubbler valve closed
2/12/2012	4:13:22 PM	Bypass valve opened
2/12/2012	4:13:22 PM	Helium MFC set to  0.000000
2/12/2012	4:13:22 PM	H2 MFC set to  0.000000
2/12/2012	4:13:22 PM	BCl3 MFC set to  0.000000
2/12/2012	4:13:22 PM	PH3 MFC set to  0.000000
2/12/2012	4:13:22 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:13:22 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:13:22 PM	Tube furnace set to 0
2/12/2012	4:14:21 PM	Helium valve closed
2/12/2012	4:14:21 PM	H2 valve closed
2/12/2012	4:14:21 PM	BCl3 valve closed
2/12/2012	4:14:21 PM	PH3 valve closed
2/12/2012	4:14:21 PM	SiCl4 pre valve closed
2/12/2012	4:14:21 PM	SiCl4 post valve closed
2/12/2012	4:14:21 PM	Main Vac valve closed
2/12/2012	4:14:21 PM	Bubbler valve closed
2/12/2012	4:14:21 PM	Bypass valve opened
2/12/2012	4:14:21 PM	Helium MFC set to  0.000000
2/12/2012	4:14:21 PM	H2 MFC set to  0.000000
2/12/2012	4:14:21 PM	BCl3 MFC set to  0.000000
2/12/2012	4:14:21 PM	PH3 MFC set to  0.000000
2/12/2012	4:14:21 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:14:21 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:14:21 PM	Tube furnace set to 0
2/12/2012	4:15:21 PM	Helium valve closed
2/12/2012	4:15:21 PM	H2 valve closed
2/12/2012	4:15:21 PM	BCl3 valve closed
2/12/2012	4:15:21 PM	PH3 valve closed
2/12/2012	4:15:21 PM	SiCl4 pre valve closed
2/12/2012	4:15:21 PM	SiCl4 post valve closed
2/12/2012	4:15:21 PM	Bypass valve closed
2/12/2012	4:15:21 PM	Bubbler valve closed
2/12/2012	4:15:21 PM	Main Vac valve opened
2/12/2012	4:15:21 PM	Helium MFC set to  0.000000
2/12/2012	4:15:21 PM	H2 MFC set to  0.000000
2/12/2012	4:15:21 PM	BCl3 MFC set to  0.000000
2/12/2012	4:15:21 PM	PH3 MFC set to  0.000000
2/12/2012	4:15:21 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:15:22 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:15:22 PM	Tube furnace set to 0
2/12/2012	4:15:23 PM	Run finished at 4:15 PM
2/12/2012	4:15:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2012	4:34:53 PM	Main Vac valve closed
2/12/2012	4:35:00 PM	Main Vac valve opened
2/12/2012	4:35:46 PM	Recipe started at 4:35 PM
2/12/2012	4:35:46 PM	Helium valve closed
2/12/2012	4:35:46 PM	H2 valve closed
2/12/2012	4:35:46 PM	BCl3 valve closed
2/12/2012	4:35:46 PM	PH3 valve closed
2/12/2012	4:35:46 PM	SiCl4 pre valve closed
2/12/2012	4:35:46 PM	SiCl4 post valve closed
2/12/2012	4:35:46 PM	Bypass valve closed
2/12/2012	4:35:46 PM	Bubbler valve closed
2/12/2012	4:35:46 PM	Main Vac valve opened
2/12/2012	4:35:46 PM	Helium MFC set to  0.000000
2/12/2012	4:35:46 PM	H2 MFC set to  0.000000
2/12/2012	4:35:46 PM	BCl3 MFC set to  0.000000
2/12/2012	4:35:46 PM	PH3 MFC set to  0.000000
2/12/2012	4:35:46 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:35:46 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:35:47 PM	Tube furnace set to 0
2/12/2012	4:35:50 PM	H2 valve closed
2/12/2012	4:35:50 PM	BCl3 valve closed
2/12/2012	4:35:50 PM	PH3 valve closed
2/12/2012	4:35:50 PM	SiCl4 pre valve closed
2/12/2012	4:35:50 PM	SiCl4 post valve closed
2/12/2012	4:35:50 PM	Bypass valve closed
2/12/2012	4:35:50 PM	Bubbler valve closed
2/12/2012	4:35:50 PM	Helium valve opened
2/12/2012	4:35:50 PM	Main Vac valve opened
2/12/2012	4:35:50 PM	Helium MFC set to  20.000000
2/12/2012	4:35:50 PM	H2 MFC set to  0.000000
2/12/2012	4:35:50 PM	BCl3 MFC set to  0.000000
2/12/2012	4:35:50 PM	PH3 MFC set to  0.000000
2/12/2012	4:35:50 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:35:50 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:35:50 PM	Tube furnace set to 0
2/12/2012	4:36:20 PM	Helium valve closed
2/12/2012	4:36:20 PM	H2 valve closed
2/12/2012	4:36:20 PM	BCl3 valve closed
2/12/2012	4:36:20 PM	PH3 valve closed
2/12/2012	4:36:20 PM	SiCl4 pre valve closed
2/12/2012	4:36:20 PM	SiCl4 post valve closed
2/12/2012	4:36:20 PM	Bypass valve closed
2/12/2012	4:36:20 PM	Bubbler valve closed
2/12/2012	4:36:20 PM	Main Vac valve opened
2/12/2012	4:36:20 PM	Helium MFC set to  0.000000
2/12/2012	4:36:20 PM	H2 MFC set to  0.000000
2/12/2012	4:36:20 PM	BCl3 MFC set to  0.000000
2/12/2012	4:36:20 PM	PH3 MFC set to  0.000000
2/12/2012	4:36:20 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:36:20 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:36:20 PM	Tube furnace set to 0
2/12/2012	4:36:50 PM	H2 valve closed
2/12/2012	4:36:50 PM	BCl3 valve closed
2/12/2012	4:36:50 PM	PH3 valve closed
2/12/2012	4:36:50 PM	SiCl4 pre valve closed
2/12/2012	4:36:50 PM	SiCl4 post valve closed
2/12/2012	4:36:50 PM	Bypass valve closed
2/12/2012	4:36:50 PM	Bubbler valve closed
2/12/2012	4:36:50 PM	Helium valve opened
2/12/2012	4:36:50 PM	Main Vac valve opened
2/12/2012	4:36:50 PM	Helium MFC set to  20.000000
2/12/2012	4:36:50 PM	H2 MFC set to  0.000000
2/12/2012	4:36:50 PM	BCl3 MFC set to  0.000000
2/12/2012	4:36:50 PM	PH3 MFC set to  0.000000
2/12/2012	4:36:50 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:36:50 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:36:50 PM	Tube furnace set to 0
2/12/2012	4:37:20 PM	Helium valve closed
2/12/2012	4:37:20 PM	H2 valve closed
2/12/2012	4:37:20 PM	BCl3 valve closed
2/12/2012	4:37:20 PM	PH3 valve closed
2/12/2012	4:37:20 PM	SiCl4 pre valve closed
2/12/2012	4:37:20 PM	SiCl4 post valve closed
2/12/2012	4:37:20 PM	Bypass valve closed
2/12/2012	4:37:20 PM	Bubbler valve closed
2/12/2012	4:37:20 PM	Main Vac valve opened
2/12/2012	4:37:20 PM	Helium MFC set to  0.000000
2/12/2012	4:37:20 PM	H2 MFC set to  0.000000
2/12/2012	4:37:20 PM	BCl3 MFC set to  0.000000
2/12/2012	4:37:20 PM	PH3 MFC set to  0.000000
2/12/2012	4:37:20 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:37:20 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:37:21 PM	Tube furnace set to 0
2/12/2012	4:37:51 PM	H2 valve closed
2/12/2012	4:37:51 PM	BCl3 valve closed
2/12/2012	4:37:51 PM	PH3 valve closed
2/12/2012	4:37:51 PM	SiCl4 pre valve closed
2/12/2012	4:37:51 PM	SiCl4 post valve closed
2/12/2012	4:37:51 PM	Bypass valve closed
2/12/2012	4:37:51 PM	Bubbler valve closed
2/12/2012	4:37:51 PM	Helium valve opened
2/12/2012	4:37:51 PM	Main Vac valve opened
2/12/2012	4:37:51 PM	Helium MFC set to  20.000000
2/12/2012	4:37:51 PM	H2 MFC set to  0.000000
2/12/2012	4:37:51 PM	BCl3 MFC set to  0.000000
2/12/2012	4:37:51 PM	PH3 MFC set to  0.000000
2/12/2012	4:37:51 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:37:51 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:37:51 PM	Tube furnace set to 0
2/12/2012	4:38:21 PM	Helium valve closed
2/12/2012	4:38:21 PM	H2 valve closed
2/12/2012	4:38:21 PM	BCl3 valve closed
2/12/2012	4:38:21 PM	PH3 valve closed
2/12/2012	4:38:21 PM	SiCl4 pre valve closed
2/12/2012	4:38:21 PM	SiCl4 post valve closed
2/12/2012	4:38:21 PM	Bypass valve closed
2/12/2012	4:38:21 PM	Bubbler valve closed
2/12/2012	4:38:21 PM	Main Vac valve opened
2/12/2012	4:38:21 PM	Helium MFC set to  0.000000
2/12/2012	4:38:21 PM	H2 MFC set to  0.000000
2/12/2012	4:38:21 PM	BCl3 MFC set to  0.000000
2/12/2012	4:38:21 PM	PH3 MFC set to  0.000000
2/12/2012	4:38:21 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:38:21 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:38:21 PM	Tube furnace set to 0
2/12/2012	4:38:51 PM	H2 valve closed
2/12/2012	4:38:51 PM	BCl3 valve closed
2/12/2012	4:38:51 PM	PH3 valve closed
2/12/2012	4:38:51 PM	SiCl4 pre valve closed
2/12/2012	4:38:51 PM	SiCl4 post valve closed
2/12/2012	4:38:51 PM	Bypass valve closed
2/12/2012	4:38:51 PM	Bubbler valve closed
2/12/2012	4:38:51 PM	Helium valve opened
2/12/2012	4:38:51 PM	Main Vac valve opened
2/12/2012	4:38:51 PM	Helium MFC set to  20.000000
2/12/2012	4:38:51 PM	H2 MFC set to  0.000000
2/12/2012	4:38:51 PM	BCl3 MFC set to  0.000000
2/12/2012	4:38:51 PM	PH3 MFC set to  0.000000
2/12/2012	4:38:51 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:38:51 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:38:51 PM	Tube furnace set to 0
2/12/2012	4:39:21 PM	Helium valve closed
2/12/2012	4:39:21 PM	H2 valve closed
2/12/2012	4:39:21 PM	BCl3 valve closed
2/12/2012	4:39:21 PM	PH3 valve closed
2/12/2012	4:39:21 PM	SiCl4 pre valve closed
2/12/2012	4:39:21 PM	SiCl4 post valve closed
2/12/2012	4:39:21 PM	Bypass valve closed
2/12/2012	4:39:21 PM	Bubbler valve closed
2/12/2012	4:39:21 PM	Main Vac valve opened
2/12/2012	4:39:21 PM	Helium MFC set to  0.000000
2/12/2012	4:39:21 PM	H2 MFC set to  0.000000
2/12/2012	4:39:21 PM	BCl3 MFC set to  0.000000
2/12/2012	4:39:21 PM	PH3 MFC set to  0.000000
2/12/2012	4:39:21 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:39:21 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:39:21 PM	Tube furnace set to 0
2/12/2012	4:39:51 PM	H2 valve closed
2/12/2012	4:39:51 PM	BCl3 valve closed
2/12/2012	4:39:51 PM	PH3 valve closed
2/12/2012	4:39:51 PM	SiCl4 pre valve closed
2/12/2012	4:39:51 PM	SiCl4 post valve closed
2/12/2012	4:39:51 PM	Bypass valve closed
2/12/2012	4:39:51 PM	Bubbler valve closed
2/12/2012	4:39:51 PM	Helium valve opened
2/12/2012	4:39:51 PM	Main Vac valve opened
2/12/2012	4:39:51 PM	Helium MFC set to  20.000000
2/12/2012	4:39:51 PM	H2 MFC set to  0.000000
2/12/2012	4:39:51 PM	BCl3 MFC set to  0.000000
2/12/2012	4:39:51 PM	PH3 MFC set to  0.000000
2/12/2012	4:39:51 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:39:51 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:39:52 PM	Tube furnace set to 0
2/12/2012	4:40:22 PM	Helium valve closed
2/12/2012	4:40:22 PM	H2 valve closed
2/12/2012	4:40:22 PM	BCl3 valve closed
2/12/2012	4:40:22 PM	PH3 valve closed
2/12/2012	4:40:22 PM	SiCl4 pre valve closed
2/12/2012	4:40:22 PM	SiCl4 post valve closed
2/12/2012	4:40:22 PM	Bypass valve closed
2/12/2012	4:40:22 PM	Bubbler valve closed
2/12/2012	4:40:22 PM	Main Vac valve opened
2/12/2012	4:40:22 PM	Helium MFC set to  0.000000
2/12/2012	4:40:22 PM	H2 MFC set to  0.000000
2/12/2012	4:40:22 PM	BCl3 MFC set to  0.000000
2/12/2012	4:40:22 PM	PH3 MFC set to  0.000000
2/12/2012	4:40:22 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:40:22 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:40:22 PM	Tube furnace set to 0
2/12/2012	4:40:52 PM	H2 valve closed
2/12/2012	4:40:52 PM	BCl3 valve closed
2/12/2012	4:40:52 PM	PH3 valve closed
2/12/2012	4:40:52 PM	SiCl4 pre valve closed
2/12/2012	4:40:52 PM	SiCl4 post valve closed
2/12/2012	4:40:52 PM	Bypass valve closed
2/12/2012	4:40:52 PM	Bubbler valve closed
2/12/2012	4:40:52 PM	Helium valve opened
2/12/2012	4:40:52 PM	Main Vac valve opened
2/12/2012	4:40:52 PM	Helium MFC set to  20.000000
2/12/2012	4:40:52 PM	H2 MFC set to  0.000000
2/12/2012	4:40:52 PM	BCl3 MFC set to  0.000000
2/12/2012	4:40:52 PM	PH3 MFC set to  0.000000
2/12/2012	4:40:52 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:40:52 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:40:52 PM	Tube furnace set to 0
2/12/2012	4:41:22 PM	Helium valve closed
2/12/2012	4:41:22 PM	H2 valve closed
2/12/2012	4:41:22 PM	BCl3 valve closed
2/12/2012	4:41:22 PM	PH3 valve closed
2/12/2012	4:41:22 PM	SiCl4 pre valve closed
2/12/2012	4:41:22 PM	SiCl4 post valve closed
2/12/2012	4:41:22 PM	Bypass valve closed
2/12/2012	4:41:22 PM	Bubbler valve closed
2/12/2012	4:41:22 PM	Main Vac valve opened
2/12/2012	4:41:22 PM	Helium MFC set to  0.000000
2/12/2012	4:41:22 PM	H2 MFC set to  0.000000
2/12/2012	4:41:22 PM	BCl3 MFC set to  0.000000
2/12/2012	4:41:22 PM	PH3 MFC set to  0.000000
2/12/2012	4:41:22 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:41:22 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:41:22 PM	Tube furnace set to 0
2/12/2012	4:41:52 PM	H2 valve closed
2/12/2012	4:41:52 PM	BCl3 valve closed
2/12/2012	4:41:52 PM	PH3 valve closed
2/12/2012	4:41:52 PM	SiCl4 pre valve closed
2/12/2012	4:41:52 PM	SiCl4 post valve closed
2/12/2012	4:41:52 PM	Bypass valve closed
2/12/2012	4:41:52 PM	Bubbler valve closed
2/12/2012	4:41:52 PM	Helium valve opened
2/12/2012	4:41:52 PM	Main Vac valve opened
2/12/2012	4:41:52 PM	Helium MFC set to  20.000000
2/12/2012	4:41:52 PM	H2 MFC set to  0.000000
2/12/2012	4:41:52 PM	BCl3 MFC set to  0.000000
2/12/2012	4:41:52 PM	PH3 MFC set to  0.000000
2/12/2012	4:41:52 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:41:52 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:41:52 PM	Tube furnace set to 0
2/12/2012	4:42:22 PM	Helium valve closed
2/12/2012	4:42:22 PM	H2 valve closed
2/12/2012	4:42:22 PM	BCl3 valve closed
2/12/2012	4:42:22 PM	PH3 valve closed
2/12/2012	4:42:22 PM	SiCl4 pre valve closed
2/12/2012	4:42:22 PM	SiCl4 post valve closed
2/12/2012	4:42:22 PM	Bypass valve closed
2/12/2012	4:42:23 PM	Bubbler valve closed
2/12/2012	4:42:23 PM	Main Vac valve opened
2/12/2012	4:42:23 PM	Helium MFC set to  0.000000
2/12/2012	4:42:23 PM	H2 MFC set to  0.000000
2/12/2012	4:42:23 PM	BCl3 MFC set to  0.000000
2/12/2012	4:42:23 PM	PH3 MFC set to  0.000000
2/12/2012	4:42:23 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:42:23 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:42:23 PM	Tube furnace set to 0
2/12/2012	4:42:53 PM	H2 valve closed
2/12/2012	4:42:53 PM	BCl3 valve closed
2/12/2012	4:42:53 PM	PH3 valve closed
2/12/2012	4:42:53 PM	SiCl4 pre valve closed
2/12/2012	4:42:53 PM	SiCl4 post valve closed
2/12/2012	4:42:53 PM	Bypass valve closed
2/12/2012	4:42:53 PM	Bubbler valve closed
2/12/2012	4:42:53 PM	Helium valve opened
2/12/2012	4:42:53 PM	Main Vac valve opened
2/12/2012	4:42:53 PM	Helium MFC set to  20.000000
2/12/2012	4:42:53 PM	H2 MFC set to  0.000000
2/12/2012	4:42:53 PM	BCl3 MFC set to  0.000000
2/12/2012	4:42:53 PM	PH3 MFC set to  0.000000
2/12/2012	4:42:53 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:42:53 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:42:53 PM	Tube furnace set to 0
2/12/2012	4:43:23 PM	Helium valve closed
2/12/2012	4:43:23 PM	H2 valve closed
2/12/2012	4:43:23 PM	BCl3 valve closed
2/12/2012	4:43:23 PM	PH3 valve closed
2/12/2012	4:43:23 PM	SiCl4 pre valve closed
2/12/2012	4:43:23 PM	SiCl4 post valve closed
2/12/2012	4:43:23 PM	Bypass valve closed
2/12/2012	4:43:23 PM	Bubbler valve closed
2/12/2012	4:43:23 PM	Main Vac valve opened
2/12/2012	4:43:23 PM	Helium MFC set to  0.000000
2/12/2012	4:43:23 PM	H2 MFC set to  0.000000
2/12/2012	4:43:23 PM	BCl3 MFC set to  0.000000
2/12/2012	4:43:23 PM	PH3 MFC set to  0.000000
2/12/2012	4:43:23 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:43:23 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:43:23 PM	Tube furnace set to 0
2/12/2012	4:43:53 PM	H2 valve closed
2/12/2012	4:43:53 PM	BCl3 valve closed
2/12/2012	4:43:53 PM	PH3 valve closed
2/12/2012	4:43:53 PM	SiCl4 pre valve closed
2/12/2012	4:43:53 PM	SiCl4 post valve closed
2/12/2012	4:43:53 PM	Bypass valve closed
2/12/2012	4:43:53 PM	Bubbler valve closed
2/12/2012	4:43:53 PM	Helium valve opened
2/12/2012	4:43:53 PM	Main Vac valve opened
2/12/2012	4:43:53 PM	Helium MFC set to  20.000000
2/12/2012	4:43:53 PM	H2 MFC set to  0.000000
2/12/2012	4:43:53 PM	BCl3 MFC set to  0.000000
2/12/2012	4:43:53 PM	PH3 MFC set to  0.000000
2/12/2012	4:43:53 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:43:53 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:43:53 PM	Tube furnace set to 0
2/12/2012	4:44:23 PM	Helium valve closed
2/12/2012	4:44:23 PM	H2 valve closed
2/12/2012	4:44:23 PM	BCl3 valve closed
2/12/2012	4:44:23 PM	PH3 valve closed
2/12/2012	4:44:23 PM	SiCl4 pre valve closed
2/12/2012	4:44:23 PM	SiCl4 post valve closed
2/12/2012	4:44:23 PM	Bypass valve closed
2/12/2012	4:44:23 PM	Bubbler valve closed
2/12/2012	4:44:23 PM	Main Vac valve opened
2/12/2012	4:44:23 PM	Helium MFC set to  0.000000
2/12/2012	4:44:23 PM	H2 MFC set to  0.000000
2/12/2012	4:44:23 PM	BCl3 MFC set to  0.000000
2/12/2012	4:44:23 PM	PH3 MFC set to  0.000000
2/12/2012	4:44:23 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:44:23 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:44:23 PM	Tube furnace set to 200
2/12/2012	4:44:54 PM	H2 valve closed
2/12/2012	4:44:54 PM	BCl3 valve closed
2/12/2012	4:44:54 PM	PH3 valve closed
2/12/2012	4:44:54 PM	SiCl4 pre valve closed
2/12/2012	4:44:54 PM	SiCl4 post valve closed
2/12/2012	4:44:54 PM	Bypass valve closed
2/12/2012	4:44:54 PM	Bubbler valve closed
2/12/2012	4:44:54 PM	Helium valve opened
2/12/2012	4:44:54 PM	Main Vac valve opened
2/12/2012	4:44:54 PM	Helium MFC set to  20.000000
2/12/2012	4:44:54 PM	H2 MFC set to  0.000000
2/12/2012	4:44:54 PM	BCl3 MFC set to  0.000000
2/12/2012	4:44:54 PM	PH3 MFC set to  0.000000
2/12/2012	4:44:54 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:44:54 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:44:54 PM	Tube furnace set to 200
2/12/2012	4:45:24 PM	Helium valve closed
2/12/2012	4:45:24 PM	H2 valve closed
2/12/2012	4:45:24 PM	BCl3 valve closed
2/12/2012	4:45:24 PM	PH3 valve closed
2/12/2012	4:45:24 PM	SiCl4 pre valve closed
2/12/2012	4:45:24 PM	SiCl4 post valve closed
2/12/2012	4:45:24 PM	Bypass valve closed
2/12/2012	4:45:24 PM	Bubbler valve closed
2/12/2012	4:45:24 PM	Main Vac valve opened
2/12/2012	4:45:24 PM	Helium MFC set to  0.000000
2/12/2012	4:45:24 PM	H2 MFC set to  0.000000
2/12/2012	4:45:24 PM	BCl3 MFC set to  0.000000
2/12/2012	4:45:24 PM	PH3 MFC set to  0.000000
2/12/2012	4:45:24 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:45:24 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:45:24 PM	Tube furnace set to 200
2/12/2012	4:45:54 PM	H2 valve closed
2/12/2012	4:45:54 PM	BCl3 valve closed
2/12/2012	4:45:54 PM	PH3 valve closed
2/12/2012	4:45:54 PM	SiCl4 pre valve closed
2/12/2012	4:45:54 PM	SiCl4 post valve closed
2/12/2012	4:45:54 PM	Bypass valve closed
2/12/2012	4:45:54 PM	Bubbler valve closed
2/12/2012	4:45:54 PM	Helium valve opened
2/12/2012	4:45:54 PM	Main Vac valve opened
2/12/2012	4:45:54 PM	Helium MFC set to  20.000000
2/12/2012	4:45:54 PM	H2 MFC set to  0.000000
2/12/2012	4:45:54 PM	BCl3 MFC set to  0.000000
2/12/2012	4:45:54 PM	PH3 MFC set to  0.000000
2/12/2012	4:45:54 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:45:54 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:45:54 PM	Tube furnace set to 200
2/12/2012	4:46:24 PM	Helium valve closed
2/12/2012	4:46:24 PM	H2 valve closed
2/12/2012	4:46:24 PM	BCl3 valve closed
2/12/2012	4:46:24 PM	PH3 valve closed
2/12/2012	4:46:24 PM	SiCl4 pre valve closed
2/12/2012	4:46:24 PM	SiCl4 post valve closed
2/12/2012	4:46:24 PM	Bypass valve closed
2/12/2012	4:46:24 PM	Bubbler valve closed
2/12/2012	4:46:24 PM	Main Vac valve opened
2/12/2012	4:46:24 PM	Helium MFC set to  0.000000
2/12/2012	4:46:24 PM	H2 MFC set to  0.000000
2/12/2012	4:46:24 PM	BCl3 MFC set to  0.000000
2/12/2012	4:46:24 PM	PH3 MFC set to  0.000000
2/12/2012	4:46:24 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:46:24 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:46:24 PM	Tube furnace set to 200
2/12/2012	4:46:54 PM	H2 valve closed
2/12/2012	4:46:54 PM	BCl3 valve closed
2/12/2012	4:46:54 PM	PH3 valve closed
2/12/2012	4:46:54 PM	SiCl4 pre valve closed
2/12/2012	4:46:54 PM	SiCl4 post valve closed
2/12/2012	4:46:54 PM	Bypass valve closed
2/12/2012	4:46:54 PM	Bubbler valve closed
2/12/2012	4:46:54 PM	Helium valve opened
2/12/2012	4:46:54 PM	Main Vac valve opened
2/12/2012	4:46:54 PM	Helium MFC set to  20.000000
2/12/2012	4:46:54 PM	H2 MFC set to  0.000000
2/12/2012	4:46:54 PM	BCl3 MFC set to  0.000000
2/12/2012	4:46:54 PM	PH3 MFC set to  0.000000
2/12/2012	4:46:54 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:46:54 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:46:55 PM	Tube furnace set to 200
2/12/2012	4:47:25 PM	Helium valve closed
2/12/2012	4:47:25 PM	H2 valve closed
2/12/2012	4:47:25 PM	BCl3 valve closed
2/12/2012	4:47:25 PM	PH3 valve closed
2/12/2012	4:47:25 PM	SiCl4 pre valve closed
2/12/2012	4:47:25 PM	SiCl4 post valve closed
2/12/2012	4:47:25 PM	Bypass valve closed
2/12/2012	4:47:25 PM	Bubbler valve closed
2/12/2012	4:47:25 PM	Main Vac valve opened
2/12/2012	4:47:25 PM	Helium MFC set to  0.000000
2/12/2012	4:47:25 PM	H2 MFC set to  0.000000
2/12/2012	4:47:25 PM	BCl3 MFC set to  0.000000
2/12/2012	4:47:25 PM	PH3 MFC set to  0.000000
2/12/2012	4:47:25 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:47:25 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:47:25 PM	Tube furnace set to 200
2/12/2012	4:47:55 PM	H2 valve closed
2/12/2012	4:47:55 PM	BCl3 valve closed
2/12/2012	4:47:55 PM	PH3 valve closed
2/12/2012	4:47:55 PM	SiCl4 pre valve closed
2/12/2012	4:47:55 PM	SiCl4 post valve closed
2/12/2012	4:47:55 PM	Bypass valve closed
2/12/2012	4:47:55 PM	Bubbler valve closed
2/12/2012	4:47:55 PM	Helium valve opened
2/12/2012	4:47:55 PM	Main Vac valve opened
2/12/2012	4:47:55 PM	Helium MFC set to  20.000000
2/12/2012	4:47:55 PM	H2 MFC set to  0.000000
2/12/2012	4:47:55 PM	BCl3 MFC set to  0.000000
2/12/2012	4:47:55 PM	PH3 MFC set to  0.000000
2/12/2012	4:47:55 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:47:55 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:47:55 PM	Tube furnace set to 200
2/12/2012	4:48:25 PM	Helium valve closed
2/12/2012	4:48:25 PM	H2 valve closed
2/12/2012	4:48:25 PM	BCl3 valve closed
2/12/2012	4:48:25 PM	PH3 valve closed
2/12/2012	4:48:25 PM	SiCl4 pre valve closed
2/12/2012	4:48:25 PM	SiCl4 post valve closed
2/12/2012	4:48:25 PM	Bypass valve closed
2/12/2012	4:48:25 PM	Bubbler valve closed
2/12/2012	4:48:25 PM	Main Vac valve opened
2/12/2012	4:48:25 PM	Helium MFC set to  0.000000
2/12/2012	4:48:25 PM	H2 MFC set to  0.000000
2/12/2012	4:48:25 PM	BCl3 MFC set to  0.000000
2/12/2012	4:48:25 PM	PH3 MFC set to  0.000000
2/12/2012	4:48:25 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:48:25 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:48:25 PM	Tube furnace set to 200
2/12/2012	4:48:55 PM	H2 valve closed
2/12/2012	4:48:55 PM	BCl3 valve closed
2/12/2012	4:48:55 PM	PH3 valve closed
2/12/2012	4:48:55 PM	SiCl4 pre valve closed
2/12/2012	4:48:55 PM	SiCl4 post valve closed
2/12/2012	4:48:55 PM	Bypass valve closed
2/12/2012	4:48:55 PM	Bubbler valve closed
2/12/2012	4:48:55 PM	Helium valve opened
2/12/2012	4:48:55 PM	Main Vac valve opened
2/12/2012	4:48:55 PM	Helium MFC set to  20.000000
2/12/2012	4:48:55 PM	H2 MFC set to  0.000000
2/12/2012	4:48:55 PM	BCl3 MFC set to  0.000000
2/12/2012	4:48:55 PM	PH3 MFC set to  0.000000
2/12/2012	4:48:55 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:48:55 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:48:55 PM	Tube furnace set to 200
2/12/2012	4:49:25 PM	Helium valve closed
2/12/2012	4:49:25 PM	H2 valve closed
2/12/2012	4:49:25 PM	BCl3 valve closed
2/12/2012	4:49:25 PM	PH3 valve closed
2/12/2012	4:49:25 PM	SiCl4 pre valve closed
2/12/2012	4:49:25 PM	SiCl4 post valve closed
2/12/2012	4:49:25 PM	Bypass valve closed
2/12/2012	4:49:25 PM	Bubbler valve closed
2/12/2012	4:49:25 PM	Main Vac valve opened
2/12/2012	4:49:25 PM	Helium MFC set to  0.000000
2/12/2012	4:49:25 PM	H2 MFC set to  0.000000
2/12/2012	4:49:25 PM	BCl3 MFC set to  0.000000
2/12/2012	4:49:25 PM	PH3 MFC set to  0.000000
2/12/2012	4:49:25 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:49:25 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:49:26 PM	Tube furnace set to 200
2/12/2012	4:49:56 PM	H2 valve closed
2/12/2012	4:49:56 PM	BCl3 valve closed
2/12/2012	4:49:56 PM	PH3 valve closed
2/12/2012	4:49:56 PM	SiCl4 pre valve closed
2/12/2012	4:49:56 PM	SiCl4 post valve closed
2/12/2012	4:49:56 PM	Bypass valve closed
2/12/2012	4:49:56 PM	Bubbler valve closed
2/12/2012	4:49:56 PM	Helium valve opened
2/12/2012	4:49:56 PM	Main Vac valve opened
2/12/2012	4:49:56 PM	Helium MFC set to  20.000000
2/12/2012	4:49:56 PM	H2 MFC set to  0.000000
2/12/2012	4:49:56 PM	BCl3 MFC set to  0.000000
2/12/2012	4:49:56 PM	PH3 MFC set to  0.000000
2/12/2012	4:49:56 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:49:56 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:49:56 PM	Tube furnace set to 200
2/12/2012	4:50:26 PM	Helium valve closed
2/12/2012	4:50:26 PM	H2 valve closed
2/12/2012	4:50:26 PM	BCl3 valve closed
2/12/2012	4:50:26 PM	PH3 valve closed
2/12/2012	4:50:26 PM	SiCl4 pre valve closed
2/12/2012	4:50:26 PM	SiCl4 post valve closed
2/12/2012	4:50:26 PM	Bypass valve closed
2/12/2012	4:50:26 PM	Bubbler valve closed
2/12/2012	4:50:26 PM	Main Vac valve opened
2/12/2012	4:50:26 PM	Helium MFC set to  0.000000
2/12/2012	4:50:26 PM	H2 MFC set to  0.000000
2/12/2012	4:50:26 PM	BCl3 MFC set to  0.000000
2/12/2012	4:50:26 PM	PH3 MFC set to  0.000000
2/12/2012	4:50:26 PM	SiCl4 MFC set to  0.000000
2/12/2012	4:50:26 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	4:50:26 PM	Tube furnace set to 0
2/12/2012	4:50:27 PM	Run finished at 4:50 PM
2/12/2012	4:59:58 PM	Main Vac valve closed
2/12/2012	5:00:10 PM	Main Vac valve opened
2/12/2012	5:01:58 PM	Recipe started at 5:01 PM
2/12/2012	5:01:58 PM	Helium valve closed
2/12/2012	5:01:58 PM	H2 valve closed
2/12/2012	5:01:58 PM	BCl3 valve closed
2/12/2012	5:01:58 PM	PH3 valve closed
2/12/2012	5:01:58 PM	SiCl4 pre valve closed
2/12/2012	5:01:58 PM	SiCl4 post valve closed
2/12/2012	5:01:58 PM	Main Vac valve closed
2/12/2012	5:01:58 PM	Bypass valve closed
2/12/2012	5:01:58 PM	Bubbler valve closed
2/12/2012	5:01:58 PM	Helium MFC set to  0.000000
2/12/2012	5:01:58 PM	H2 MFC set to  0.000000
2/12/2012	5:01:58 PM	BCl3 MFC set to  0.000000
2/12/2012	5:01:58 PM	PH3 MFC set to  0.000000
2/12/2012	5:01:58 PM	SiCl4 MFC set to  0.000000
2/12/2012	5:01:58 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	5:01:58 PM	Tube furnace set to 0
2/12/2012	5:02:01 PM	Helium valve closed
2/12/2012	5:02:01 PM	BCl3 valve closed
2/12/2012	5:02:01 PM	PH3 valve closed
2/12/2012	5:02:01 PM	SiCl4 pre valve closed
2/12/2012	5:02:01 PM	SiCl4 post valve closed
2/12/2012	5:02:01 PM	Main Vac valve closed
2/12/2012	5:02:01 PM	Bypass valve closed
2/12/2012	5:02:01 PM	Bubbler valve closed
2/12/2012	5:02:01 PM	H2 valve opened
2/12/2012	5:02:01 PM	Helium MFC set to  0.000000
2/12/2012	5:02:01 PM	H2 MFC set to  500.000000
2/12/2012	5:02:01 PM	BCl3 MFC set to  0.000000
2/12/2012	5:02:01 PM	PH3 MFC set to  0.000000
2/12/2012	5:02:01 PM	SiCl4 MFC set to  0.000000
2/12/2012	5:02:01 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	5:02:01 PM	Tube furnace set to 0
2/12/2012	5:03:05 PM	Helium valve closed
2/12/2012	5:03:05 PM	BCl3 valve closed
2/12/2012	5:03:05 PM	PH3 valve closed
2/12/2012	5:03:05 PM	SiCl4 pre valve closed
2/12/2012	5:03:05 PM	SiCl4 post valve closed
2/12/2012	5:03:05 PM	Main Vac valve closed
2/12/2012	5:03:05 PM	Bypass valve closed
2/12/2012	5:03:05 PM	H2 valve opened
2/12/2012	5:03:05 PM	Bubbler valve opened
2/12/2012	5:03:05 PM	Helium MFC set to  0.000000
2/12/2012	5:03:05 PM	H2 MFC set to  500.000000
2/12/2012	5:03:05 PM	BCl3 MFC set to  0.000000
2/12/2012	5:03:05 PM	PH3 MFC set to  0.000000
2/12/2012	5:03:05 PM	SiCl4 MFC set to  0.000000
2/12/2012	5:03:05 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	5:03:06 PM	Tube furnace set to 0
2/12/2012	5:03:07 PM	Helium valve closed
2/12/2012	5:03:07 PM	BCl3 valve closed
2/12/2012	5:03:07 PM	PH3 valve closed
2/12/2012	5:03:07 PM	SiCl4 pre valve closed
2/12/2012	5:03:07 PM	SiCl4 post valve closed
2/12/2012	5:03:07 PM	Main Vac valve closed
2/12/2012	5:03:07 PM	Bypass valve closed
2/12/2012	5:03:07 PM	H2 valve opened
2/12/2012	5:03:07 PM	Bubbler valve opened
2/12/2012	5:03:07 PM	Helium MFC set to  0.000000
2/12/2012	5:03:07 PM	H2 MFC set to  500.000000
2/12/2012	5:03:07 PM	BCl3 MFC set to  0.000000
2/12/2012	5:03:07 PM	PH3 MFC set to  0.000000
2/12/2012	5:03:07 PM	SiCl4 MFC set to  0.000000
2/12/2012	5:03:07 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	5:03:07 PM	Tube furnace set to 1000
2/12/2012	5:23:07 PM	Helium valve closed
2/12/2012	5:23:07 PM	BCl3 valve closed
2/12/2012	5:23:07 PM	Main Vac valve closed
2/12/2012	5:23:07 PM	Bypass valve closed
2/12/2012	5:23:07 PM	H2 valve opened
2/12/2012	5:23:07 PM	PH3 valve opened
2/12/2012	5:23:07 PM	SiCl4 pre valve opened
2/12/2012	5:23:07 PM	SiCl4 post valve opened
2/12/2012	5:23:07 PM	Bubbler valve opened
2/12/2012	5:23:07 PM	Helium MFC set to  0.000000
2/12/2012	5:23:07 PM	H2 MFC set to  500.000000
2/12/2012	5:23:07 PM	BCl3 MFC set to  0.000000
2/12/2012	5:23:07 PM	PH3 MFC set to  1.000000
2/12/2012	5:23:07 PM	SiCl4 MFC set to  50.000000
2/12/2012	5:23:07 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	5:23:07 PM	Tube furnace set to 1000
2/12/2012	5:38:07 PM	Helium valve closed
2/12/2012	5:38:07 PM	BCl3 valve closed
2/12/2012	5:38:07 PM	PH3 valve closed
2/12/2012	5:38:07 PM	SiCl4 pre valve closed
2/12/2012	5:38:07 PM	SiCl4 post valve closed
2/12/2012	5:38:07 PM	Main Vac valve closed
2/12/2012	5:38:07 PM	Bypass valve closed
2/12/2012	5:38:07 PM	H2 valve opened
2/12/2012	5:38:07 PM	Bubbler valve opened
2/12/2012	5:38:07 PM	Helium MFC set to  0.000000
2/12/2012	5:38:07 PM	H2 MFC set to  500.000000
2/12/2012	5:38:07 PM	BCl3 MFC set to  0.000000
2/12/2012	5:38:07 PM	PH3 MFC set to  0.000000
2/12/2012	5:38:07 PM	SiCl4 MFC set to  0.000000
2/12/2012	5:38:07 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	5:38:07 PM	Tube furnace set to 950
2/12/2012	5:40:07 PM	Helium valve closed
2/12/2012	5:40:07 PM	BCl3 valve closed
2/12/2012	5:40:07 PM	PH3 valve closed
2/12/2012	5:40:07 PM	SiCl4 pre valve closed
2/12/2012	5:40:07 PM	SiCl4 post valve closed
2/12/2012	5:40:07 PM	Main Vac valve closed
2/12/2012	5:40:07 PM	Bypass valve closed
2/12/2012	5:40:07 PM	H2 valve opened
2/12/2012	5:40:07 PM	Bubbler valve opened
2/12/2012	5:40:07 PM	Helium MFC set to  0.000000
2/12/2012	5:40:07 PM	H2 MFC set to  500.000000
2/12/2012	5:40:07 PM	BCl3 MFC set to  0.000000
2/12/2012	5:40:07 PM	PH3 MFC set to  0.000000
2/12/2012	5:40:07 PM	SiCl4 MFC set to  0.000000
2/12/2012	5:40:07 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	5:40:07 PM	Tube furnace set to 900
2/12/2012	5:42:07 PM	Helium valve closed
2/12/2012	5:42:07 PM	BCl3 valve closed
2/12/2012	5:42:07 PM	PH3 valve closed
2/12/2012	5:42:07 PM	SiCl4 pre valve closed
2/12/2012	5:42:07 PM	SiCl4 post valve closed
2/12/2012	5:42:07 PM	Main Vac valve closed
2/12/2012	5:42:07 PM	Bypass valve closed
2/12/2012	5:42:07 PM	H2 valve opened
2/12/2012	5:42:07 PM	Bubbler valve opened
2/12/2012	5:42:07 PM	Helium MFC set to  0.000000
2/12/2012	5:42:07 PM	H2 MFC set to  500.000000
2/12/2012	5:42:07 PM	BCl3 MFC set to  0.000000
2/12/2012	5:42:07 PM	PH3 MFC set to  0.000000
2/12/2012	5:42:07 PM	SiCl4 MFC set to  0.000000
2/12/2012	5:42:07 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	5:42:08 PM	Tube furnace set to 850
2/12/2012	5:44:08 PM	H2 valve closed
2/12/2012	5:44:08 PM	BCl3 valve closed
2/12/2012	5:44:08 PM	PH3 valve closed
2/12/2012	5:44:08 PM	SiCl4 pre valve closed
2/12/2012	5:44:08 PM	SiCl4 post valve closed
2/12/2012	5:44:08 PM	Main Vac valve closed
2/12/2012	5:44:08 PM	Bypass valve closed
2/12/2012	5:44:08 PM	Helium valve opened
2/12/2012	5:44:08 PM	Bubbler valve opened
2/12/2012	5:44:08 PM	Helium MFC set to  500.000000
2/12/2012	5:44:08 PM	H2 MFC set to  0.000000
2/12/2012	5:44:08 PM	BCl3 MFC set to  0.000000
2/12/2012	5:44:08 PM	PH3 MFC set to  0.000000
2/12/2012	5:44:08 PM	SiCl4 MFC set to  0.000000
2/12/2012	5:44:08 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	5:44:08 PM	Tube furnace set to 800
2/12/2012	5:46:08 PM	H2 valve closed
2/12/2012	5:46:08 PM	BCl3 valve closed
2/12/2012	5:46:08 PM	PH3 valve closed
2/12/2012	5:46:08 PM	SiCl4 pre valve closed
2/12/2012	5:46:08 PM	SiCl4 post valve closed
2/12/2012	5:46:08 PM	Main Vac valve closed
2/12/2012	5:46:08 PM	Bypass valve closed
2/12/2012	5:46:08 PM	Helium valve opened
2/12/2012	5:46:08 PM	Bubbler valve opened
2/12/2012	5:46:08 PM	Helium MFC set to  500.000000
2/12/2012	5:46:08 PM	H2 MFC set to  0.000000
2/12/2012	5:46:08 PM	BCl3 MFC set to  0.000000
2/12/2012	5:46:08 PM	PH3 MFC set to  0.000000
2/12/2012	5:46:08 PM	SiCl4 MFC set to  0.000000
2/12/2012	5:46:08 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	5:46:08 PM	Tube furnace set to 750
2/12/2012	5:48:08 PM	H2 valve closed
2/12/2012	5:48:08 PM	BCl3 valve closed
2/12/2012	5:48:08 PM	PH3 valve closed
2/12/2012	5:48:08 PM	SiCl4 pre valve closed
2/12/2012	5:48:08 PM	SiCl4 post valve closed
2/12/2012	5:48:08 PM	Main Vac valve closed
2/12/2012	5:48:08 PM	Bypass valve closed
2/12/2012	5:48:08 PM	Helium valve opened
2/12/2012	5:48:08 PM	Bubbler valve opened
2/12/2012	5:48:08 PM	Helium MFC set to  500.000000
2/12/2012	5:48:08 PM	H2 MFC set to  0.000000
2/12/2012	5:48:08 PM	BCl3 MFC set to  0.000000
2/12/2012	5:48:08 PM	PH3 MFC set to  0.000000
2/12/2012	5:48:08 PM	SiCl4 MFC set to  0.000000
2/12/2012	5:48:08 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	5:48:08 PM	Tube furnace set to 0
2/12/2012	6:08:08 PM	Helium valve closed
2/12/2012	6:08:08 PM	H2 valve closed
2/12/2012	6:08:08 PM	BCl3 valve closed
2/12/2012	6:08:08 PM	PH3 valve closed
2/12/2012	6:08:08 PM	SiCl4 pre valve closed
2/12/2012	6:08:08 PM	SiCl4 post valve closed
2/12/2012	6:08:08 PM	Main Vac valve closed
2/12/2012	6:08:08 PM	Bypass valve closed
2/12/2012	6:08:08 PM	Bubbler valve closed
2/12/2012	6:08:08 PM	Helium MFC set to  0.000000
2/12/2012	6:08:08 PM	H2 MFC set to  0.000000
2/12/2012	6:08:08 PM	BCl3 MFC set to  0.000000
2/12/2012	6:08:08 PM	PH3 MFC set to  0.000000
2/12/2012	6:08:08 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:08:08 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:08:08 PM	Tube furnace set to 0
2/12/2012	6:08:09 PM	Run finished at 6:08 PM
2/12/2012	6:16:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2012	6:16:35 PM	Recipe started at 6:16 PM
2/12/2012	6:16:35 PM	Helium valve closed
2/12/2012	6:16:35 PM	H2 valve closed
2/12/2012	6:16:35 PM	BCl3 valve closed
2/12/2012	6:16:35 PM	PH3 valve closed
2/12/2012	6:16:35 PM	SiCl4 pre valve closed
2/12/2012	6:16:35 PM	SiCl4 post valve closed
2/12/2012	6:16:35 PM	Main Vac valve closed
2/12/2012	6:16:35 PM	Bypass valve closed
2/12/2012	6:16:35 PM	Bubbler valve closed
2/12/2012	6:16:35 PM	Helium MFC set to  0.000000
2/12/2012	6:16:35 PM	H2 MFC set to  0.000000
2/12/2012	6:16:35 PM	BCl3 MFC set to  0.000000
2/12/2012	6:16:35 PM	PH3 MFC set to  0.000000
2/12/2012	6:16:35 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:16:35 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:16:35 PM	Tube furnace set to 0
2/12/2012	6:16:38 PM	H2 valve closed
2/12/2012	6:16:38 PM	BCl3 valve closed
2/12/2012	6:16:38 PM	PH3 valve closed
2/12/2012	6:16:38 PM	SiCl4 pre valve closed
2/12/2012	6:16:38 PM	SiCl4 post valve closed
2/12/2012	6:16:38 PM	Main Vac valve closed
2/12/2012	6:16:38 PM	Bypass valve closed
2/12/2012	6:16:38 PM	Bubbler valve closed
2/12/2012	6:16:38 PM	Helium valve opened
2/12/2012	6:16:38 PM	Helium MFC set to  500.000000
2/12/2012	6:16:38 PM	H2 MFC set to  0.000000
2/12/2012	6:16:38 PM	BCl3 MFC set to  0.000000
2/12/2012	6:16:38 PM	PH3 MFC set to  0.000000
2/12/2012	6:16:38 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:16:38 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:16:38 PM	Tube furnace set to 0
2/12/2012	6:16:39 PM	Helium valve closed
2/12/2012	6:16:39 PM	H2 valve closed
2/12/2012	6:16:39 PM	BCl3 valve closed
2/12/2012	6:16:39 PM	PH3 valve closed
2/12/2012	6:16:39 PM	SiCl4 pre valve closed
2/12/2012	6:16:39 PM	SiCl4 post valve closed
2/12/2012	6:16:39 PM	Main Vac valve closed
2/12/2012	6:16:39 PM	Bypass valve closed
2/12/2012	6:16:39 PM	Bubbler valve closed
2/12/2012	6:16:39 PM	Helium MFC set to  0.000000
2/12/2012	6:16:39 PM	H2 MFC set to  0.000000
2/12/2012	6:16:39 PM	BCl3 MFC set to  0.000000
2/12/2012	6:16:39 PM	PH3 MFC set to  0.000000
2/12/2012	6:16:39 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:16:39 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:16:40 PM	Tube furnace set to 0
2/12/2012	6:16:41 PM	Run finished at 6:16 PM
2/12/2012	6:16:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2012	6:19:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2012	6:19:06 PM	Recipe started at 6:19 PM
2/12/2012	6:19:07 PM	Helium valve closed
2/12/2012	6:19:07 PM	H2 valve closed
2/12/2012	6:19:07 PM	BCl3 valve closed
2/12/2012	6:19:07 PM	PH3 valve closed
2/12/2012	6:19:07 PM	SiCl4 pre valve closed
2/12/2012	6:19:07 PM	SiCl4 post valve closed
2/12/2012	6:19:07 PM	Main Vac valve closed
2/12/2012	6:19:07 PM	Bubbler valve closed
2/12/2012	6:19:07 PM	Bypass valve opened
2/12/2012	6:19:07 PM	Helium MFC set to  0.000000
2/12/2012	6:19:07 PM	H2 MFC set to  0.000000
2/12/2012	6:19:07 PM	BCl3 MFC set to  0.000000
2/12/2012	6:19:07 PM	PH3 MFC set to  0.000000
2/12/2012	6:19:07 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:19:07 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:19:07 PM	Tube furnace set to 0
2/12/2012	6:20:06 PM	Helium valve closed
2/12/2012	6:20:06 PM	H2 valve closed
2/12/2012	6:20:06 PM	BCl3 valve closed
2/12/2012	6:20:06 PM	PH3 valve closed
2/12/2012	6:20:06 PM	SiCl4 pre valve closed
2/12/2012	6:20:06 PM	SiCl4 post valve closed
2/12/2012	6:20:06 PM	Main Vac valve closed
2/12/2012	6:20:06 PM	Bubbler valve closed
2/12/2012	6:20:06 PM	Bypass valve opened
2/12/2012	6:20:06 PM	Helium MFC set to  0.000000
2/12/2012	6:20:06 PM	H2 MFC set to  0.000000
2/12/2012	6:20:06 PM	BCl3 MFC set to  0.000000
2/12/2012	6:20:06 PM	PH3 MFC set to  0.000000
2/12/2012	6:20:06 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:20:06 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:20:06 PM	Tube furnace set to 0
2/12/2012	6:21:06 PM	Helium valve closed
2/12/2012	6:21:06 PM	H2 valve closed
2/12/2012	6:21:06 PM	BCl3 valve closed
2/12/2012	6:21:06 PM	PH3 valve closed
2/12/2012	6:21:06 PM	SiCl4 pre valve closed
2/12/2012	6:21:06 PM	SiCl4 post valve closed
2/12/2012	6:21:06 PM	Bypass valve closed
2/12/2012	6:21:06 PM	Bubbler valve closed
2/12/2012	6:21:06 PM	Main Vac valve opened
2/12/2012	6:21:06 PM	Helium MFC set to  0.000000
2/12/2012	6:21:06 PM	H2 MFC set to  0.000000
2/12/2012	6:21:06 PM	BCl3 MFC set to  0.000000
2/12/2012	6:21:06 PM	PH3 MFC set to  0.000000
2/12/2012	6:21:06 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:21:06 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:21:07 PM	Tube furnace set to 0
2/12/2012	6:21:08 PM	Run finished at 6:21 PM
2/12/2012	6:21:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2012	6:32:14 PM	Main Vac valve closed
2/12/2012	6:32:18 PM	Main Vac valve opened
2/12/2012	6:32:55 PM	Recipe started at 6:32 PM
2/12/2012	6:32:55 PM	Helium valve closed
2/12/2012	6:32:55 PM	H2 valve closed
2/12/2012	6:32:55 PM	BCl3 valve closed
2/12/2012	6:32:55 PM	PH3 valve closed
2/12/2012	6:32:55 PM	SiCl4 pre valve closed
2/12/2012	6:32:55 PM	SiCl4 post valve closed
2/12/2012	6:32:55 PM	Bypass valve closed
2/12/2012	6:32:55 PM	Bubbler valve closed
2/12/2012	6:32:55 PM	Main Vac valve opened
2/12/2012	6:32:55 PM	Helium MFC set to  0.000000
2/12/2012	6:32:55 PM	H2 MFC set to  0.000000
2/12/2012	6:32:55 PM	BCl3 MFC set to  0.000000
2/12/2012	6:32:55 PM	PH3 MFC set to  0.000000
2/12/2012	6:32:55 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:32:55 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:32:55 PM	Tube furnace set to 0
2/12/2012	6:33:26 PM	H2 valve closed
2/12/2012	6:33:26 PM	BCl3 valve closed
2/12/2012	6:33:26 PM	PH3 valve closed
2/12/2012	6:33:26 PM	SiCl4 pre valve closed
2/12/2012	6:33:26 PM	SiCl4 post valve closed
2/12/2012	6:33:26 PM	Bypass valve closed
2/12/2012	6:33:26 PM	Bubbler valve closed
2/12/2012	6:33:26 PM	Helium valve opened
2/12/2012	6:33:26 PM	Main Vac valve opened
2/12/2012	6:33:26 PM	Helium MFC set to  20.000000
2/12/2012	6:33:26 PM	H2 MFC set to  0.000000
2/12/2012	6:33:26 PM	BCl3 MFC set to  0.000000
2/12/2012	6:33:26 PM	PH3 MFC set to  0.000000
2/12/2012	6:33:26 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:33:26 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:33:26 PM	Tube furnace set to 0
2/12/2012	6:33:56 PM	Helium valve closed
2/12/2012	6:33:56 PM	H2 valve closed
2/12/2012	6:33:56 PM	BCl3 valve closed
2/12/2012	6:33:56 PM	PH3 valve closed
2/12/2012	6:33:56 PM	SiCl4 pre valve closed
2/12/2012	6:33:56 PM	SiCl4 post valve closed
2/12/2012	6:33:56 PM	Bypass valve closed
2/12/2012	6:33:56 PM	Bubbler valve closed
2/12/2012	6:33:56 PM	Main Vac valve opened
2/12/2012	6:33:56 PM	Helium MFC set to  0.000000
2/12/2012	6:33:56 PM	H2 MFC set to  0.000000
2/12/2012	6:33:56 PM	BCl3 MFC set to  0.000000
2/12/2012	6:33:56 PM	PH3 MFC set to  0.000000
2/12/2012	6:33:56 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:33:56 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:33:56 PM	Tube furnace set to 0
2/12/2012	6:34:26 PM	H2 valve closed
2/12/2012	6:34:26 PM	BCl3 valve closed
2/12/2012	6:34:26 PM	PH3 valve closed
2/12/2012	6:34:26 PM	SiCl4 pre valve closed
2/12/2012	6:34:26 PM	SiCl4 post valve closed
2/12/2012	6:34:26 PM	Bypass valve closed
2/12/2012	6:34:26 PM	Bubbler valve closed
2/12/2012	6:34:26 PM	Helium valve opened
2/12/2012	6:34:26 PM	Main Vac valve opened
2/12/2012	6:34:26 PM	Helium MFC set to  20.000000
2/12/2012	6:34:26 PM	H2 MFC set to  0.000000
2/12/2012	6:34:26 PM	BCl3 MFC set to  0.000000
2/12/2012	6:34:26 PM	PH3 MFC set to  0.000000
2/12/2012	6:34:26 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:34:26 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:34:26 PM	Tube furnace set to 0
2/12/2012	6:34:56 PM	Helium valve closed
2/12/2012	6:34:56 PM	H2 valve closed
2/12/2012	6:34:56 PM	BCl3 valve closed
2/12/2012	6:34:56 PM	PH3 valve closed
2/12/2012	6:34:56 PM	SiCl4 pre valve closed
2/12/2012	6:34:56 PM	SiCl4 post valve closed
2/12/2012	6:34:56 PM	Bypass valve closed
2/12/2012	6:34:56 PM	Bubbler valve closed
2/12/2012	6:34:56 PM	Main Vac valve opened
2/12/2012	6:34:56 PM	Helium MFC set to  0.000000
2/12/2012	6:34:56 PM	H2 MFC set to  0.000000
2/12/2012	6:34:56 PM	BCl3 MFC set to  0.000000
2/12/2012	6:34:56 PM	PH3 MFC set to  0.000000
2/12/2012	6:34:56 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:34:56 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:34:56 PM	Tube furnace set to 0
2/12/2012	6:35:26 PM	H2 valve closed
2/12/2012	6:35:26 PM	BCl3 valve closed
2/12/2012	6:35:26 PM	PH3 valve closed
2/12/2012	6:35:26 PM	SiCl4 pre valve closed
2/12/2012	6:35:26 PM	SiCl4 post valve closed
2/12/2012	6:35:26 PM	Bypass valve closed
2/12/2012	6:35:26 PM	Bubbler valve closed
2/12/2012	6:35:26 PM	Helium valve opened
2/12/2012	6:35:26 PM	Main Vac valve opened
2/12/2012	6:35:26 PM	Helium MFC set to  20.000000
2/12/2012	6:35:26 PM	H2 MFC set to  0.000000
2/12/2012	6:35:26 PM	BCl3 MFC set to  0.000000
2/12/2012	6:35:26 PM	PH3 MFC set to  0.000000
2/12/2012	6:35:26 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:35:26 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:35:27 PM	Tube furnace set to 0
2/12/2012	6:35:57 PM	Helium valve closed
2/12/2012	6:35:57 PM	H2 valve closed
2/12/2012	6:35:57 PM	BCl3 valve closed
2/12/2012	6:35:57 PM	PH3 valve closed
2/12/2012	6:35:57 PM	SiCl4 pre valve closed
2/12/2012	6:35:57 PM	SiCl4 post valve closed
2/12/2012	6:35:57 PM	Bypass valve closed
2/12/2012	6:35:57 PM	Bubbler valve closed
2/12/2012	6:35:57 PM	Main Vac valve opened
2/12/2012	6:35:57 PM	Helium MFC set to  0.000000
2/12/2012	6:35:57 PM	H2 MFC set to  0.000000
2/12/2012	6:35:57 PM	BCl3 MFC set to  0.000000
2/12/2012	6:35:57 PM	PH3 MFC set to  0.000000
2/12/2012	6:35:57 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:35:57 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:35:57 PM	Tube furnace set to 0
2/12/2012	6:36:27 PM	H2 valve closed
2/12/2012	6:36:27 PM	BCl3 valve closed
2/12/2012	6:36:27 PM	PH3 valve closed
2/12/2012	6:36:27 PM	SiCl4 pre valve closed
2/12/2012	6:36:27 PM	SiCl4 post valve closed
2/12/2012	6:36:27 PM	Bypass valve closed
2/12/2012	6:36:27 PM	Bubbler valve closed
2/12/2012	6:36:27 PM	Helium valve opened
2/12/2012	6:36:27 PM	Main Vac valve opened
2/12/2012	6:36:27 PM	Helium MFC set to  20.000000
2/12/2012	6:36:27 PM	H2 MFC set to  0.000000
2/12/2012	6:36:27 PM	BCl3 MFC set to  0.000000
2/12/2012	6:36:27 PM	PH3 MFC set to  0.000000
2/12/2012	6:36:27 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:36:27 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:36:27 PM	Tube furnace set to 0
2/12/2012	6:36:57 PM	Helium valve closed
2/12/2012	6:36:57 PM	H2 valve closed
2/12/2012	6:36:57 PM	BCl3 valve closed
2/12/2012	6:36:57 PM	PH3 valve closed
2/12/2012	6:36:57 PM	SiCl4 pre valve closed
2/12/2012	6:36:57 PM	SiCl4 post valve closed
2/12/2012	6:36:57 PM	Bypass valve closed
2/12/2012	6:36:57 PM	Bubbler valve closed
2/12/2012	6:36:57 PM	Main Vac valve opened
2/12/2012	6:36:57 PM	Helium MFC set to  0.000000
2/12/2012	6:36:57 PM	H2 MFC set to  0.000000
2/12/2012	6:36:57 PM	BCl3 MFC set to  0.000000
2/12/2012	6:36:57 PM	PH3 MFC set to  0.000000
2/12/2012	6:36:57 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:36:57 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:36:57 PM	Tube furnace set to 0
2/12/2012	6:37:27 PM	H2 valve closed
2/12/2012	6:37:27 PM	BCl3 valve closed
2/12/2012	6:37:27 PM	PH3 valve closed
2/12/2012	6:37:27 PM	SiCl4 pre valve closed
2/12/2012	6:37:27 PM	SiCl4 post valve closed
2/12/2012	6:37:27 PM	Bypass valve closed
2/12/2012	6:37:27 PM	Bubbler valve closed
2/12/2012	6:37:27 PM	Helium valve opened
2/12/2012	6:37:27 PM	Main Vac valve opened
2/12/2012	6:37:27 PM	Helium MFC set to  20.000000
2/12/2012	6:37:27 PM	H2 MFC set to  0.000000
2/12/2012	6:37:27 PM	BCl3 MFC set to  0.000000
2/12/2012	6:37:27 PM	PH3 MFC set to  0.000000
2/12/2012	6:37:27 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:37:27 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:37:27 PM	Tube furnace set to 0
2/12/2012	6:37:57 PM	Helium valve closed
2/12/2012	6:37:57 PM	H2 valve closed
2/12/2012	6:37:57 PM	BCl3 valve closed
2/12/2012	6:37:57 PM	PH3 valve closed
2/12/2012	6:37:57 PM	SiCl4 pre valve closed
2/12/2012	6:37:57 PM	SiCl4 post valve closed
2/12/2012	6:37:57 PM	Bypass valve closed
2/12/2012	6:37:57 PM	Bubbler valve closed
2/12/2012	6:37:57 PM	Main Vac valve opened
2/12/2012	6:37:57 PM	Helium MFC set to  0.000000
2/12/2012	6:37:57 PM	H2 MFC set to  0.000000
2/12/2012	6:37:57 PM	BCl3 MFC set to  0.000000
2/12/2012	6:37:57 PM	PH3 MFC set to  0.000000
2/12/2012	6:37:57 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:37:57 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:37:58 PM	Tube furnace set to 0
2/12/2012	6:38:28 PM	H2 valve closed
2/12/2012	6:38:28 PM	BCl3 valve closed
2/12/2012	6:38:28 PM	PH3 valve closed
2/12/2012	6:38:28 PM	SiCl4 pre valve closed
2/12/2012	6:38:28 PM	SiCl4 post valve closed
2/12/2012	6:38:28 PM	Bypass valve closed
2/12/2012	6:38:28 PM	Bubbler valve closed
2/12/2012	6:38:28 PM	Helium valve opened
2/12/2012	6:38:28 PM	Main Vac valve opened
2/12/2012	6:38:28 PM	Helium MFC set to  20.000000
2/12/2012	6:38:28 PM	H2 MFC set to  0.000000
2/12/2012	6:38:28 PM	BCl3 MFC set to  0.000000
2/12/2012	6:38:28 PM	PH3 MFC set to  0.000000
2/12/2012	6:38:28 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:38:28 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:38:28 PM	Tube furnace set to 0
2/12/2012	6:38:58 PM	Helium valve closed
2/12/2012	6:38:58 PM	H2 valve closed
2/12/2012	6:38:58 PM	BCl3 valve closed
2/12/2012	6:38:58 PM	PH3 valve closed
2/12/2012	6:38:58 PM	SiCl4 pre valve closed
2/12/2012	6:38:58 PM	SiCl4 post valve closed
2/12/2012	6:38:58 PM	Bypass valve closed
2/12/2012	6:38:58 PM	Bubbler valve closed
2/12/2012	6:38:58 PM	Main Vac valve opened
2/12/2012	6:38:58 PM	Helium MFC set to  0.000000
2/12/2012	6:38:58 PM	H2 MFC set to  0.000000
2/12/2012	6:38:58 PM	BCl3 MFC set to  0.000000
2/12/2012	6:38:58 PM	PH3 MFC set to  0.000000
2/12/2012	6:38:58 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:38:58 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:38:58 PM	Tube furnace set to 0
2/12/2012	6:39:28 PM	H2 valve closed
2/12/2012	6:39:28 PM	BCl3 valve closed
2/12/2012	6:39:28 PM	PH3 valve closed
2/12/2012	6:39:28 PM	SiCl4 pre valve closed
2/12/2012	6:39:28 PM	SiCl4 post valve closed
2/12/2012	6:39:28 PM	Bypass valve closed
2/12/2012	6:39:28 PM	Bubbler valve closed
2/12/2012	6:39:28 PM	Helium valve opened
2/12/2012	6:39:28 PM	Main Vac valve opened
2/12/2012	6:39:28 PM	Helium MFC set to  20.000000
2/12/2012	6:39:28 PM	H2 MFC set to  0.000000
2/12/2012	6:39:28 PM	BCl3 MFC set to  0.000000
2/12/2012	6:39:28 PM	PH3 MFC set to  0.000000
2/12/2012	6:39:28 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:39:28 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:39:28 PM	Tube furnace set to 0
2/12/2012	6:39:58 PM	Helium valve closed
2/12/2012	6:39:58 PM	H2 valve closed
2/12/2012	6:39:58 PM	BCl3 valve closed
2/12/2012	6:39:58 PM	PH3 valve closed
2/12/2012	6:39:58 PM	SiCl4 pre valve closed
2/12/2012	6:39:58 PM	SiCl4 post valve closed
2/12/2012	6:39:58 PM	Bypass valve closed
2/12/2012	6:39:58 PM	Bubbler valve closed
2/12/2012	6:39:58 PM	Main Vac valve opened
2/12/2012	6:39:58 PM	Helium MFC set to  0.000000
2/12/2012	6:39:58 PM	H2 MFC set to  0.000000
2/12/2012	6:39:58 PM	BCl3 MFC set to  0.000000
2/12/2012	6:39:58 PM	PH3 MFC set to  0.000000
2/12/2012	6:39:58 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:39:58 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:39:58 PM	Tube furnace set to 0
2/12/2012	6:40:28 PM	H2 valve closed
2/12/2012	6:40:28 PM	BCl3 valve closed
2/12/2012	6:40:28 PM	PH3 valve closed
2/12/2012	6:40:28 PM	SiCl4 pre valve closed
2/12/2012	6:40:28 PM	SiCl4 post valve closed
2/12/2012	6:40:28 PM	Bypass valve closed
2/12/2012	6:40:28 PM	Bubbler valve closed
2/12/2012	6:40:28 PM	Helium valve opened
2/12/2012	6:40:28 PM	Main Vac valve opened
2/12/2012	6:40:28 PM	Helium MFC set to  20.000000
2/12/2012	6:40:28 PM	H2 MFC set to  0.000000
2/12/2012	6:40:28 PM	BCl3 MFC set to  0.000000
2/12/2012	6:40:28 PM	PH3 MFC set to  0.000000
2/12/2012	6:40:28 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:40:28 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:40:29 PM	Tube furnace set to 0
2/12/2012	6:40:59 PM	Helium valve closed
2/12/2012	6:40:59 PM	H2 valve closed
2/12/2012	6:40:59 PM	BCl3 valve closed
2/12/2012	6:40:59 PM	PH3 valve closed
2/12/2012	6:40:59 PM	SiCl4 pre valve closed
2/12/2012	6:40:59 PM	SiCl4 post valve closed
2/12/2012	6:40:59 PM	Bypass valve closed
2/12/2012	6:40:59 PM	Bubbler valve closed
2/12/2012	6:40:59 PM	Main Vac valve opened
2/12/2012	6:40:59 PM	Helium MFC set to  0.000000
2/12/2012	6:40:59 PM	H2 MFC set to  0.000000
2/12/2012	6:40:59 PM	BCl3 MFC set to  0.000000
2/12/2012	6:40:59 PM	PH3 MFC set to  0.000000
2/12/2012	6:40:59 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:40:59 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:40:59 PM	Tube furnace set to 0
2/12/2012	6:41:29 PM	H2 valve closed
2/12/2012	6:41:29 PM	BCl3 valve closed
2/12/2012	6:41:29 PM	PH3 valve closed
2/12/2012	6:41:29 PM	SiCl4 pre valve closed
2/12/2012	6:41:29 PM	SiCl4 post valve closed
2/12/2012	6:41:29 PM	Bypass valve closed
2/12/2012	6:41:29 PM	Bubbler valve closed
2/12/2012	6:41:29 PM	Helium valve opened
2/12/2012	6:41:29 PM	Main Vac valve opened
2/12/2012	6:41:29 PM	Helium MFC set to  20.000000
2/12/2012	6:41:29 PM	H2 MFC set to  0.000000
2/12/2012	6:41:29 PM	BCl3 MFC set to  0.000000
2/12/2012	6:41:29 PM	PH3 MFC set to  0.000000
2/12/2012	6:41:29 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:41:29 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:41:29 PM	Tube furnace set to 0
2/12/2012	6:41:59 PM	Helium valve closed
2/12/2012	6:41:59 PM	H2 valve closed
2/12/2012	6:41:59 PM	BCl3 valve closed
2/12/2012	6:41:59 PM	PH3 valve closed
2/12/2012	6:41:59 PM	SiCl4 pre valve closed
2/12/2012	6:41:59 PM	SiCl4 post valve closed
2/12/2012	6:41:59 PM	Bypass valve closed
2/12/2012	6:41:59 PM	Bubbler valve closed
2/12/2012	6:41:59 PM	Main Vac valve opened
2/12/2012	6:41:59 PM	Helium MFC set to  0.000000
2/12/2012	6:41:59 PM	H2 MFC set to  0.000000
2/12/2012	6:41:59 PM	BCl3 MFC set to  0.000000
2/12/2012	6:41:59 PM	PH3 MFC set to  0.000000
2/12/2012	6:41:59 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:41:59 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:41:59 PM	Tube furnace set to 200
2/12/2012	6:42:29 PM	H2 valve closed
2/12/2012	6:42:29 PM	BCl3 valve closed
2/12/2012	6:42:29 PM	PH3 valve closed
2/12/2012	6:42:29 PM	SiCl4 pre valve closed
2/12/2012	6:42:29 PM	SiCl4 post valve closed
2/12/2012	6:42:29 PM	Bypass valve closed
2/12/2012	6:42:29 PM	Bubbler valve closed
2/12/2012	6:42:29 PM	Helium valve opened
2/12/2012	6:42:29 PM	Main Vac valve opened
2/12/2012	6:42:29 PM	Helium MFC set to  20.000000
2/12/2012	6:42:29 PM	H2 MFC set to  0.000000
2/12/2012	6:42:29 PM	BCl3 MFC set to  0.000000
2/12/2012	6:42:29 PM	PH3 MFC set to  0.000000
2/12/2012	6:42:29 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:42:29 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:42:29 PM	Tube furnace set to 200
2/12/2012	6:42:59 PM	Helium valve closed
2/12/2012	6:42:59 PM	H2 valve closed
2/12/2012	6:42:59 PM	BCl3 valve closed
2/12/2012	6:42:59 PM	PH3 valve closed
2/12/2012	6:42:59 PM	SiCl4 pre valve closed
2/12/2012	6:42:59 PM	SiCl4 post valve closed
2/12/2012	6:42:59 PM	Bypass valve closed
2/12/2012	6:42:59 PM	Bubbler valve closed
2/12/2012	6:42:59 PM	Main Vac valve opened
2/12/2012	6:42:59 PM	Helium MFC set to  0.000000
2/12/2012	6:42:59 PM	H2 MFC set to  0.000000
2/12/2012	6:42:59 PM	BCl3 MFC set to  0.000000
2/12/2012	6:42:59 PM	PH3 MFC set to  0.000000
2/12/2012	6:42:59 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:42:59 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:43:00 PM	Tube furnace set to 200
2/12/2012	6:43:30 PM	H2 valve closed
2/12/2012	6:43:30 PM	BCl3 valve closed
2/12/2012	6:43:30 PM	PH3 valve closed
2/12/2012	6:43:30 PM	SiCl4 pre valve closed
2/12/2012	6:43:30 PM	SiCl4 post valve closed
2/12/2012	6:43:30 PM	Bypass valve closed
2/12/2012	6:43:30 PM	Bubbler valve closed
2/12/2012	6:43:30 PM	Helium valve opened
2/12/2012	6:43:30 PM	Main Vac valve opened
2/12/2012	6:43:30 PM	Helium MFC set to  20.000000
2/12/2012	6:43:30 PM	H2 MFC set to  0.000000
2/12/2012	6:43:30 PM	BCl3 MFC set to  0.000000
2/12/2012	6:43:30 PM	PH3 MFC set to  0.000000
2/12/2012	6:43:30 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:43:30 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:43:30 PM	Tube furnace set to 200
2/12/2012	6:44:00 PM	Helium valve closed
2/12/2012	6:44:00 PM	H2 valve closed
2/12/2012	6:44:00 PM	BCl3 valve closed
2/12/2012	6:44:00 PM	PH3 valve closed
2/12/2012	6:44:00 PM	SiCl4 pre valve closed
2/12/2012	6:44:00 PM	SiCl4 post valve closed
2/12/2012	6:44:00 PM	Bypass valve closed
2/12/2012	6:44:00 PM	Bubbler valve closed
2/12/2012	6:44:00 PM	Main Vac valve opened
2/12/2012	6:44:00 PM	Helium MFC set to  0.000000
2/12/2012	6:44:00 PM	H2 MFC set to  0.000000
2/12/2012	6:44:00 PM	BCl3 MFC set to  0.000000
2/12/2012	6:44:00 PM	PH3 MFC set to  0.000000
2/12/2012	6:44:00 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:44:00 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:44:00 PM	Tube furnace set to 200
2/12/2012	6:44:30 PM	H2 valve closed
2/12/2012	6:44:30 PM	BCl3 valve closed
2/12/2012	6:44:30 PM	PH3 valve closed
2/12/2012	6:44:30 PM	SiCl4 pre valve closed
2/12/2012	6:44:30 PM	SiCl4 post valve closed
2/12/2012	6:44:30 PM	Bypass valve closed
2/12/2012	6:44:30 PM	Bubbler valve closed
2/12/2012	6:44:30 PM	Helium valve opened
2/12/2012	6:44:30 PM	Main Vac valve opened
2/12/2012	6:44:30 PM	Helium MFC set to  20.000000
2/12/2012	6:44:30 PM	H2 MFC set to  0.000000
2/12/2012	6:44:30 PM	BCl3 MFC set to  0.000000
2/12/2012	6:44:30 PM	PH3 MFC set to  0.000000
2/12/2012	6:44:30 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:44:30 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:44:30 PM	Tube furnace set to 200
2/12/2012	6:45:00 PM	Helium valve closed
2/12/2012	6:45:00 PM	H2 valve closed
2/12/2012	6:45:00 PM	BCl3 valve closed
2/12/2012	6:45:00 PM	PH3 valve closed
2/12/2012	6:45:00 PM	SiCl4 pre valve closed
2/12/2012	6:45:00 PM	SiCl4 post valve closed
2/12/2012	6:45:00 PM	Bypass valve closed
2/12/2012	6:45:00 PM	Bubbler valve closed
2/12/2012	6:45:00 PM	Main Vac valve opened
2/12/2012	6:45:00 PM	Helium MFC set to  0.000000
2/12/2012	6:45:00 PM	H2 MFC set to  0.000000
2/12/2012	6:45:00 PM	BCl3 MFC set to  0.000000
2/12/2012	6:45:00 PM	PH3 MFC set to  0.000000
2/12/2012	6:45:00 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:45:00 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:45:00 PM	Tube furnace set to 200
2/12/2012	6:45:31 PM	H2 valve closed
2/12/2012	6:45:31 PM	BCl3 valve closed
2/12/2012	6:45:31 PM	PH3 valve closed
2/12/2012	6:45:31 PM	SiCl4 pre valve closed
2/12/2012	6:45:31 PM	SiCl4 post valve closed
2/12/2012	6:45:31 PM	Bypass valve closed
2/12/2012	6:45:31 PM	Bubbler valve closed
2/12/2012	6:45:31 PM	Helium valve opened
2/12/2012	6:45:31 PM	Main Vac valve opened
2/12/2012	6:45:31 PM	Helium MFC set to  20.000000
2/12/2012	6:45:31 PM	H2 MFC set to  0.000000
2/12/2012	6:45:31 PM	BCl3 MFC set to  0.000000
2/12/2012	6:45:31 PM	PH3 MFC set to  0.000000
2/12/2012	6:45:31 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:45:31 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:45:31 PM	Tube furnace set to 200
2/12/2012	6:46:01 PM	Helium valve closed
2/12/2012	6:46:01 PM	H2 valve closed
2/12/2012	6:46:01 PM	BCl3 valve closed
2/12/2012	6:46:01 PM	PH3 valve closed
2/12/2012	6:46:01 PM	SiCl4 pre valve closed
2/12/2012	6:46:01 PM	SiCl4 post valve closed
2/12/2012	6:46:01 PM	Bypass valve closed
2/12/2012	6:46:01 PM	Bubbler valve closed
2/12/2012	6:46:01 PM	Main Vac valve opened
2/12/2012	6:46:01 PM	Helium MFC set to  0.000000
2/12/2012	6:46:01 PM	H2 MFC set to  0.000000
2/12/2012	6:46:01 PM	BCl3 MFC set to  0.000000
2/12/2012	6:46:01 PM	PH3 MFC set to  0.000000
2/12/2012	6:46:01 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:46:01 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:46:01 PM	Tube furnace set to 200
2/12/2012	6:46:31 PM	H2 valve closed
2/12/2012	6:46:31 PM	BCl3 valve closed
2/12/2012	6:46:31 PM	PH3 valve closed
2/12/2012	6:46:31 PM	SiCl4 pre valve closed
2/12/2012	6:46:31 PM	SiCl4 post valve closed
2/12/2012	6:46:31 PM	Bypass valve closed
2/12/2012	6:46:31 PM	Bubbler valve closed
2/12/2012	6:46:31 PM	Helium valve opened
2/12/2012	6:46:31 PM	Main Vac valve opened
2/12/2012	6:46:31 PM	Helium MFC set to  20.000000
2/12/2012	6:46:31 PM	H2 MFC set to  0.000000
2/12/2012	6:46:31 PM	BCl3 MFC set to  0.000000
2/12/2012	6:46:31 PM	PH3 MFC set to  0.000000
2/12/2012	6:46:31 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:46:31 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:46:31 PM	Tube furnace set to 200
2/12/2012	6:47:01 PM	Helium valve closed
2/12/2012	6:47:01 PM	H2 valve closed
2/12/2012	6:47:01 PM	BCl3 valve closed
2/12/2012	6:47:01 PM	PH3 valve closed
2/12/2012	6:47:01 PM	SiCl4 pre valve closed
2/12/2012	6:47:01 PM	SiCl4 post valve closed
2/12/2012	6:47:01 PM	Bypass valve closed
2/12/2012	6:47:01 PM	Bubbler valve closed
2/12/2012	6:47:01 PM	Main Vac valve opened
2/12/2012	6:47:01 PM	Helium MFC set to  0.000000
2/12/2012	6:47:01 PM	H2 MFC set to  0.000000
2/12/2012	6:47:01 PM	BCl3 MFC set to  0.000000
2/12/2012	6:47:01 PM	PH3 MFC set to  0.000000
2/12/2012	6:47:01 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:47:01 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:47:01 PM	Tube furnace set to 200
2/12/2012	6:47:31 PM	H2 valve closed
2/12/2012	6:47:31 PM	BCl3 valve closed
2/12/2012	6:47:31 PM	PH3 valve closed
2/12/2012	6:47:31 PM	SiCl4 pre valve closed
2/12/2012	6:47:31 PM	SiCl4 post valve closed
2/12/2012	6:47:31 PM	Bypass valve closed
2/12/2012	6:47:31 PM	Bubbler valve closed
2/12/2012	6:47:31 PM	Helium valve opened
2/12/2012	6:47:31 PM	Main Vac valve opened
2/12/2012	6:47:31 PM	Helium MFC set to  20.000000
2/12/2012	6:47:31 PM	H2 MFC set to  0.000000
2/12/2012	6:47:31 PM	BCl3 MFC set to  0.000000
2/12/2012	6:47:31 PM	PH3 MFC set to  0.000000
2/12/2012	6:47:31 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:47:31 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:47:32 PM	Tube furnace set to 200
2/12/2012	6:48:02 PM	Helium valve closed
2/12/2012	6:48:02 PM	H2 valve closed
2/12/2012	6:48:02 PM	BCl3 valve closed
2/12/2012	6:48:02 PM	PH3 valve closed
2/12/2012	6:48:02 PM	SiCl4 pre valve closed
2/12/2012	6:48:02 PM	SiCl4 post valve closed
2/12/2012	6:48:02 PM	Bypass valve closed
2/12/2012	6:48:02 PM	Bubbler valve closed
2/12/2012	6:48:02 PM	Main Vac valve opened
2/12/2012	6:48:02 PM	Helium MFC set to  0.000000
2/12/2012	6:48:02 PM	H2 MFC set to  0.000000
2/12/2012	6:48:02 PM	BCl3 MFC set to  0.000000
2/12/2012	6:48:02 PM	PH3 MFC set to  0.000000
2/12/2012	6:48:02 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:48:02 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:48:02 PM	Tube furnace set to 0
2/12/2012	6:48:03 PM	Run finished at 6:48 PM
2/12/2012	6:52:39 PM	Recipe started at 6:52 PM
2/12/2012	6:52:39 PM	Helium valve closed
2/12/2012	6:52:39 PM	H2 valve closed
2/12/2012	6:52:39 PM	BCl3 valve closed
2/12/2012	6:52:39 PM	PH3 valve closed
2/12/2012	6:52:39 PM	SiCl4 pre valve closed
2/12/2012	6:52:39 PM	SiCl4 post valve closed
2/12/2012	6:52:39 PM	Bypass valve closed
2/12/2012	6:52:39 PM	Bubbler valve closed
2/12/2012	6:52:39 PM	Main Vac valve opened
2/12/2012	6:52:39 PM	Helium MFC set to  0.000000
2/12/2012	6:52:39 PM	H2 MFC set to  0.000000
2/12/2012	6:52:39 PM	BCl3 MFC set to  0.000000
2/12/2012	6:52:39 PM	PH3 MFC set to  0.000000
2/12/2012	6:52:39 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:52:39 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:52:40 PM	Tube furnace set to 0
2/12/2012	6:52:41 PM	H2 valve closed
2/12/2012	6:52:41 PM	BCl3 valve closed
2/12/2012	6:52:41 PM	PH3 valve closed
2/12/2012	6:52:41 PM	SiCl4 pre valve closed
2/12/2012	6:52:41 PM	SiCl4 post valve closed
2/12/2012	6:52:41 PM	Bypass valve closed
2/12/2012	6:52:41 PM	Bubbler valve closed
2/12/2012	6:52:41 PM	Helium valve opened
2/12/2012	6:52:41 PM	Main Vac valve opened
2/12/2012	6:52:41 PM	Helium MFC set to  20.000000
2/12/2012	6:52:41 PM	H2 MFC set to  0.000000
2/12/2012	6:52:41 PM	BCl3 MFC set to  0.000000
2/12/2012	6:52:41 PM	PH3 MFC set to  0.000000
2/12/2012	6:52:41 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:52:41 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:52:41 PM	Tube furnace set to 0
2/12/2012	6:52:42 PM	Helium valve closed
2/12/2012	6:52:42 PM	H2 valve closed
2/12/2012	6:52:42 PM	BCl3 valve closed
2/12/2012	6:52:42 PM	PH3 valve closed
2/12/2012	6:52:42 PM	SiCl4 pre valve closed
2/12/2012	6:52:42 PM	SiCl4 post valve closed
2/12/2012	6:52:42 PM	Bypass valve closed
2/12/2012	6:52:42 PM	Bubbler valve closed
2/12/2012	6:52:42 PM	Main Vac valve opened
2/12/2012	6:52:42 PM	Helium MFC set to  0.000000
2/12/2012	6:52:42 PM	H2 MFC set to  0.000000
2/12/2012	6:52:42 PM	BCl3 MFC set to  0.000000
2/12/2012	6:52:42 PM	PH3 MFC set to  0.000000
2/12/2012	6:52:42 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:52:42 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:52:42 PM	Tube furnace set to 0
2/12/2012	6:52:43 PM	H2 valve closed
2/12/2012	6:52:43 PM	BCl3 valve closed
2/12/2012	6:52:43 PM	PH3 valve closed
2/12/2012	6:52:43 PM	SiCl4 pre valve closed
2/12/2012	6:52:43 PM	SiCl4 post valve closed
2/12/2012	6:52:43 PM	Bypass valve closed
2/12/2012	6:52:43 PM	Bubbler valve closed
2/12/2012	6:52:43 PM	Helium valve opened
2/12/2012	6:52:43 PM	Main Vac valve opened
2/12/2012	6:52:43 PM	Helium MFC set to  20.000000
2/12/2012	6:52:43 PM	H2 MFC set to  0.000000
2/12/2012	6:52:43 PM	BCl3 MFC set to  0.000000
2/12/2012	6:52:43 PM	PH3 MFC set to  0.000000
2/12/2012	6:52:43 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:52:43 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:52:43 PM	Tube furnace set to 0
2/12/2012	6:52:43 PM	Helium valve closed
2/12/2012	6:52:43 PM	H2 valve closed
2/12/2012	6:52:43 PM	BCl3 valve closed
2/12/2012	6:52:43 PM	PH3 valve closed
2/12/2012	6:52:43 PM	SiCl4 pre valve closed
2/12/2012	6:52:43 PM	SiCl4 post valve closed
2/12/2012	6:52:43 PM	Bypass valve closed
2/12/2012	6:52:43 PM	Bubbler valve closed
2/12/2012	6:52:43 PM	Main Vac valve opened
2/12/2012	6:52:43 PM	Helium MFC set to  0.000000
2/12/2012	6:52:43 PM	H2 MFC set to  0.000000
2/12/2012	6:52:43 PM	BCl3 MFC set to  0.000000
2/12/2012	6:52:43 PM	PH3 MFC set to  0.000000
2/12/2012	6:52:43 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:52:43 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:52:43 PM	Tube furnace set to 0
2/12/2012	6:52:44 PM	H2 valve closed
2/12/2012	6:52:44 PM	BCl3 valve closed
2/12/2012	6:52:44 PM	PH3 valve closed
2/12/2012	6:52:44 PM	SiCl4 pre valve closed
2/12/2012	6:52:44 PM	SiCl4 post valve closed
2/12/2012	6:52:44 PM	Bypass valve closed
2/12/2012	6:52:44 PM	Bubbler valve closed
2/12/2012	6:52:44 PM	Helium valve opened
2/12/2012	6:52:44 PM	Main Vac valve opened
2/12/2012	6:52:44 PM	Helium MFC set to  20.000000
2/12/2012	6:52:44 PM	H2 MFC set to  0.000000
2/12/2012	6:52:44 PM	BCl3 MFC set to  0.000000
2/12/2012	6:52:44 PM	PH3 MFC set to  0.000000
2/12/2012	6:52:44 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:52:44 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:52:44 PM	Tube furnace set to 0
2/12/2012	6:52:44 PM	Helium valve closed
2/12/2012	6:52:44 PM	H2 valve closed
2/12/2012	6:52:44 PM	BCl3 valve closed
2/12/2012	6:52:44 PM	PH3 valve closed
2/12/2012	6:52:44 PM	SiCl4 pre valve closed
2/12/2012	6:52:44 PM	SiCl4 post valve closed
2/12/2012	6:52:44 PM	Bypass valve closed
2/12/2012	6:52:44 PM	Bubbler valve closed
2/12/2012	6:52:44 PM	Main Vac valve opened
2/12/2012	6:52:44 PM	Helium MFC set to  0.000000
2/12/2012	6:52:44 PM	H2 MFC set to  0.000000
2/12/2012	6:52:44 PM	BCl3 MFC set to  0.000000
2/12/2012	6:52:44 PM	PH3 MFC set to  0.000000
2/12/2012	6:52:44 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:52:44 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:52:45 PM	Tube furnace set to 0
2/12/2012	6:52:45 PM	H2 valve closed
2/12/2012	6:52:45 PM	BCl3 valve closed
2/12/2012	6:52:45 PM	PH3 valve closed
2/12/2012	6:52:45 PM	SiCl4 pre valve closed
2/12/2012	6:52:45 PM	SiCl4 post valve closed
2/12/2012	6:52:45 PM	Bypass valve closed
2/12/2012	6:52:45 PM	Bubbler valve closed
2/12/2012	6:52:45 PM	Helium valve opened
2/12/2012	6:52:45 PM	Main Vac valve opened
2/12/2012	6:52:45 PM	Helium MFC set to  20.000000
2/12/2012	6:52:45 PM	H2 MFC set to  0.000000
2/12/2012	6:52:45 PM	BCl3 MFC set to  0.000000
2/12/2012	6:52:45 PM	PH3 MFC set to  0.000000
2/12/2012	6:52:45 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:52:45 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:52:45 PM	Tube furnace set to 0
2/12/2012	6:52:45 PM	Helium valve closed
2/12/2012	6:52:45 PM	H2 valve closed
2/12/2012	6:52:46 PM	BCl3 valve closed
2/12/2012	6:52:46 PM	PH3 valve closed
2/12/2012	6:52:46 PM	SiCl4 pre valve closed
2/12/2012	6:52:46 PM	SiCl4 post valve closed
2/12/2012	6:52:46 PM	Bypass valve closed
2/12/2012	6:52:46 PM	Bubbler valve closed
2/12/2012	6:52:46 PM	Main Vac valve opened
2/12/2012	6:52:46 PM	Helium MFC set to  0.000000
2/12/2012	6:52:46 PM	H2 MFC set to  0.000000
2/12/2012	6:52:46 PM	BCl3 MFC set to  0.000000
2/12/2012	6:52:46 PM	PH3 MFC set to  0.000000
2/12/2012	6:52:46 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:52:46 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:52:46 PM	Tube furnace set to 0
2/12/2012	6:52:46 PM	H2 valve closed
2/12/2012	6:52:46 PM	BCl3 valve closed
2/12/2012	6:52:46 PM	PH3 valve closed
2/12/2012	6:52:46 PM	SiCl4 pre valve closed
2/12/2012	6:52:46 PM	SiCl4 post valve closed
2/12/2012	6:52:46 PM	Bypass valve closed
2/12/2012	6:52:46 PM	Bubbler valve closed
2/12/2012	6:52:46 PM	Helium valve opened
2/12/2012	6:52:46 PM	Main Vac valve opened
2/12/2012	6:52:46 PM	Helium MFC set to  20.000000
2/12/2012	6:52:46 PM	H2 MFC set to  0.000000
2/12/2012	6:52:46 PM	BCl3 MFC set to  0.000000
2/12/2012	6:52:46 PM	PH3 MFC set to  0.000000
2/12/2012	6:52:46 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:52:46 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:52:46 PM	Tube furnace set to 0
2/12/2012	6:52:47 PM	Helium valve closed
2/12/2012	6:52:47 PM	H2 valve closed
2/12/2012	6:52:47 PM	BCl3 valve closed
2/12/2012	6:52:47 PM	PH3 valve closed
2/12/2012	6:52:47 PM	SiCl4 pre valve closed
2/12/2012	6:52:47 PM	SiCl4 post valve closed
2/12/2012	6:52:47 PM	Bypass valve closed
2/12/2012	6:52:47 PM	Bubbler valve closed
2/12/2012	6:52:47 PM	Main Vac valve opened
2/12/2012	6:52:47 PM	Helium MFC set to  0.000000
2/12/2012	6:52:47 PM	H2 MFC set to  0.000000
2/12/2012	6:52:47 PM	BCl3 MFC set to  0.000000
2/12/2012	6:52:47 PM	PH3 MFC set to  0.000000
2/12/2012	6:52:47 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:52:47 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:52:47 PM	Tube furnace set to 0
2/12/2012	6:52:47 PM	H2 valve closed
2/12/2012	6:52:47 PM	BCl3 valve closed
2/12/2012	6:52:47 PM	PH3 valve closed
2/12/2012	6:52:47 PM	SiCl4 pre valve closed
2/12/2012	6:52:47 PM	SiCl4 post valve closed
2/12/2012	6:52:47 PM	Bypass valve closed
2/12/2012	6:52:47 PM	Bubbler valve closed
2/12/2012	6:52:47 PM	Helium valve opened
2/12/2012	6:52:47 PM	Main Vac valve opened
2/12/2012	6:52:47 PM	Helium MFC set to  20.000000
2/12/2012	6:52:47 PM	H2 MFC set to  0.000000
2/12/2012	6:52:47 PM	BCl3 MFC set to  0.000000
2/12/2012	6:52:47 PM	PH3 MFC set to  0.000000
2/12/2012	6:52:47 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:52:47 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:52:48 PM	Tube furnace set to 0
2/12/2012	6:52:48 PM	Helium valve closed
2/12/2012	6:52:48 PM	H2 valve closed
2/12/2012	6:52:48 PM	BCl3 valve closed
2/12/2012	6:52:48 PM	PH3 valve closed
2/12/2012	6:52:48 PM	SiCl4 pre valve closed
2/12/2012	6:52:48 PM	SiCl4 post valve closed
2/12/2012	6:52:48 PM	Bypass valve closed
2/12/2012	6:52:48 PM	Bubbler valve closed
2/12/2012	6:52:48 PM	Main Vac valve opened
2/12/2012	6:52:48 PM	Helium MFC set to  0.000000
2/12/2012	6:52:48 PM	H2 MFC set to  0.000000
2/12/2012	6:52:48 PM	BCl3 MFC set to  0.000000
2/12/2012	6:52:48 PM	PH3 MFC set to  0.000000
2/12/2012	6:52:48 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:52:48 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:52:48 PM	Tube furnace set to 0
2/12/2012	6:52:48 PM	H2 valve closed
2/12/2012	6:52:48 PM	BCl3 valve closed
2/12/2012	6:52:48 PM	PH3 valve closed
2/12/2012	6:52:48 PM	SiCl4 pre valve closed
2/12/2012	6:52:48 PM	SiCl4 post valve closed
2/12/2012	6:52:48 PM	Bypass valve closed
2/12/2012	6:52:48 PM	Bubbler valve closed
2/12/2012	6:52:48 PM	Helium valve opened
2/12/2012	6:52:48 PM	Main Vac valve opened
2/12/2012	6:52:48 PM	Helium MFC set to  20.000000
2/12/2012	6:52:48 PM	H2 MFC set to  0.000000
2/12/2012	6:52:48 PM	BCl3 MFC set to  0.000000
2/12/2012	6:52:48 PM	PH3 MFC set to  0.000000
2/12/2012	6:52:48 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:52:48 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:52:48 PM	Tube furnace set to 0
2/12/2012	6:52:49 PM	Helium valve closed
2/12/2012	6:52:49 PM	H2 valve closed
2/12/2012	6:52:49 PM	BCl3 valve closed
2/12/2012	6:52:49 PM	PH3 valve closed
2/12/2012	6:52:49 PM	SiCl4 pre valve closed
2/12/2012	6:52:49 PM	SiCl4 post valve closed
2/12/2012	6:52:49 PM	Bypass valve closed
2/12/2012	6:52:49 PM	Bubbler valve closed
2/12/2012	6:52:49 PM	Main Vac valve opened
2/12/2012	6:52:49 PM	Helium MFC set to  0.000000
2/12/2012	6:52:49 PM	H2 MFC set to  0.000000
2/12/2012	6:52:49 PM	BCl3 MFC set to  0.000000
2/12/2012	6:52:49 PM	PH3 MFC set to  0.000000
2/12/2012	6:52:49 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:52:49 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:52:49 PM	Tube furnace set to 0
2/12/2012	6:53:19 PM	H2 valve closed
2/12/2012	6:53:19 PM	BCl3 valve closed
2/12/2012	6:53:19 PM	PH3 valve closed
2/12/2012	6:53:19 PM	SiCl4 pre valve closed
2/12/2012	6:53:19 PM	SiCl4 post valve closed
2/12/2012	6:53:19 PM	Bypass valve closed
2/12/2012	6:53:19 PM	Bubbler valve closed
2/12/2012	6:53:19 PM	Helium valve opened
2/12/2012	6:53:19 PM	Main Vac valve opened
2/12/2012	6:53:19 PM	Helium MFC set to  20.000000
2/12/2012	6:53:19 PM	H2 MFC set to  0.000000
2/12/2012	6:53:19 PM	BCl3 MFC set to  0.000000
2/12/2012	6:53:19 PM	PH3 MFC set to  0.000000
2/12/2012	6:53:19 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:53:19 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:53:19 PM	Tube furnace set to 0
2/12/2012	6:53:49 PM	Helium valve closed
2/12/2012	6:53:49 PM	H2 valve closed
2/12/2012	6:53:49 PM	BCl3 valve closed
2/12/2012	6:53:49 PM	PH3 valve closed
2/12/2012	6:53:49 PM	SiCl4 pre valve closed
2/12/2012	6:53:49 PM	SiCl4 post valve closed
2/12/2012	6:53:49 PM	Bypass valve closed
2/12/2012	6:53:49 PM	Bubbler valve closed
2/12/2012	6:53:49 PM	Main Vac valve opened
2/12/2012	6:53:49 PM	Helium MFC set to  0.000000
2/12/2012	6:53:49 PM	H2 MFC set to  0.000000
2/12/2012	6:53:49 PM	BCl3 MFC set to  0.000000
2/12/2012	6:53:49 PM	PH3 MFC set to  0.000000
2/12/2012	6:53:49 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:53:49 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:53:50 PM	Tube furnace set to 0
2/12/2012	6:54:20 PM	H2 valve closed
2/12/2012	6:54:20 PM	BCl3 valve closed
2/12/2012	6:54:20 PM	PH3 valve closed
2/12/2012	6:54:20 PM	SiCl4 pre valve closed
2/12/2012	6:54:20 PM	SiCl4 post valve closed
2/12/2012	6:54:20 PM	Bypass valve closed
2/12/2012	6:54:20 PM	Bubbler valve closed
2/12/2012	6:54:20 PM	Helium valve opened
2/12/2012	6:54:20 PM	Main Vac valve opened
2/12/2012	6:54:20 PM	Helium MFC set to  20.000000
2/12/2012	6:54:20 PM	H2 MFC set to  0.000000
2/12/2012	6:54:20 PM	BCl3 MFC set to  0.000000
2/12/2012	6:54:20 PM	PH3 MFC set to  0.000000
2/12/2012	6:54:20 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:54:20 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:54:20 PM	Tube furnace set to 0
2/12/2012	6:54:50 PM	Helium valve closed
2/12/2012	6:54:50 PM	H2 valve closed
2/12/2012	6:54:50 PM	BCl3 valve closed
2/12/2012	6:54:50 PM	PH3 valve closed
2/12/2012	6:54:50 PM	SiCl4 pre valve closed
2/12/2012	6:54:50 PM	SiCl4 post valve closed
2/12/2012	6:54:50 PM	Bypass valve closed
2/12/2012	6:54:50 PM	Bubbler valve closed
2/12/2012	6:54:50 PM	Main Vac valve opened
2/12/2012	6:54:50 PM	Helium MFC set to  0.000000
2/12/2012	6:54:50 PM	H2 MFC set to  0.000000
2/12/2012	6:54:50 PM	BCl3 MFC set to  0.000000
2/12/2012	6:54:50 PM	PH3 MFC set to  0.000000
2/12/2012	6:54:50 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:54:50 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:54:50 PM	Tube furnace set to 200
2/12/2012	6:55:20 PM	H2 valve closed
2/12/2012	6:55:20 PM	BCl3 valve closed
2/12/2012	6:55:20 PM	PH3 valve closed
2/12/2012	6:55:20 PM	SiCl4 pre valve closed
2/12/2012	6:55:20 PM	SiCl4 post valve closed
2/12/2012	6:55:20 PM	Bypass valve closed
2/12/2012	6:55:20 PM	Bubbler valve closed
2/12/2012	6:55:20 PM	Helium valve opened
2/12/2012	6:55:20 PM	Main Vac valve opened
2/12/2012	6:55:20 PM	Helium MFC set to  20.000000
2/12/2012	6:55:20 PM	H2 MFC set to  0.000000
2/12/2012	6:55:20 PM	BCl3 MFC set to  0.000000
2/12/2012	6:55:20 PM	PH3 MFC set to  0.000000
2/12/2012	6:55:20 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:55:20 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:55:20 PM	Tube furnace set to 200
2/12/2012	6:55:50 PM	Helium valve closed
2/12/2012	6:55:50 PM	H2 valve closed
2/12/2012	6:55:50 PM	BCl3 valve closed
2/12/2012	6:55:50 PM	PH3 valve closed
2/12/2012	6:55:50 PM	SiCl4 pre valve closed
2/12/2012	6:55:50 PM	SiCl4 post valve closed
2/12/2012	6:55:50 PM	Bypass valve closed
2/12/2012	6:55:50 PM	Bubbler valve closed
2/12/2012	6:55:50 PM	Main Vac valve opened
2/12/2012	6:55:50 PM	Helium MFC set to  0.000000
2/12/2012	6:55:50 PM	H2 MFC set to  0.000000
2/12/2012	6:55:50 PM	BCl3 MFC set to  0.000000
2/12/2012	6:55:50 PM	PH3 MFC set to  0.000000
2/12/2012	6:55:50 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:55:50 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:55:50 PM	Tube furnace set to 200
2/12/2012	6:56:20 PM	H2 valve closed
2/12/2012	6:56:20 PM	BCl3 valve closed
2/12/2012	6:56:20 PM	PH3 valve closed
2/12/2012	6:56:20 PM	SiCl4 pre valve closed
2/12/2012	6:56:20 PM	SiCl4 post valve closed
2/12/2012	6:56:20 PM	Bypass valve closed
2/12/2012	6:56:20 PM	Bubbler valve closed
2/12/2012	6:56:20 PM	Helium valve opened
2/12/2012	6:56:20 PM	Main Vac valve opened
2/12/2012	6:56:20 PM	Helium MFC set to  20.000000
2/12/2012	6:56:20 PM	H2 MFC set to  0.000000
2/12/2012	6:56:20 PM	BCl3 MFC set to  0.000000
2/12/2012	6:56:20 PM	PH3 MFC set to  0.000000
2/12/2012	6:56:20 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:56:20 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:56:21 PM	Tube furnace set to 200
2/12/2012	6:56:51 PM	Helium valve closed
2/12/2012	6:56:51 PM	H2 valve closed
2/12/2012	6:56:51 PM	BCl3 valve closed
2/12/2012	6:56:51 PM	PH3 valve closed
2/12/2012	6:56:51 PM	SiCl4 pre valve closed
2/12/2012	6:56:51 PM	SiCl4 post valve closed
2/12/2012	6:56:51 PM	Bypass valve closed
2/12/2012	6:56:51 PM	Bubbler valve closed
2/12/2012	6:56:51 PM	Main Vac valve opened
2/12/2012	6:56:51 PM	Helium MFC set to  0.000000
2/12/2012	6:56:51 PM	H2 MFC set to  0.000000
2/12/2012	6:56:51 PM	BCl3 MFC set to  0.000000
2/12/2012	6:56:51 PM	PH3 MFC set to  0.000000
2/12/2012	6:56:51 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:56:51 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:56:51 PM	Tube furnace set to 200
2/12/2012	6:57:21 PM	H2 valve closed
2/12/2012	6:57:21 PM	BCl3 valve closed
2/12/2012	6:57:21 PM	PH3 valve closed
2/12/2012	6:57:21 PM	SiCl4 pre valve closed
2/12/2012	6:57:21 PM	SiCl4 post valve closed
2/12/2012	6:57:21 PM	Bypass valve closed
2/12/2012	6:57:21 PM	Bubbler valve closed
2/12/2012	6:57:21 PM	Helium valve opened
2/12/2012	6:57:21 PM	Main Vac valve opened
2/12/2012	6:57:21 PM	Helium MFC set to  20.000000
2/12/2012	6:57:21 PM	H2 MFC set to  0.000000
2/12/2012	6:57:21 PM	BCl3 MFC set to  0.000000
2/12/2012	6:57:21 PM	PH3 MFC set to  0.000000
2/12/2012	6:57:21 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:57:21 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:57:21 PM	Tube furnace set to 200
2/12/2012	6:57:51 PM	Helium valve closed
2/12/2012	6:57:51 PM	H2 valve closed
2/12/2012	6:57:51 PM	BCl3 valve closed
2/12/2012	6:57:51 PM	PH3 valve closed
2/12/2012	6:57:51 PM	SiCl4 pre valve closed
2/12/2012	6:57:51 PM	SiCl4 post valve closed
2/12/2012	6:57:51 PM	Bypass valve closed
2/12/2012	6:57:51 PM	Bubbler valve closed
2/12/2012	6:57:51 PM	Main Vac valve opened
2/12/2012	6:57:51 PM	Helium MFC set to  0.000000
2/12/2012	6:57:51 PM	H2 MFC set to  0.000000
2/12/2012	6:57:51 PM	BCl3 MFC set to  0.000000
2/12/2012	6:57:51 PM	PH3 MFC set to  0.000000
2/12/2012	6:57:51 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:57:51 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:57:51 PM	Tube furnace set to 200
2/12/2012	6:58:21 PM	H2 valve closed
2/12/2012	6:58:21 PM	BCl3 valve closed
2/12/2012	6:58:21 PM	PH3 valve closed
2/12/2012	6:58:21 PM	SiCl4 pre valve closed
2/12/2012	6:58:21 PM	SiCl4 post valve closed
2/12/2012	6:58:21 PM	Bypass valve closed
2/12/2012	6:58:21 PM	Bubbler valve closed
2/12/2012	6:58:21 PM	Helium valve opened
2/12/2012	6:58:21 PM	Main Vac valve opened
2/12/2012	6:58:21 PM	Helium MFC set to  20.000000
2/12/2012	6:58:21 PM	H2 MFC set to  0.000000
2/12/2012	6:58:21 PM	BCl3 MFC set to  0.000000
2/12/2012	6:58:21 PM	PH3 MFC set to  0.000000
2/12/2012	6:58:21 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:58:21 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:58:21 PM	Tube furnace set to 200
2/12/2012	6:58:51 PM	Helium valve closed
2/12/2012	6:58:51 PM	H2 valve closed
2/12/2012	6:58:51 PM	BCl3 valve closed
2/12/2012	6:58:51 PM	PH3 valve closed
2/12/2012	6:58:51 PM	SiCl4 pre valve closed
2/12/2012	6:58:51 PM	SiCl4 post valve closed
2/12/2012	6:58:51 PM	Bypass valve closed
2/12/2012	6:58:51 PM	Bubbler valve closed
2/12/2012	6:58:51 PM	Main Vac valve opened
2/12/2012	6:58:51 PM	Helium MFC set to  0.000000
2/12/2012	6:58:51 PM	H2 MFC set to  0.000000
2/12/2012	6:58:51 PM	BCl3 MFC set to  0.000000
2/12/2012	6:58:51 PM	PH3 MFC set to  0.000000
2/12/2012	6:58:51 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:58:52 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:58:52 PM	Tube furnace set to 200
2/12/2012	6:59:22 PM	H2 valve closed
2/12/2012	6:59:22 PM	BCl3 valve closed
2/12/2012	6:59:22 PM	PH3 valve closed
2/12/2012	6:59:22 PM	SiCl4 pre valve closed
2/12/2012	6:59:22 PM	SiCl4 post valve closed
2/12/2012	6:59:22 PM	Bypass valve closed
2/12/2012	6:59:22 PM	Bubbler valve closed
2/12/2012	6:59:22 PM	Helium valve opened
2/12/2012	6:59:22 PM	Main Vac valve opened
2/12/2012	6:59:22 PM	Helium MFC set to  20.000000
2/12/2012	6:59:22 PM	H2 MFC set to  0.000000
2/12/2012	6:59:22 PM	BCl3 MFC set to  0.000000
2/12/2012	6:59:22 PM	PH3 MFC set to  0.000000
2/12/2012	6:59:22 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:59:22 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:59:22 PM	Tube furnace set to 200
2/12/2012	6:59:52 PM	Helium valve closed
2/12/2012	6:59:52 PM	H2 valve closed
2/12/2012	6:59:52 PM	BCl3 valve closed
2/12/2012	6:59:52 PM	PH3 valve closed
2/12/2012	6:59:52 PM	SiCl4 pre valve closed
2/12/2012	6:59:52 PM	SiCl4 post valve closed
2/12/2012	6:59:52 PM	Bypass valve closed
2/12/2012	6:59:52 PM	Bubbler valve closed
2/12/2012	6:59:52 PM	Main Vac valve opened
2/12/2012	6:59:52 PM	Helium MFC set to  0.000000
2/12/2012	6:59:52 PM	H2 MFC set to  0.000000
2/12/2012	6:59:52 PM	BCl3 MFC set to  0.000000
2/12/2012	6:59:52 PM	PH3 MFC set to  0.000000
2/12/2012	6:59:52 PM	SiCl4 MFC set to  0.000000
2/12/2012	6:59:52 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	6:59:52 PM	Tube furnace set to 200
2/12/2012	7:00:22 PM	H2 valve closed
2/12/2012	7:00:22 PM	BCl3 valve closed
2/12/2012	7:00:22 PM	PH3 valve closed
2/12/2012	7:00:22 PM	SiCl4 pre valve closed
2/12/2012	7:00:22 PM	SiCl4 post valve closed
2/12/2012	7:00:22 PM	Bypass valve closed
2/12/2012	7:00:22 PM	Bubbler valve closed
2/12/2012	7:00:22 PM	Helium valve opened
2/12/2012	7:00:22 PM	Main Vac valve opened
2/12/2012	7:00:22 PM	Helium MFC set to  20.000000
2/12/2012	7:00:22 PM	H2 MFC set to  0.000000
2/12/2012	7:00:22 PM	BCl3 MFC set to  0.000000
2/12/2012	7:00:22 PM	PH3 MFC set to  0.000000
2/12/2012	7:00:22 PM	SiCl4 MFC set to  0.000000
2/12/2012	7:00:22 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	7:00:22 PM	Tube furnace set to 200
2/12/2012	7:00:52 PM	Helium valve closed
2/12/2012	7:00:52 PM	H2 valve closed
2/12/2012	7:00:52 PM	BCl3 valve closed
2/12/2012	7:00:52 PM	PH3 valve closed
2/12/2012	7:00:52 PM	SiCl4 pre valve closed
2/12/2012	7:00:52 PM	SiCl4 post valve closed
2/12/2012	7:00:52 PM	Bypass valve closed
2/12/2012	7:00:52 PM	Bubbler valve closed
2/12/2012	7:00:52 PM	Main Vac valve opened
2/12/2012	7:00:52 PM	Helium MFC set to  0.000000
2/12/2012	7:00:52 PM	H2 MFC set to  0.000000
2/12/2012	7:00:52 PM	BCl3 MFC set to  0.000000
2/12/2012	7:00:52 PM	PH3 MFC set to  0.000000
2/12/2012	7:00:52 PM	SiCl4 MFC set to  0.000000
2/12/2012	7:00:52 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	7:00:52 PM	Tube furnace set to 0
2/12/2012	7:00:53 PM	Run finished at 7:00 PM
2/12/2012	7:25:37 PM	Main Vac valve closed
2/12/2012	7:25:48 PM	Main Vac valve opened
2/12/2012	7:26:30 PM	Recipe started at 7:26 PM
2/12/2012	7:26:30 PM	Helium valve closed
2/12/2012	7:26:30 PM	H2 valve closed
2/12/2012	7:26:30 PM	BCl3 valve closed
2/12/2012	7:26:30 PM	PH3 valve closed
2/12/2012	7:26:30 PM	SiCl4 pre valve closed
2/12/2012	7:26:30 PM	SiCl4 post valve closed
2/12/2012	7:26:30 PM	Main Vac valve closed
2/12/2012	7:26:30 PM	Bypass valve closed
2/12/2012	7:26:30 PM	Bubbler valve closed
2/12/2012	7:26:30 PM	Helium MFC set to  0.000000
2/12/2012	7:26:30 PM	H2 MFC set to  0.000000
2/12/2012	7:26:30 PM	BCl3 MFC set to  0.000000
2/12/2012	7:26:30 PM	PH3 MFC set to  0.000000
2/12/2012	7:26:30 PM	SiCl4 MFC set to  0.000000
2/12/2012	7:26:30 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	7:26:30 PM	Tube furnace set to 0
2/12/2012	7:26:33 PM	Helium valve closed
2/12/2012	7:26:33 PM	BCl3 valve closed
2/12/2012	7:26:33 PM	PH3 valve closed
2/12/2012	7:26:33 PM	SiCl4 pre valve closed
2/12/2012	7:26:33 PM	SiCl4 post valve closed
2/12/2012	7:26:33 PM	Main Vac valve closed
2/12/2012	7:26:33 PM	Bypass valve closed
2/12/2012	7:26:33 PM	Bubbler valve closed
2/12/2012	7:26:33 PM	H2 valve opened
2/12/2012	7:26:33 PM	Helium MFC set to  0.000000
2/12/2012	7:26:33 PM	H2 MFC set to  500.000000
2/12/2012	7:26:33 PM	BCl3 MFC set to  0.000000
2/12/2012	7:26:33 PM	PH3 MFC set to  0.000000
2/12/2012	7:26:33 PM	SiCl4 MFC set to  0.000000
2/12/2012	7:26:33 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	7:26:33 PM	Tube furnace set to 0
2/12/2012	7:27:38 PM	Helium valve closed
2/12/2012	7:27:38 PM	BCl3 valve closed
2/12/2012	7:27:38 PM	PH3 valve closed
2/12/2012	7:27:38 PM	SiCl4 pre valve closed
2/12/2012	7:27:38 PM	SiCl4 post valve closed
2/12/2012	7:27:38 PM	Main Vac valve closed
2/12/2012	7:27:38 PM	Bypass valve closed
2/12/2012	7:27:38 PM	H2 valve opened
2/12/2012	7:27:38 PM	Bubbler valve opened
2/12/2012	7:27:38 PM	Helium MFC set to  0.000000
2/12/2012	7:27:38 PM	H2 MFC set to  500.000000
2/12/2012	7:27:38 PM	BCl3 MFC set to  0.000000
2/12/2012	7:27:38 PM	PH3 MFC set to  0.000000
2/12/2012	7:27:38 PM	SiCl4 MFC set to  0.000000
2/12/2012	7:27:38 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	7:27:38 PM	Tube furnace set to 0
2/12/2012	7:27:39 PM	Helium valve closed
2/12/2012	7:27:39 PM	BCl3 valve closed
2/12/2012	7:27:39 PM	PH3 valve closed
2/12/2012	7:27:39 PM	SiCl4 pre valve closed
2/12/2012	7:27:39 PM	SiCl4 post valve closed
2/12/2012	7:27:39 PM	Main Vac valve closed
2/12/2012	7:27:39 PM	Bypass valve closed
2/12/2012	7:27:39 PM	H2 valve opened
2/12/2012	7:27:39 PM	Bubbler valve opened
2/12/2012	7:27:39 PM	Helium MFC set to  0.000000
2/12/2012	7:27:39 PM	H2 MFC set to  500.000000
2/12/2012	7:27:39 PM	BCl3 MFC set to  0.000000
2/12/2012	7:27:39 PM	PH3 MFC set to  0.000000
2/12/2012	7:27:39 PM	SiCl4 MFC set to  0.000000
2/12/2012	7:27:39 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	7:27:39 PM	Tube furnace set to 1000
2/12/2012	7:47:39 PM	Helium valve closed
2/12/2012	7:47:39 PM	BCl3 valve closed
2/12/2012	7:47:39 PM	Main Vac valve closed
2/12/2012	7:47:39 PM	Bypass valve closed
2/12/2012	7:47:39 PM	H2 valve opened
2/12/2012	7:47:39 PM	PH3 valve opened
2/12/2012	7:47:39 PM	SiCl4 pre valve opened
2/12/2012	7:47:39 PM	SiCl4 post valve opened
2/12/2012	7:47:39 PM	Bubbler valve opened
2/12/2012	7:47:39 PM	Helium MFC set to  0.000000
2/12/2012	7:47:39 PM	H2 MFC set to  500.000000
2/12/2012	7:47:39 PM	BCl3 MFC set to  0.000000
2/12/2012	7:47:39 PM	PH3 MFC set to  1.000000
2/12/2012	7:47:39 PM	SiCl4 MFC set to  50.000000
2/12/2012	7:47:39 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	7:47:39 PM	Tube furnace set to 1000
2/12/2012	8:02:39 PM	Helium valve closed
2/12/2012	8:02:39 PM	BCl3 valve closed
2/12/2012	8:02:39 PM	PH3 valve closed
2/12/2012	8:02:39 PM	SiCl4 pre valve closed
2/12/2012	8:02:39 PM	SiCl4 post valve closed
2/12/2012	8:02:39 PM	Main Vac valve closed
2/12/2012	8:02:39 PM	Bypass valve closed
2/12/2012	8:02:39 PM	H2 valve opened
2/12/2012	8:02:39 PM	Bubbler valve opened
2/12/2012	8:02:39 PM	Helium MFC set to  0.000000
2/12/2012	8:02:39 PM	H2 MFC set to  500.000000
2/12/2012	8:02:39 PM	BCl3 MFC set to  0.000000
2/12/2012	8:02:39 PM	PH3 MFC set to  0.000000
2/12/2012	8:02:39 PM	SiCl4 MFC set to  0.000000
2/12/2012	8:02:39 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:02:40 PM	Tube furnace set to 950
2/12/2012	8:04:40 PM	Helium valve closed
2/12/2012	8:04:40 PM	BCl3 valve closed
2/12/2012	8:04:40 PM	PH3 valve closed
2/12/2012	8:04:40 PM	SiCl4 pre valve closed
2/12/2012	8:04:40 PM	SiCl4 post valve closed
2/12/2012	8:04:40 PM	Main Vac valve closed
2/12/2012	8:04:40 PM	Bypass valve closed
2/12/2012	8:04:40 PM	H2 valve opened
2/12/2012	8:04:40 PM	Bubbler valve opened
2/12/2012	8:04:40 PM	Helium MFC set to  0.000000
2/12/2012	8:04:40 PM	H2 MFC set to  500.000000
2/12/2012	8:04:40 PM	BCl3 MFC set to  0.000000
2/12/2012	8:04:40 PM	PH3 MFC set to  0.000000
2/12/2012	8:04:40 PM	SiCl4 MFC set to  0.000000
2/12/2012	8:04:40 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:04:40 PM	Tube furnace set to 900
2/12/2012	8:06:40 PM	Helium valve closed
2/12/2012	8:06:40 PM	BCl3 valve closed
2/12/2012	8:06:40 PM	PH3 valve closed
2/12/2012	8:06:40 PM	SiCl4 pre valve closed
2/12/2012	8:06:40 PM	SiCl4 post valve closed
2/12/2012	8:06:40 PM	Main Vac valve closed
2/12/2012	8:06:40 PM	Bypass valve closed
2/12/2012	8:06:40 PM	H2 valve opened
2/12/2012	8:06:40 PM	Bubbler valve opened
2/12/2012	8:06:40 PM	Helium MFC set to  0.000000
2/12/2012	8:06:40 PM	H2 MFC set to  500.000000
2/12/2012	8:06:40 PM	BCl3 MFC set to  0.000000
2/12/2012	8:06:40 PM	PH3 MFC set to  0.000000
2/12/2012	8:06:40 PM	SiCl4 MFC set to  0.000000
2/12/2012	8:06:40 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:06:40 PM	Tube furnace set to 850
2/12/2012	8:08:40 PM	H2 valve closed
2/12/2012	8:08:40 PM	BCl3 valve closed
2/12/2012	8:08:40 PM	PH3 valve closed
2/12/2012	8:08:40 PM	SiCl4 pre valve closed
2/12/2012	8:08:40 PM	SiCl4 post valve closed
2/12/2012	8:08:40 PM	Main Vac valve closed
2/12/2012	8:08:40 PM	Bypass valve closed
2/12/2012	8:08:40 PM	Helium valve opened
2/12/2012	8:08:40 PM	Bubbler valve opened
2/12/2012	8:08:40 PM	Helium MFC set to  500.000000
2/12/2012	8:08:40 PM	H2 MFC set to  0.000000
2/12/2012	8:08:40 PM	BCl3 MFC set to  0.000000
2/12/2012	8:08:40 PM	PH3 MFC set to  0.000000
2/12/2012	8:08:40 PM	SiCl4 MFC set to  0.000000
2/12/2012	8:08:40 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:08:40 PM	Tube furnace set to 800
2/12/2012	8:10:40 PM	H2 valve closed
2/12/2012	8:10:40 PM	BCl3 valve closed
2/12/2012	8:10:40 PM	PH3 valve closed
2/12/2012	8:10:40 PM	SiCl4 pre valve closed
2/12/2012	8:10:40 PM	SiCl4 post valve closed
2/12/2012	8:10:40 PM	Main Vac valve closed
2/12/2012	8:10:40 PM	Bypass valve closed
2/12/2012	8:10:40 PM	Helium valve opened
2/12/2012	8:10:40 PM	Bubbler valve opened
2/12/2012	8:10:40 PM	Helium MFC set to  500.000000
2/12/2012	8:10:40 PM	H2 MFC set to  0.000000
2/12/2012	8:10:40 PM	BCl3 MFC set to  0.000000
2/12/2012	8:10:40 PM	PH3 MFC set to  0.000000
2/12/2012	8:10:40 PM	SiCl4 MFC set to  0.000000
2/12/2012	8:10:40 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:10:40 PM	Tube furnace set to 750
2/12/2012	8:12:40 PM	H2 valve closed
2/12/2012	8:12:40 PM	BCl3 valve closed
2/12/2012	8:12:40 PM	PH3 valve closed
2/12/2012	8:12:40 PM	SiCl4 pre valve closed
2/12/2012	8:12:40 PM	SiCl4 post valve closed
2/12/2012	8:12:40 PM	Main Vac valve closed
2/12/2012	8:12:40 PM	Bypass valve closed
2/12/2012	8:12:40 PM	Helium valve opened
2/12/2012	8:12:40 PM	Bubbler valve opened
2/12/2012	8:12:40 PM	Helium MFC set to  500.000000
2/12/2012	8:12:40 PM	H2 MFC set to  0.000000
2/12/2012	8:12:40 PM	BCl3 MFC set to  0.000000
2/12/2012	8:12:40 PM	PH3 MFC set to  0.000000
2/12/2012	8:12:40 PM	SiCl4 MFC set to  0.000000
2/12/2012	8:12:40 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:12:41 PM	Tube furnace set to 0
2/12/2012	8:32:41 PM	Helium valve closed
2/12/2012	8:32:41 PM	H2 valve closed
2/12/2012	8:32:41 PM	BCl3 valve closed
2/12/2012	8:32:41 PM	PH3 valve closed
2/12/2012	8:32:41 PM	SiCl4 pre valve closed
2/12/2012	8:32:41 PM	SiCl4 post valve closed
2/12/2012	8:32:41 PM	Main Vac valve closed
2/12/2012	8:32:41 PM	Bypass valve closed
2/12/2012	8:32:41 PM	Bubbler valve closed
2/12/2012	8:32:41 PM	Helium MFC set to  0.000000
2/12/2012	8:32:41 PM	H2 MFC set to  0.000000
2/12/2012	8:32:41 PM	BCl3 MFC set to  0.000000
2/12/2012	8:32:41 PM	PH3 MFC set to  0.000000
2/12/2012	8:32:41 PM	SiCl4 MFC set to  0.000000
2/12/2012	8:32:41 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:32:41 PM	Tube furnace set to 0
2/12/2012	8:32:42 PM	Run finished at 8:32 PM
2/12/2012	8:41:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2012	8:41:54 PM	Recipe started at 8:41 PM
2/12/2012	8:41:54 PM	Helium valve closed
2/12/2012	8:41:54 PM	H2 valve closed
2/12/2012	8:41:54 PM	BCl3 valve closed
2/12/2012	8:41:54 PM	PH3 valve closed
2/12/2012	8:41:54 PM	SiCl4 pre valve closed
2/12/2012	8:41:54 PM	SiCl4 post valve closed
2/12/2012	8:41:54 PM	Main Vac valve closed
2/12/2012	8:41:54 PM	Bypass valve closed
2/12/2012	8:41:54 PM	Bubbler valve closed
2/12/2012	8:41:54 PM	Helium MFC set to  0.000000
2/12/2012	8:41:54 PM	H2 MFC set to  0.000000
2/12/2012	8:41:54 PM	BCl3 MFC set to  0.000000
2/12/2012	8:41:54 PM	PH3 MFC set to  0.000000
2/12/2012	8:41:54 PM	SiCl4 MFC set to  0.000000
2/12/2012	8:41:54 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:41:54 PM	Tube furnace set to 0
2/12/2012	8:41:57 PM	H2 valve closed
2/12/2012	8:41:57 PM	BCl3 valve closed
2/12/2012	8:41:57 PM	PH3 valve closed
2/12/2012	8:41:57 PM	SiCl4 pre valve closed
2/12/2012	8:41:57 PM	SiCl4 post valve closed
2/12/2012	8:41:57 PM	Main Vac valve closed
2/12/2012	8:41:57 PM	Bypass valve closed
2/12/2012	8:41:57 PM	Bubbler valve closed
2/12/2012	8:41:57 PM	Helium valve opened
2/12/2012	8:41:57 PM	Helium MFC set to  500.000000
2/12/2012	8:41:57 PM	H2 MFC set to  0.000000
2/12/2012	8:41:57 PM	BCl3 MFC set to  0.000000
2/12/2012	8:41:57 PM	PH3 MFC set to  0.000000
2/12/2012	8:41:57 PM	SiCl4 MFC set to  0.000000
2/12/2012	8:41:57 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:41:57 PM	Tube furnace set to 0
2/12/2012	8:41:59 PM	Helium valve closed
2/12/2012	8:41:59 PM	H2 valve closed
2/12/2012	8:41:59 PM	BCl3 valve closed
2/12/2012	8:41:59 PM	PH3 valve closed
2/12/2012	8:41:59 PM	SiCl4 pre valve closed
2/12/2012	8:41:59 PM	SiCl4 post valve closed
2/12/2012	8:41:59 PM	Main Vac valve closed
2/12/2012	8:41:59 PM	Bypass valve closed
2/12/2012	8:41:59 PM	Bubbler valve closed
2/12/2012	8:41:59 PM	Helium MFC set to  0.000000
2/12/2012	8:41:59 PM	H2 MFC set to  0.000000
2/12/2012	8:41:59 PM	BCl3 MFC set to  0.000000
2/12/2012	8:41:59 PM	PH3 MFC set to  0.000000
2/12/2012	8:41:59 PM	SiCl4 MFC set to  0.000000
2/12/2012	8:41:59 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:41:59 PM	Tube furnace set to 0
2/12/2012	8:42:00 PM	Run finished at 8:42 PM
2/12/2012	8:42:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2012	8:44:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2012	8:44:35 PM	Recipe started at 8:44 PM
2/12/2012	8:44:35 PM	Helium valve closed
2/12/2012	8:44:35 PM	H2 valve closed
2/12/2012	8:44:35 PM	BCl3 valve closed
2/12/2012	8:44:35 PM	PH3 valve closed
2/12/2012	8:44:35 PM	SiCl4 pre valve closed
2/12/2012	8:44:35 PM	SiCl4 post valve closed
2/12/2012	8:44:35 PM	Main Vac valve closed
2/12/2012	8:44:35 PM	Bubbler valve closed
2/12/2012	8:44:35 PM	Bypass valve opened
2/12/2012	8:44:35 PM	Helium MFC set to  0.000000
2/12/2012	8:44:35 PM	H2 MFC set to  0.000000
2/12/2012	8:44:35 PM	BCl3 MFC set to  0.000000
2/12/2012	8:44:35 PM	PH3 MFC set to  0.000000
2/12/2012	8:44:35 PM	SiCl4 MFC set to  0.000000
2/12/2012	8:44:35 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:44:35 PM	Tube furnace set to 0
2/12/2012	8:45:35 PM	Helium valve closed
2/12/2012	8:45:35 PM	H2 valve closed
2/12/2012	8:45:35 PM	BCl3 valve closed
2/12/2012	8:45:35 PM	PH3 valve closed
2/12/2012	8:45:35 PM	SiCl4 pre valve closed
2/12/2012	8:45:35 PM	SiCl4 post valve closed
2/12/2012	8:45:35 PM	Main Vac valve closed
2/12/2012	8:45:35 PM	Bubbler valve closed
2/12/2012	8:45:35 PM	Bypass valve opened
2/12/2012	8:45:35 PM	Helium MFC set to  0.000000
2/12/2012	8:45:35 PM	H2 MFC set to  0.000000
2/12/2012	8:45:35 PM	BCl3 MFC set to  0.000000
2/12/2012	8:45:35 PM	PH3 MFC set to  0.000000
2/12/2012	8:45:35 PM	SiCl4 MFC set to  0.000000
2/12/2012	8:45:35 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:45:35 PM	Tube furnace set to 0
2/12/2012	8:46:35 PM	Helium valve closed
2/12/2012	8:46:35 PM	H2 valve closed
2/12/2012	8:46:35 PM	BCl3 valve closed
2/12/2012	8:46:35 PM	PH3 valve closed
2/12/2012	8:46:35 PM	SiCl4 pre valve closed
2/12/2012	8:46:35 PM	SiCl4 post valve closed
2/12/2012	8:46:35 PM	Bypass valve closed
2/12/2012	8:46:35 PM	Bubbler valve closed
2/12/2012	8:46:35 PM	Main Vac valve opened
2/12/2012	8:46:35 PM	Helium MFC set to  0.000000
2/12/2012	8:46:35 PM	H2 MFC set to  0.000000
2/12/2012	8:46:35 PM	BCl3 MFC set to  0.000000
2/12/2012	8:46:35 PM	PH3 MFC set to  0.000000
2/12/2012	8:46:35 PM	SiCl4 MFC set to  0.000000
2/12/2012	8:46:35 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:46:35 PM	Tube furnace set to 0
2/12/2012	8:46:36 PM	Run finished at 8:46 PM
2/12/2012	8:46:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2012	8:58:49 PM	Recipe started at 8:58 PM
2/12/2012	8:58:49 PM	Helium valve closed
2/12/2012	8:58:49 PM	H2 valve closed
2/12/2012	8:58:49 PM	BCl3 valve closed
2/12/2012	8:58:49 PM	PH3 valve closed
2/12/2012	8:58:49 PM	SiCl4 pre valve closed
2/12/2012	8:58:49 PM	SiCl4 post valve closed
2/12/2012	8:58:49 PM	Bypass valve closed
2/12/2012	8:58:49 PM	Bubbler valve closed
2/12/2012	8:58:49 PM	Main Vac valve opened
2/12/2012	8:58:49 PM	Helium MFC set to  0.000000
2/12/2012	8:58:49 PM	H2 MFC set to  0.000000
2/12/2012	8:58:49 PM	BCl3 MFC set to  0.000000
2/12/2012	8:58:49 PM	PH3 MFC set to  0.000000
2/12/2012	8:58:49 PM	SiCl4 MFC set to  0.000000
2/12/2012	8:58:49 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:58:49 PM	Tube furnace set to 0
2/12/2012	8:59:19 PM	H2 valve closed
2/12/2012	8:59:19 PM	BCl3 valve closed
2/12/2012	8:59:19 PM	PH3 valve closed
2/12/2012	8:59:19 PM	SiCl4 pre valve closed
2/12/2012	8:59:19 PM	SiCl4 post valve closed
2/12/2012	8:59:19 PM	Bypass valve closed
2/12/2012	8:59:19 PM	Bubbler valve closed
2/12/2012	8:59:19 PM	Helium valve opened
2/12/2012	8:59:19 PM	Main Vac valve opened
2/12/2012	8:59:19 PM	Helium MFC set to  20.000000
2/12/2012	8:59:19 PM	H2 MFC set to  0.000000
2/12/2012	8:59:19 PM	BCl3 MFC set to  0.000000
2/12/2012	8:59:19 PM	PH3 MFC set to  0.000000
2/12/2012	8:59:19 PM	SiCl4 MFC set to  0.000000
2/12/2012	8:59:19 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:59:19 PM	Tube furnace set to 0
2/12/2012	8:59:49 PM	Helium valve closed
2/12/2012	8:59:49 PM	H2 valve closed
2/12/2012	8:59:49 PM	BCl3 valve closed
2/12/2012	8:59:49 PM	PH3 valve closed
2/12/2012	8:59:49 PM	SiCl4 pre valve closed
2/12/2012	8:59:49 PM	SiCl4 post valve closed
2/12/2012	8:59:49 PM	Bypass valve closed
2/12/2012	8:59:49 PM	Bubbler valve closed
2/12/2012	8:59:49 PM	Main Vac valve opened
2/12/2012	8:59:49 PM	Helium MFC set to  0.000000
2/12/2012	8:59:49 PM	H2 MFC set to  0.000000
2/12/2012	8:59:49 PM	BCl3 MFC set to  0.000000
2/12/2012	8:59:49 PM	PH3 MFC set to  0.000000
2/12/2012	8:59:49 PM	SiCl4 MFC set to  0.000000
2/12/2012	8:59:49 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	8:59:49 PM	Tube furnace set to 0
2/12/2012	9:00:19 PM	H2 valve closed
2/12/2012	9:00:19 PM	BCl3 valve closed
2/12/2012	9:00:19 PM	PH3 valve closed
2/12/2012	9:00:19 PM	SiCl4 pre valve closed
2/12/2012	9:00:19 PM	SiCl4 post valve closed
2/12/2012	9:00:19 PM	Bypass valve closed
2/12/2012	9:00:19 PM	Bubbler valve closed
2/12/2012	9:00:19 PM	Helium valve opened
2/12/2012	9:00:19 PM	Main Vac valve opened
2/12/2012	9:00:19 PM	Helium MFC set to  20.000000
2/12/2012	9:00:19 PM	H2 MFC set to  0.000000
2/12/2012	9:00:19 PM	BCl3 MFC set to  0.000000
2/12/2012	9:00:19 PM	PH3 MFC set to  0.000000
2/12/2012	9:00:19 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:00:19 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:00:19 PM	Tube furnace set to 0
2/12/2012	9:00:49 PM	Helium valve closed
2/12/2012	9:00:50 PM	H2 valve closed
2/12/2012	9:00:50 PM	BCl3 valve closed
2/12/2012	9:00:50 PM	PH3 valve closed
2/12/2012	9:00:50 PM	SiCl4 pre valve closed
2/12/2012	9:00:50 PM	SiCl4 post valve closed
2/12/2012	9:00:50 PM	Bypass valve closed
2/12/2012	9:00:50 PM	Bubbler valve closed
2/12/2012	9:00:50 PM	Main Vac valve opened
2/12/2012	9:00:50 PM	Helium MFC set to  0.000000
2/12/2012	9:00:50 PM	H2 MFC set to  0.000000
2/12/2012	9:00:50 PM	BCl3 MFC set to  0.000000
2/12/2012	9:00:50 PM	PH3 MFC set to  0.000000
2/12/2012	9:00:50 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:00:50 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:00:50 PM	Tube furnace set to 0
2/12/2012	9:01:20 PM	H2 valve closed
2/12/2012	9:01:20 PM	BCl3 valve closed
2/12/2012	9:01:20 PM	PH3 valve closed
2/12/2012	9:01:20 PM	SiCl4 pre valve closed
2/12/2012	9:01:20 PM	SiCl4 post valve closed
2/12/2012	9:01:20 PM	Bypass valve closed
2/12/2012	9:01:20 PM	Bubbler valve closed
2/12/2012	9:01:20 PM	Helium valve opened
2/12/2012	9:01:20 PM	Main Vac valve opened
2/12/2012	9:01:20 PM	Helium MFC set to  20.000000
2/12/2012	9:01:20 PM	H2 MFC set to  0.000000
2/12/2012	9:01:20 PM	BCl3 MFC set to  0.000000
2/12/2012	9:01:20 PM	PH3 MFC set to  0.000000
2/12/2012	9:01:20 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:01:20 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:01:20 PM	Tube furnace set to 0
2/12/2012	9:01:50 PM	Helium valve closed
2/12/2012	9:01:50 PM	H2 valve closed
2/12/2012	9:01:50 PM	BCl3 valve closed
2/12/2012	9:01:50 PM	PH3 valve closed
2/12/2012	9:01:50 PM	SiCl4 pre valve closed
2/12/2012	9:01:50 PM	SiCl4 post valve closed
2/12/2012	9:01:50 PM	Bypass valve closed
2/12/2012	9:01:50 PM	Bubbler valve closed
2/12/2012	9:01:50 PM	Main Vac valve opened
2/12/2012	9:01:50 PM	Helium MFC set to  0.000000
2/12/2012	9:01:50 PM	H2 MFC set to  0.000000
2/12/2012	9:01:50 PM	BCl3 MFC set to  0.000000
2/12/2012	9:01:50 PM	PH3 MFC set to  0.000000
2/12/2012	9:01:50 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:01:50 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:01:50 PM	Tube furnace set to 0
2/12/2012	9:02:20 PM	H2 valve closed
2/12/2012	9:02:20 PM	BCl3 valve closed
2/12/2012	9:02:20 PM	PH3 valve closed
2/12/2012	9:02:20 PM	SiCl4 pre valve closed
2/12/2012	9:02:20 PM	SiCl4 post valve closed
2/12/2012	9:02:20 PM	Bypass valve closed
2/12/2012	9:02:20 PM	Bubbler valve closed
2/12/2012	9:02:20 PM	Helium valve opened
2/12/2012	9:02:20 PM	Main Vac valve opened
2/12/2012	9:02:20 PM	Helium MFC set to  20.000000
2/12/2012	9:02:20 PM	H2 MFC set to  0.000000
2/12/2012	9:02:20 PM	BCl3 MFC set to  0.000000
2/12/2012	9:02:20 PM	PH3 MFC set to  0.000000
2/12/2012	9:02:20 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:02:20 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:02:20 PM	Tube furnace set to 0
2/12/2012	9:02:50 PM	Helium valve closed
2/12/2012	9:02:50 PM	H2 valve closed
2/12/2012	9:02:50 PM	BCl3 valve closed
2/12/2012	9:02:50 PM	PH3 valve closed
2/12/2012	9:02:50 PM	SiCl4 pre valve closed
2/12/2012	9:02:50 PM	SiCl4 post valve closed
2/12/2012	9:02:50 PM	Bypass valve closed
2/12/2012	9:02:50 PM	Bubbler valve closed
2/12/2012	9:02:50 PM	Main Vac valve opened
2/12/2012	9:02:50 PM	Helium MFC set to  0.000000
2/12/2012	9:02:50 PM	H2 MFC set to  0.000000
2/12/2012	9:02:50 PM	BCl3 MFC set to  0.000000
2/12/2012	9:02:50 PM	PH3 MFC set to  0.000000
2/12/2012	9:02:50 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:02:50 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:02:51 PM	Tube furnace set to 0
2/12/2012	9:03:21 PM	H2 valve closed
2/12/2012	9:03:21 PM	BCl3 valve closed
2/12/2012	9:03:21 PM	PH3 valve closed
2/12/2012	9:03:21 PM	SiCl4 pre valve closed
2/12/2012	9:03:21 PM	SiCl4 post valve closed
2/12/2012	9:03:21 PM	Bypass valve closed
2/12/2012	9:03:21 PM	Bubbler valve closed
2/12/2012	9:03:21 PM	Helium valve opened
2/12/2012	9:03:21 PM	Main Vac valve opened
2/12/2012	9:03:21 PM	Helium MFC set to  20.000000
2/12/2012	9:03:21 PM	H2 MFC set to  0.000000
2/12/2012	9:03:21 PM	BCl3 MFC set to  0.000000
2/12/2012	9:03:21 PM	PH3 MFC set to  0.000000
2/12/2012	9:03:21 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:03:21 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:03:21 PM	Tube furnace set to 0
2/12/2012	9:03:51 PM	Helium valve closed
2/12/2012	9:03:51 PM	H2 valve closed
2/12/2012	9:03:51 PM	BCl3 valve closed
2/12/2012	9:03:51 PM	PH3 valve closed
2/12/2012	9:03:51 PM	SiCl4 pre valve closed
2/12/2012	9:03:51 PM	SiCl4 post valve closed
2/12/2012	9:03:51 PM	Bypass valve closed
2/12/2012	9:03:51 PM	Bubbler valve closed
2/12/2012	9:03:51 PM	Main Vac valve opened
2/12/2012	9:03:51 PM	Helium MFC set to  0.000000
2/12/2012	9:03:51 PM	H2 MFC set to  0.000000
2/12/2012	9:03:51 PM	BCl3 MFC set to  0.000000
2/12/2012	9:03:51 PM	PH3 MFC set to  0.000000
2/12/2012	9:03:51 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:03:51 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:03:51 PM	Tube furnace set to 0
2/12/2012	9:04:21 PM	H2 valve closed
2/12/2012	9:04:21 PM	BCl3 valve closed
2/12/2012	9:04:21 PM	PH3 valve closed
2/12/2012	9:04:21 PM	SiCl4 pre valve closed
2/12/2012	9:04:21 PM	SiCl4 post valve closed
2/12/2012	9:04:21 PM	Bypass valve closed
2/12/2012	9:04:21 PM	Bubbler valve closed
2/12/2012	9:04:21 PM	Helium valve opened
2/12/2012	9:04:21 PM	Main Vac valve opened
2/12/2012	9:04:21 PM	Helium MFC set to  20.000000
2/12/2012	9:04:21 PM	H2 MFC set to  0.000000
2/12/2012	9:04:21 PM	BCl3 MFC set to  0.000000
2/12/2012	9:04:21 PM	PH3 MFC set to  0.000000
2/12/2012	9:04:21 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:04:21 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:04:21 PM	Tube furnace set to 0
2/12/2012	9:04:51 PM	Helium valve closed
2/12/2012	9:04:51 PM	H2 valve closed
2/12/2012	9:04:51 PM	BCl3 valve closed
2/12/2012	9:04:51 PM	PH3 valve closed
2/12/2012	9:04:51 PM	SiCl4 pre valve closed
2/12/2012	9:04:51 PM	SiCl4 post valve closed
2/12/2012	9:04:51 PM	Bypass valve closed
2/12/2012	9:04:51 PM	Bubbler valve closed
2/12/2012	9:04:51 PM	Main Vac valve opened
2/12/2012	9:04:51 PM	Helium MFC set to  0.000000
2/12/2012	9:04:51 PM	H2 MFC set to  0.000000
2/12/2012	9:04:51 PM	BCl3 MFC set to  0.000000
2/12/2012	9:04:51 PM	PH3 MFC set to  0.000000
2/12/2012	9:04:51 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:04:51 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:04:51 PM	Tube furnace set to 0
2/12/2012	9:05:21 PM	H2 valve closed
2/12/2012	9:05:21 PM	BCl3 valve closed
2/12/2012	9:05:21 PM	PH3 valve closed
2/12/2012	9:05:21 PM	SiCl4 pre valve closed
2/12/2012	9:05:21 PM	SiCl4 post valve closed
2/12/2012	9:05:21 PM	Bypass valve closed
2/12/2012	9:05:21 PM	Bubbler valve closed
2/12/2012	9:05:21 PM	Helium valve opened
2/12/2012	9:05:21 PM	Main Vac valve opened
2/12/2012	9:05:21 PM	Helium MFC set to  20.000000
2/12/2012	9:05:21 PM	H2 MFC set to  0.000000
2/12/2012	9:05:21 PM	BCl3 MFC set to  0.000000
2/12/2012	9:05:21 PM	PH3 MFC set to  0.000000
2/12/2012	9:05:21 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:05:21 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:05:22 PM	Tube furnace set to 0
2/12/2012	9:05:52 PM	Helium valve closed
2/12/2012	9:05:52 PM	H2 valve closed
2/12/2012	9:05:52 PM	BCl3 valve closed
2/12/2012	9:05:52 PM	PH3 valve closed
2/12/2012	9:05:52 PM	SiCl4 pre valve closed
2/12/2012	9:05:52 PM	SiCl4 post valve closed
2/12/2012	9:05:52 PM	Bypass valve closed
2/12/2012	9:05:52 PM	Bubbler valve closed
2/12/2012	9:05:52 PM	Main Vac valve opened
2/12/2012	9:05:52 PM	Helium MFC set to  0.000000
2/12/2012	9:05:52 PM	H2 MFC set to  0.000000
2/12/2012	9:05:52 PM	BCl3 MFC set to  0.000000
2/12/2012	9:05:52 PM	PH3 MFC set to  0.000000
2/12/2012	9:05:52 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:05:52 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:05:52 PM	Tube furnace set to 0
2/12/2012	9:06:22 PM	H2 valve closed
2/12/2012	9:06:22 PM	BCl3 valve closed
2/12/2012	9:06:22 PM	PH3 valve closed
2/12/2012	9:06:22 PM	SiCl4 pre valve closed
2/12/2012	9:06:22 PM	SiCl4 post valve closed
2/12/2012	9:06:22 PM	Bypass valve closed
2/12/2012	9:06:22 PM	Bubbler valve closed
2/12/2012	9:06:22 PM	Helium valve opened
2/12/2012	9:06:22 PM	Main Vac valve opened
2/12/2012	9:06:22 PM	Helium MFC set to  20.000000
2/12/2012	9:06:22 PM	H2 MFC set to  0.000000
2/12/2012	9:06:22 PM	BCl3 MFC set to  0.000000
2/12/2012	9:06:22 PM	PH3 MFC set to  0.000000
2/12/2012	9:06:22 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:06:22 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:06:22 PM	Tube furnace set to 0
2/12/2012	9:06:52 PM	Helium valve closed
2/12/2012	9:06:52 PM	H2 valve closed
2/12/2012	9:06:52 PM	BCl3 valve closed
2/12/2012	9:06:52 PM	PH3 valve closed
2/12/2012	9:06:52 PM	SiCl4 pre valve closed
2/12/2012	9:06:52 PM	SiCl4 post valve closed
2/12/2012	9:06:52 PM	Bypass valve closed
2/12/2012	9:06:52 PM	Bubbler valve closed
2/12/2012	9:06:52 PM	Main Vac valve opened
2/12/2012	9:06:52 PM	Helium MFC set to  0.000000
2/12/2012	9:06:52 PM	H2 MFC set to  0.000000
2/12/2012	9:06:52 PM	BCl3 MFC set to  0.000000
2/12/2012	9:06:52 PM	PH3 MFC set to  0.000000
2/12/2012	9:06:52 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:06:52 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:06:52 PM	Tube furnace set to 0
2/12/2012	9:07:22 PM	H2 valve closed
2/12/2012	9:07:22 PM	BCl3 valve closed
2/12/2012	9:07:22 PM	PH3 valve closed
2/12/2012	9:07:22 PM	SiCl4 pre valve closed
2/12/2012	9:07:22 PM	SiCl4 post valve closed
2/12/2012	9:07:22 PM	Bypass valve closed
2/12/2012	9:07:22 PM	Bubbler valve closed
2/12/2012	9:07:22 PM	Helium valve opened
2/12/2012	9:07:22 PM	Main Vac valve opened
2/12/2012	9:07:22 PM	Helium MFC set to  20.000000
2/12/2012	9:07:22 PM	H2 MFC set to  0.000000
2/12/2012	9:07:22 PM	BCl3 MFC set to  0.000000
2/12/2012	9:07:22 PM	PH3 MFC set to  0.000000
2/12/2012	9:07:22 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:07:22 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:07:22 PM	Tube furnace set to 0
2/12/2012	9:07:52 PM	Helium valve closed
2/12/2012	9:07:52 PM	H2 valve closed
2/12/2012	9:07:52 PM	BCl3 valve closed
2/12/2012	9:07:52 PM	PH3 valve closed
2/12/2012	9:07:52 PM	SiCl4 pre valve closed
2/12/2012	9:07:53 PM	SiCl4 post valve closed
2/12/2012	9:07:53 PM	Bypass valve closed
2/12/2012	9:07:53 PM	Bubbler valve closed
2/12/2012	9:07:53 PM	Main Vac valve opened
2/12/2012	9:07:53 PM	Helium MFC set to  0.000000
2/12/2012	9:07:53 PM	H2 MFC set to  0.000000
2/12/2012	9:07:53 PM	BCl3 MFC set to  0.000000
2/12/2012	9:07:53 PM	PH3 MFC set to  0.000000
2/12/2012	9:07:53 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:07:53 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:07:53 PM	Tube furnace set to 200
2/12/2012	9:08:23 PM	H2 valve closed
2/12/2012	9:08:23 PM	BCl3 valve closed
2/12/2012	9:08:23 PM	PH3 valve closed
2/12/2012	9:08:23 PM	SiCl4 pre valve closed
2/12/2012	9:08:23 PM	SiCl4 post valve closed
2/12/2012	9:08:23 PM	Bypass valve closed
2/12/2012	9:08:23 PM	Bubbler valve closed
2/12/2012	9:08:23 PM	Helium valve opened
2/12/2012	9:08:23 PM	Main Vac valve opened
2/12/2012	9:08:23 PM	Helium MFC set to  20.000000
2/12/2012	9:08:23 PM	H2 MFC set to  0.000000
2/12/2012	9:08:23 PM	BCl3 MFC set to  0.000000
2/12/2012	9:08:23 PM	PH3 MFC set to  0.000000
2/12/2012	9:08:23 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:08:23 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:08:23 PM	Tube furnace set to 200
2/12/2012	9:08:53 PM	Helium valve closed
2/12/2012	9:08:53 PM	H2 valve closed
2/12/2012	9:08:53 PM	BCl3 valve closed
2/12/2012	9:08:53 PM	PH3 valve closed
2/12/2012	9:08:53 PM	SiCl4 pre valve closed
2/12/2012	9:08:53 PM	SiCl4 post valve closed
2/12/2012	9:08:53 PM	Bypass valve closed
2/12/2012	9:08:53 PM	Bubbler valve closed
2/12/2012	9:08:53 PM	Main Vac valve opened
2/12/2012	9:08:53 PM	Helium MFC set to  0.000000
2/12/2012	9:08:53 PM	H2 MFC set to  0.000000
2/12/2012	9:08:53 PM	BCl3 MFC set to  0.000000
2/12/2012	9:08:53 PM	PH3 MFC set to  0.000000
2/12/2012	9:08:53 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:08:53 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:08:53 PM	Tube furnace set to 200
2/12/2012	9:09:23 PM	H2 valve closed
2/12/2012	9:09:23 PM	BCl3 valve closed
2/12/2012	9:09:23 PM	PH3 valve closed
2/12/2012	9:09:23 PM	SiCl4 pre valve closed
2/12/2012	9:09:23 PM	SiCl4 post valve closed
2/12/2012	9:09:23 PM	Bypass valve closed
2/12/2012	9:09:23 PM	Bubbler valve closed
2/12/2012	9:09:23 PM	Helium valve opened
2/12/2012	9:09:23 PM	Main Vac valve opened
2/12/2012	9:09:23 PM	Helium MFC set to  20.000000
2/12/2012	9:09:23 PM	H2 MFC set to  0.000000
2/12/2012	9:09:23 PM	BCl3 MFC set to  0.000000
2/12/2012	9:09:23 PM	PH3 MFC set to  0.000000
2/12/2012	9:09:23 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:09:23 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:09:23 PM	Tube furnace set to 200
2/12/2012	9:09:53 PM	Helium valve closed
2/12/2012	9:09:53 PM	H2 valve closed
2/12/2012	9:09:53 PM	BCl3 valve closed
2/12/2012	9:09:53 PM	PH3 valve closed
2/12/2012	9:09:53 PM	SiCl4 pre valve closed
2/12/2012	9:09:53 PM	SiCl4 post valve closed
2/12/2012	9:09:53 PM	Bypass valve closed
2/12/2012	9:09:53 PM	Bubbler valve closed
2/12/2012	9:09:53 PM	Main Vac valve opened
2/12/2012	9:09:53 PM	Helium MFC set to  0.000000
2/12/2012	9:09:53 PM	H2 MFC set to  0.000000
2/12/2012	9:09:53 PM	BCl3 MFC set to  0.000000
2/12/2012	9:09:53 PM	PH3 MFC set to  0.000000
2/12/2012	9:09:53 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:09:53 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:09:53 PM	Tube furnace set to 200
2/12/2012	9:10:24 PM	H2 valve closed
2/12/2012	9:10:24 PM	BCl3 valve closed
2/12/2012	9:10:24 PM	PH3 valve closed
2/12/2012	9:10:24 PM	SiCl4 pre valve closed
2/12/2012	9:10:24 PM	SiCl4 post valve closed
2/12/2012	9:10:24 PM	Bypass valve closed
2/12/2012	9:10:24 PM	Bubbler valve closed
2/12/2012	9:10:24 PM	Helium valve opened
2/12/2012	9:10:24 PM	Main Vac valve opened
2/12/2012	9:10:24 PM	Helium MFC set to  20.000000
2/12/2012	9:10:24 PM	H2 MFC set to  0.000000
2/12/2012	9:10:24 PM	BCl3 MFC set to  0.000000
2/12/2012	9:10:24 PM	PH3 MFC set to  0.000000
2/12/2012	9:10:24 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:10:24 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:10:24 PM	Tube furnace set to 200
2/12/2012	9:10:54 PM	Helium valve closed
2/12/2012	9:10:54 PM	H2 valve closed
2/12/2012	9:10:54 PM	BCl3 valve closed
2/12/2012	9:10:54 PM	PH3 valve closed
2/12/2012	9:10:54 PM	SiCl4 pre valve closed
2/12/2012	9:10:54 PM	SiCl4 post valve closed
2/12/2012	9:10:54 PM	Bypass valve closed
2/12/2012	9:10:54 PM	Bubbler valve closed
2/12/2012	9:10:54 PM	Main Vac valve opened
2/12/2012	9:10:54 PM	Helium MFC set to  0.000000
2/12/2012	9:10:54 PM	H2 MFC set to  0.000000
2/12/2012	9:10:54 PM	BCl3 MFC set to  0.000000
2/12/2012	9:10:54 PM	PH3 MFC set to  0.000000
2/12/2012	9:10:54 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:10:54 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:10:54 PM	Tube furnace set to 200
2/12/2012	9:11:24 PM	H2 valve closed
2/12/2012	9:11:24 PM	BCl3 valve closed
2/12/2012	9:11:24 PM	PH3 valve closed
2/12/2012	9:11:24 PM	SiCl4 pre valve closed
2/12/2012	9:11:24 PM	SiCl4 post valve closed
2/12/2012	9:11:24 PM	Bypass valve closed
2/12/2012	9:11:24 PM	Bubbler valve closed
2/12/2012	9:11:24 PM	Helium valve opened
2/12/2012	9:11:24 PM	Main Vac valve opened
2/12/2012	9:11:24 PM	Helium MFC set to  20.000000
2/12/2012	9:11:24 PM	H2 MFC set to  0.000000
2/12/2012	9:11:24 PM	BCl3 MFC set to  0.000000
2/12/2012	9:11:24 PM	PH3 MFC set to  0.000000
2/12/2012	9:11:24 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:11:24 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:11:24 PM	Tube furnace set to 200
2/12/2012	9:11:54 PM	Helium valve closed
2/12/2012	9:11:54 PM	H2 valve closed
2/12/2012	9:11:54 PM	BCl3 valve closed
2/12/2012	9:11:54 PM	PH3 valve closed
2/12/2012	9:11:54 PM	SiCl4 pre valve closed
2/12/2012	9:11:54 PM	SiCl4 post valve closed
2/12/2012	9:11:54 PM	Bypass valve closed
2/12/2012	9:11:54 PM	Bubbler valve closed
2/12/2012	9:11:54 PM	Main Vac valve opened
2/12/2012	9:11:54 PM	Helium MFC set to  0.000000
2/12/2012	9:11:54 PM	H2 MFC set to  0.000000
2/12/2012	9:11:54 PM	BCl3 MFC set to  0.000000
2/12/2012	9:11:54 PM	PH3 MFC set to  0.000000
2/12/2012	9:11:54 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:11:54 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:11:54 PM	Tube furnace set to 200
2/12/2012	9:12:24 PM	H2 valve closed
2/12/2012	9:12:24 PM	BCl3 valve closed
2/12/2012	9:12:24 PM	PH3 valve closed
2/12/2012	9:12:24 PM	SiCl4 pre valve closed
2/12/2012	9:12:24 PM	SiCl4 post valve closed
2/12/2012	9:12:24 PM	Bypass valve closed
2/12/2012	9:12:24 PM	Bubbler valve closed
2/12/2012	9:12:24 PM	Helium valve opened
2/12/2012	9:12:24 PM	Main Vac valve opened
2/12/2012	9:12:24 PM	Helium MFC set to  20.000000
2/12/2012	9:12:24 PM	H2 MFC set to  0.000000
2/12/2012	9:12:24 PM	BCl3 MFC set to  0.000000
2/12/2012	9:12:24 PM	PH3 MFC set to  0.000000
2/12/2012	9:12:24 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:12:24 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:12:25 PM	Tube furnace set to 200
2/12/2012	9:12:55 PM	Helium valve closed
2/12/2012	9:12:55 PM	H2 valve closed
2/12/2012	9:12:55 PM	BCl3 valve closed
2/12/2012	9:12:55 PM	PH3 valve closed
2/12/2012	9:12:55 PM	SiCl4 pre valve closed
2/12/2012	9:12:55 PM	SiCl4 post valve closed
2/12/2012	9:12:55 PM	Bypass valve closed
2/12/2012	9:12:55 PM	Bubbler valve closed
2/12/2012	9:12:55 PM	Main Vac valve opened
2/12/2012	9:12:55 PM	Helium MFC set to  0.000000
2/12/2012	9:12:55 PM	H2 MFC set to  0.000000
2/12/2012	9:12:55 PM	BCl3 MFC set to  0.000000
2/12/2012	9:12:55 PM	PH3 MFC set to  0.000000
2/12/2012	9:12:55 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:12:55 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:12:55 PM	Tube furnace set to 200
2/12/2012	9:13:25 PM	H2 valve closed
2/12/2012	9:13:25 PM	BCl3 valve closed
2/12/2012	9:13:25 PM	PH3 valve closed
2/12/2012	9:13:25 PM	SiCl4 pre valve closed
2/12/2012	9:13:25 PM	SiCl4 post valve closed
2/12/2012	9:13:25 PM	Bypass valve closed
2/12/2012	9:13:25 PM	Bubbler valve closed
2/12/2012	9:13:25 PM	Helium valve opened
2/12/2012	9:13:25 PM	Main Vac valve opened
2/12/2012	9:13:25 PM	Helium MFC set to  20.000000
2/12/2012	9:13:25 PM	H2 MFC set to  0.000000
2/12/2012	9:13:25 PM	BCl3 MFC set to  0.000000
2/12/2012	9:13:25 PM	PH3 MFC set to  0.000000
2/12/2012	9:13:25 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:13:25 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:13:25 PM	Tube furnace set to 200
2/12/2012	9:13:55 PM	Helium valve closed
2/12/2012	9:13:55 PM	H2 valve closed
2/12/2012	9:13:55 PM	BCl3 valve closed
2/12/2012	9:13:55 PM	PH3 valve closed
2/12/2012	9:13:55 PM	SiCl4 pre valve closed
2/12/2012	9:13:55 PM	SiCl4 post valve closed
2/12/2012	9:13:55 PM	Bypass valve closed
2/12/2012	9:13:55 PM	Bubbler valve closed
2/12/2012	9:13:55 PM	Main Vac valve opened
2/12/2012	9:13:55 PM	Helium MFC set to  0.000000
2/12/2012	9:13:55 PM	H2 MFC set to  0.000000
2/12/2012	9:13:55 PM	BCl3 MFC set to  0.000000
2/12/2012	9:13:55 PM	PH3 MFC set to  0.000000
2/12/2012	9:13:55 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:13:55 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:13:55 PM	Tube furnace set to 0
2/12/2012	9:13:56 PM	Run finished at 9:13 PM
2/12/2012	9:37:54 PM	Main Vac valve closed
2/12/2012	9:38:05 PM	Main Vac valve opened
2/12/2012	9:39:37 PM	Recipe started at 9:39 PM
2/12/2012	9:39:37 PM	Helium valve closed
2/12/2012	9:39:37 PM	H2 valve closed
2/12/2012	9:39:37 PM	BCl3 valve closed
2/12/2012	9:39:37 PM	PH3 valve closed
2/12/2012	9:39:37 PM	SiCl4 pre valve closed
2/12/2012	9:39:37 PM	SiCl4 post valve closed
2/12/2012	9:39:37 PM	Main Vac valve closed
2/12/2012	9:39:37 PM	Bypass valve closed
2/12/2012	9:39:37 PM	Bubbler valve closed
2/12/2012	9:39:37 PM	Helium MFC set to  0.000000
2/12/2012	9:39:37 PM	H2 MFC set to  0.000000
2/12/2012	9:39:37 PM	BCl3 MFC set to  0.000000
2/12/2012	9:39:37 PM	PH3 MFC set to  0.000000
2/12/2012	9:39:37 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:39:37 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:39:37 PM	Tube furnace set to 0
2/12/2012	9:39:41 PM	Helium valve closed
2/12/2012	9:39:41 PM	BCl3 valve closed
2/12/2012	9:39:41 PM	PH3 valve closed
2/12/2012	9:39:41 PM	SiCl4 pre valve closed
2/12/2012	9:39:41 PM	SiCl4 post valve closed
2/12/2012	9:39:41 PM	Main Vac valve closed
2/12/2012	9:39:41 PM	Bypass valve closed
2/12/2012	9:39:41 PM	Bubbler valve closed
2/12/2012	9:39:41 PM	H2 valve opened
2/12/2012	9:39:41 PM	Helium MFC set to  0.000000
2/12/2012	9:39:41 PM	H2 MFC set to  500.000000
2/12/2012	9:39:41 PM	BCl3 MFC set to  0.000000
2/12/2012	9:39:41 PM	PH3 MFC set to  0.000000
2/12/2012	9:39:41 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:39:41 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:39:41 PM	Tube furnace set to 0
2/12/2012	9:40:45 PM	Helium valve closed
2/12/2012	9:40:45 PM	BCl3 valve closed
2/12/2012	9:40:45 PM	PH3 valve closed
2/12/2012	9:40:45 PM	SiCl4 pre valve closed
2/12/2012	9:40:45 PM	SiCl4 post valve closed
2/12/2012	9:40:45 PM	Main Vac valve closed
2/12/2012	9:40:45 PM	Bypass valve closed
2/12/2012	9:40:45 PM	H2 valve opened
2/12/2012	9:40:45 PM	Bubbler valve opened
2/12/2012	9:40:45 PM	Helium MFC set to  0.000000
2/12/2012	9:40:45 PM	H2 MFC set to  500.000000
2/12/2012	9:40:45 PM	BCl3 MFC set to  0.000000
2/12/2012	9:40:45 PM	PH3 MFC set to  0.000000
2/12/2012	9:40:45 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:40:45 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:40:45 PM	Tube furnace set to 0
2/12/2012	9:40:46 PM	Helium valve closed
2/12/2012	9:40:46 PM	BCl3 valve closed
2/12/2012	9:40:46 PM	PH3 valve closed
2/12/2012	9:40:46 PM	SiCl4 pre valve closed
2/12/2012	9:40:46 PM	SiCl4 post valve closed
2/12/2012	9:40:46 PM	Main Vac valve closed
2/12/2012	9:40:46 PM	Bypass valve closed
2/12/2012	9:40:46 PM	H2 valve opened
2/12/2012	9:40:46 PM	Bubbler valve opened
2/12/2012	9:40:46 PM	Helium MFC set to  0.000000
2/12/2012	9:40:46 PM	H2 MFC set to  500.000000
2/12/2012	9:40:46 PM	BCl3 MFC set to  0.000000
2/12/2012	9:40:46 PM	PH3 MFC set to  0.000000
2/12/2012	9:40:46 PM	SiCl4 MFC set to  0.000000
2/12/2012	9:40:46 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	9:40:47 PM	Tube furnace set to 1000
2/12/2012	10:00:47 PM	Helium valve closed
2/12/2012	10:00:47 PM	BCl3 valve closed
2/12/2012	10:00:47 PM	Main Vac valve closed
2/12/2012	10:00:47 PM	Bypass valve closed
2/12/2012	10:00:47 PM	H2 valve opened
2/12/2012	10:00:47 PM	PH3 valve opened
2/12/2012	10:00:47 PM	SiCl4 pre valve opened
2/12/2012	10:00:47 PM	SiCl4 post valve opened
2/12/2012	10:00:47 PM	Bubbler valve opened
2/12/2012	10:00:47 PM	Helium MFC set to  0.000000
2/12/2012	10:00:47 PM	H2 MFC set to  500.000000
2/12/2012	10:00:47 PM	BCl3 MFC set to  0.000000
2/12/2012	10:00:47 PM	PH3 MFC set to  0.800000
2/12/2012	10:00:47 PM	SiCl4 MFC set to  50.000000
2/12/2012	10:00:47 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	10:00:47 PM	Tube furnace set to 1000
2/12/2012	10:17:47 PM	Helium valve closed
2/12/2012	10:17:47 PM	BCl3 valve closed
2/12/2012	10:17:47 PM	PH3 valve closed
2/12/2012	10:17:47 PM	SiCl4 pre valve closed
2/12/2012	10:17:47 PM	SiCl4 post valve closed
2/12/2012	10:17:47 PM	Main Vac valve closed
2/12/2012	10:17:47 PM	Bypass valve closed
2/12/2012	10:17:47 PM	H2 valve opened
2/12/2012	10:17:47 PM	Bubbler valve opened
2/12/2012	10:17:47 PM	Helium MFC set to  0.000000
2/12/2012	10:17:47 PM	H2 MFC set to  500.000000
2/12/2012	10:17:47 PM	BCl3 MFC set to  0.000000
2/12/2012	10:17:47 PM	PH3 MFC set to  0.000000
2/12/2012	10:17:47 PM	SiCl4 MFC set to  0.000000
2/12/2012	10:17:47 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	10:17:47 PM	Tube furnace set to 950
2/12/2012	10:19:47 PM	Helium valve closed
2/12/2012	10:19:47 PM	BCl3 valve closed
2/12/2012	10:19:47 PM	PH3 valve closed
2/12/2012	10:19:47 PM	SiCl4 pre valve closed
2/12/2012	10:19:47 PM	SiCl4 post valve closed
2/12/2012	10:19:47 PM	Main Vac valve closed
2/12/2012	10:19:47 PM	Bypass valve closed
2/12/2012	10:19:47 PM	H2 valve opened
2/12/2012	10:19:47 PM	Bubbler valve opened
2/12/2012	10:19:47 PM	Helium MFC set to  0.000000
2/12/2012	10:19:47 PM	H2 MFC set to  500.000000
2/12/2012	10:19:47 PM	BCl3 MFC set to  0.000000
2/12/2012	10:19:47 PM	PH3 MFC set to  0.000000
2/12/2012	10:19:47 PM	SiCl4 MFC set to  0.000000
2/12/2012	10:19:47 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	10:19:47 PM	Tube furnace set to 900
2/12/2012	10:21:47 PM	Helium valve closed
2/12/2012	10:21:47 PM	BCl3 valve closed
2/12/2012	10:21:47 PM	PH3 valve closed
2/12/2012	10:21:47 PM	SiCl4 pre valve closed
2/12/2012	10:21:47 PM	SiCl4 post valve closed
2/12/2012	10:21:47 PM	Main Vac valve closed
2/12/2012	10:21:47 PM	Bypass valve closed
2/12/2012	10:21:47 PM	H2 valve opened
2/12/2012	10:21:47 PM	Bubbler valve opened
2/12/2012	10:21:47 PM	Helium MFC set to  0.000000
2/12/2012	10:21:47 PM	H2 MFC set to  500.000000
2/12/2012	10:21:47 PM	BCl3 MFC set to  0.000000
2/12/2012	10:21:47 PM	PH3 MFC set to  0.000000
2/12/2012	10:21:47 PM	SiCl4 MFC set to  0.000000
2/12/2012	10:21:47 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	10:21:47 PM	Tube furnace set to 850
2/12/2012	10:23:47 PM	H2 valve closed
2/12/2012	10:23:47 PM	BCl3 valve closed
2/12/2012	10:23:47 PM	PH3 valve closed
2/12/2012	10:23:47 PM	SiCl4 pre valve closed
2/12/2012	10:23:47 PM	SiCl4 post valve closed
2/12/2012	10:23:47 PM	Main Vac valve closed
2/12/2012	10:23:47 PM	Bypass valve closed
2/12/2012	10:23:47 PM	Helium valve opened
2/12/2012	10:23:47 PM	Bubbler valve opened
2/12/2012	10:23:47 PM	Helium MFC set to  500.000000
2/12/2012	10:23:47 PM	H2 MFC set to  0.000000
2/12/2012	10:23:47 PM	BCl3 MFC set to  0.000000
2/12/2012	10:23:47 PM	PH3 MFC set to  0.000000
2/12/2012	10:23:47 PM	SiCl4 MFC set to  0.000000
2/12/2012	10:23:47 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	10:23:48 PM	Tube furnace set to 800
2/12/2012	10:25:48 PM	H2 valve closed
2/12/2012	10:25:48 PM	BCl3 valve closed
2/12/2012	10:25:48 PM	PH3 valve closed
2/12/2012	10:25:48 PM	SiCl4 pre valve closed
2/12/2012	10:25:48 PM	SiCl4 post valve closed
2/12/2012	10:25:48 PM	Main Vac valve closed
2/12/2012	10:25:48 PM	Bypass valve closed
2/12/2012	10:25:48 PM	Helium valve opened
2/12/2012	10:25:48 PM	Bubbler valve opened
2/12/2012	10:25:48 PM	Helium MFC set to  500.000000
2/12/2012	10:25:48 PM	H2 MFC set to  0.000000
2/12/2012	10:25:48 PM	BCl3 MFC set to  0.000000
2/12/2012	10:25:48 PM	PH3 MFC set to  0.000000
2/12/2012	10:25:48 PM	SiCl4 MFC set to  0.000000
2/12/2012	10:25:48 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	10:25:48 PM	Tube furnace set to 750
2/12/2012	10:27:48 PM	H2 valve closed
2/12/2012	10:27:48 PM	BCl3 valve closed
2/12/2012	10:27:48 PM	PH3 valve closed
2/12/2012	10:27:48 PM	SiCl4 pre valve closed
2/12/2012	10:27:48 PM	SiCl4 post valve closed
2/12/2012	10:27:48 PM	Main Vac valve closed
2/12/2012	10:27:48 PM	Bypass valve closed
2/12/2012	10:27:48 PM	Helium valve opened
2/12/2012	10:27:48 PM	Bubbler valve opened
2/12/2012	10:27:48 PM	Helium MFC set to  500.000000
2/12/2012	10:27:48 PM	H2 MFC set to  0.000000
2/12/2012	10:27:48 PM	BCl3 MFC set to  0.000000
2/12/2012	10:27:48 PM	PH3 MFC set to  0.000000
2/12/2012	10:27:48 PM	SiCl4 MFC set to  0.000000
2/12/2012	10:27:48 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	10:27:48 PM	Tube furnace set to 0
2/12/2012	10:47:48 PM	Helium valve closed
2/12/2012	10:47:48 PM	H2 valve closed
2/12/2012	10:47:48 PM	BCl3 valve closed
2/12/2012	10:47:48 PM	PH3 valve closed
2/12/2012	10:47:48 PM	SiCl4 pre valve closed
2/12/2012	10:47:48 PM	SiCl4 post valve closed
2/12/2012	10:47:48 PM	Main Vac valve closed
2/12/2012	10:47:48 PM	Bypass valve closed
2/12/2012	10:47:48 PM	Bubbler valve closed
2/12/2012	10:47:48 PM	Helium MFC set to  0.000000
2/12/2012	10:47:48 PM	H2 MFC set to  0.000000
2/12/2012	10:47:48 PM	BCl3 MFC set to  0.000000
2/12/2012	10:47:48 PM	PH3 MFC set to  0.000000
2/12/2012	10:47:48 PM	SiCl4 MFC set to  0.000000
2/12/2012	10:47:48 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	10:47:48 PM	Tube furnace set to 0
2/12/2012	10:47:49 PM	Run finished at 10:47 PM
2/12/2012	11:33:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2012	11:33:28 PM	Recipe started at 11:33 PM
2/12/2012	11:33:28 PM	Helium valve closed
2/12/2012	11:33:28 PM	H2 valve closed
2/12/2012	11:33:28 PM	BCl3 valve closed
2/12/2012	11:33:28 PM	PH3 valve closed
2/12/2012	11:33:28 PM	SiCl4 pre valve closed
2/12/2012	11:33:28 PM	SiCl4 post valve closed
2/12/2012	11:33:28 PM	Main Vac valve closed
2/12/2012	11:33:28 PM	Bypass valve closed
2/12/2012	11:33:28 PM	Bubbler valve closed
2/12/2012	11:33:28 PM	Helium MFC set to  0.000000
2/12/2012	11:33:28 PM	H2 MFC set to  0.000000
2/12/2012	11:33:28 PM	BCl3 MFC set to  0.000000
2/12/2012	11:33:28 PM	PH3 MFC set to  0.000000
2/12/2012	11:33:28 PM	SiCl4 MFC set to  0.000000
2/12/2012	11:33:28 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	11:33:28 PM	Tube furnace set to 0
2/12/2012	11:33:31 PM	H2 valve closed
2/12/2012	11:33:31 PM	BCl3 valve closed
2/12/2012	11:33:31 PM	PH3 valve closed
2/12/2012	11:33:31 PM	SiCl4 pre valve closed
2/12/2012	11:33:31 PM	SiCl4 post valve closed
2/12/2012	11:33:31 PM	Main Vac valve closed
2/12/2012	11:33:31 PM	Bypass valve closed
2/12/2012	11:33:31 PM	Bubbler valve closed
2/12/2012	11:33:31 PM	Helium valve opened
2/12/2012	11:33:31 PM	Helium MFC set to  500.000000
2/12/2012	11:33:31 PM	H2 MFC set to  0.000000
2/12/2012	11:33:31 PM	BCl3 MFC set to  0.000000
2/12/2012	11:33:31 PM	PH3 MFC set to  0.000000
2/12/2012	11:33:31 PM	SiCl4 MFC set to  0.000000
2/12/2012	11:33:31 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	11:33:31 PM	Tube furnace set to 0
2/12/2012	11:33:36 PM	Helium valve closed
2/12/2012	11:33:36 PM	H2 valve closed
2/12/2012	11:33:36 PM	BCl3 valve closed
2/12/2012	11:33:36 PM	PH3 valve closed
2/12/2012	11:33:36 PM	SiCl4 pre valve closed
2/12/2012	11:33:36 PM	SiCl4 post valve closed
2/12/2012	11:33:36 PM	Main Vac valve closed
2/12/2012	11:33:36 PM	Bypass valve closed
2/12/2012	11:33:36 PM	Bubbler valve closed
2/12/2012	11:33:36 PM	Helium MFC set to  0.000000
2/12/2012	11:33:36 PM	H2 MFC set to  0.000000
2/12/2012	11:33:36 PM	BCl3 MFC set to  0.000000
2/12/2012	11:33:36 PM	PH3 MFC set to  0.000000
2/12/2012	11:33:36 PM	SiCl4 MFC set to  0.000000
2/12/2012	11:33:36 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	11:33:36 PM	Tube furnace set to 0
2/12/2012	11:33:37 PM	Run finished at 11:33 PM
2/12/2012	11:33:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/12/2012	11:36:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/12/2012	11:36:36 PM	Recipe started at 11:36 PM
2/12/2012	11:36:36 PM	Helium valve closed
2/12/2012	11:36:36 PM	H2 valve closed
2/12/2012	11:36:36 PM	BCl3 valve closed
2/12/2012	11:36:36 PM	PH3 valve closed
2/12/2012	11:36:36 PM	SiCl4 pre valve closed
2/12/2012	11:36:36 PM	SiCl4 post valve closed
2/12/2012	11:36:36 PM	Main Vac valve closed
2/12/2012	11:36:36 PM	Bubbler valve closed
2/12/2012	11:36:36 PM	Bypass valve opened
2/12/2012	11:36:36 PM	Helium MFC set to  0.000000
2/12/2012	11:36:36 PM	H2 MFC set to  0.000000
2/12/2012	11:36:36 PM	BCl3 MFC set to  0.000000
2/12/2012	11:36:36 PM	PH3 MFC set to  0.000000
2/12/2012	11:36:36 PM	SiCl4 MFC set to  0.000000
2/12/2012	11:36:36 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	11:36:36 PM	Tube furnace set to 0
2/12/2012	11:37:38 PM	Helium valve closed
2/12/2012	11:37:38 PM	H2 valve closed
2/12/2012	11:37:38 PM	BCl3 valve closed
2/12/2012	11:37:38 PM	PH3 valve closed
2/12/2012	11:37:38 PM	SiCl4 pre valve closed
2/12/2012	11:37:38 PM	SiCl4 post valve closed
2/12/2012	11:37:38 PM	Main Vac valve closed
2/12/2012	11:37:38 PM	Bubbler valve closed
2/12/2012	11:37:38 PM	Bypass valve opened
2/12/2012	11:37:38 PM	Helium MFC set to  0.000000
2/12/2012	11:37:38 PM	H2 MFC set to  0.000000
2/12/2012	11:37:38 PM	BCl3 MFC set to  0.000000
2/12/2012	11:37:38 PM	PH3 MFC set to  0.000000
2/12/2012	11:37:38 PM	SiCl4 MFC set to  0.000000
2/12/2012	11:37:38 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	11:37:39 PM	Tube furnace set to 0
2/12/2012	11:38:39 PM	Helium valve closed
2/12/2012	11:38:39 PM	H2 valve closed
2/12/2012	11:38:39 PM	BCl3 valve closed
2/12/2012	11:38:39 PM	PH3 valve closed
2/12/2012	11:38:39 PM	SiCl4 pre valve closed
2/12/2012	11:38:39 PM	SiCl4 post valve closed
2/12/2012	11:38:39 PM	Bypass valve closed
2/12/2012	11:38:39 PM	Bubbler valve closed
2/12/2012	11:38:39 PM	Main Vac valve opened
2/12/2012	11:38:39 PM	Helium MFC set to  0.000000
2/12/2012	11:38:39 PM	H2 MFC set to  0.000000
2/12/2012	11:38:39 PM	BCl3 MFC set to  0.000000
2/12/2012	11:38:39 PM	PH3 MFC set to  0.000000
2/12/2012	11:38:39 PM	SiCl4 MFC set to  0.000000
2/12/2012	11:38:39 PM	Bypass solenoid MFC set to  0.000000
2/12/2012	11:38:39 PM	Tube furnace set to 0
2/12/2012	11:38:40 PM	Run finished at 11:38 PM
2/12/2012	11:38:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
